According to aspects of the embodiments, there is provided a method of measuring the amount of fountain solution employed in a digital offset lithography printing system. Fountain solution thickness is measured using a diffractive optical element (DOE) configured with grating surfaces varying in a periodic fashion to hold an amount of fountain solution. When radiated with a light source the combination of the grating surface and the fountain solution therein reduces the scattering of the surface structure (“contrast”) that gives rise to a diffraction pattern. The diffractive optical element can be placed on the printing blanket of the lithography printing system or on a separate substrate.

A film thickness control system and a film thickness control method for an evaporation device, an evaporation device and an evaporation method are disclosed. The film thickness control system includes: a driving device, a film thickness meter and a computer; the film thickness meter is mounted on the driving device, connected with the computer, and configured to acquire a coordinate of a measured position of a substrate to be measured from the computer and send an actual film thickness of the measured position to the computer; and the computer is configured, when the actual film thickness does not exceed an error range of a preset film thickness, to calculate a new compensation value according to the actual film thickness, the preset film thickness and a current compensation value, and send the new compensation value to the evaporation device as reference for compensating evaporation.

An electrochemical deposition system includes: an electrochemical deposition chamber including an electrolyte for electrochemical deposition; a substrate holder configured to hold a substrate and including a first cathode that is electrically connected to the substrate; a first actuator configured to adjust a vertical position of the substrate holder within the electrochemical deposition chamber; an anode submerged in the electrolyte; a second cathode arranged between the first cathode and the anode; a first optical probe configured to measure a first reflectivity of the substrate at a first distance from a center of the substrate while the substrate is submerged within the electrolyte during the electrochemical deposition; and a controller configured to, based on the first reflectivity, selectively adjust at least one of power applied to the first cathode, power applied to the second cathode, power applied to the anode, and the vertical position of the substrate holder.

A vacuum processing apparatus includes a processing unit comprising a processing chamber disposed in a vacuum container, a detector detecting a thickness of the target film on a wafer or an end point during the processing of the wafer using a light from the wafer, the detector being functioned to detect the thickness or the end point by comparing a data pattern of obtained in advance indicating light intensities of a plurality of wavelengths related to the film thickness using the wavelength as a parameter and a real data pattern indicating the light intensities of the plurality of wavelengths obtained at a particular time during the processing, and the data pattern being obtained by dividing differential coefficient value of time-series data of the light intensities of the plurality of wavelengths by time-series data indicating values of the light intensities of the plurality of wavelengths.

The invention relates to a method for coating cavity walls, in particular cylinder bores of engine blocks. In the method, a coating is applied to a cavity wall using a coating lance. In addition, a cavity diameter is measured using a measuring apparatus. According to the invention, the method is characterized in that at least a plurality of diameter values of a first cavity are measured at different heights of the first cavity using the measuring apparatus, and in that a coating of variable thickness is applied to a wall of the first or a second cavity using the coaling lance, the thickness of said coating of variable thickness being dependent on the determined diameter values. The invention additionally describes a corresponding coating system.

A system includes a transparent crystal, at least part of which is embedded within a wall and a liner of a processing chamber. The transparent crystal has a proximal end and a distal end, the distal end having a distal surface exposed to an interior of the processing chamber. A transparent thin film is deposited on the distal surface and has chemical properties substantially matching those of the liner. A light coupling device is to: transmit light, from a light source, through the proximal end of the transparent crystal, and focus, into a spectrometer, light received reflected back from a combination of the distal surface, a surface of the transparent thin film, and a surface of a process film layer deposited on the transparent thin film. The spectrometer is to detect a first spectrum within the focused light that is representative of the process film layer.

According to aspects of the embodiments, there is provided a method of measuring the amount of fountain solution employed in a digital offset lithography printing system. Fountain solution thickness is measured by using phase shifted monochromic light to produce optical path differences through the fountain solution film. The intensity of the reflected light through the fountain solution film is very sensitive due to the phase shifted light so interference fringes are easier to delineate and fountain solution thickness measurement more reliable.

According to aspects of the embodiments, there is provided a method of measuring the amount of fountain solution employed in a digital offset lithography printing system. Fountain solution thickness is measured using a diffractive optical element (DOE) configured with grating surfaces varying in a periodic fashion to hold an amount of fountain solution. When radiated with a light source the combination of the grating surface and the fountain solution therein reduces the scattering of the surface structure (“contrast”) that gives rise to a diffraction pattern. The diffractive optical element can be placed on the printing blanket of the lithography printing system or on a separate substrate.

An apparatus and method for measuring the thickness of fountain solution (FS) in a Digital Architecture for Lithographic Ink (DALI) printing system by transferring the FS to an optical roller with the properties of a lens and measuring the resulting effect on the refraction of an image captured through the lens. The optical roller may comprise a clear or glass cylinder forming a Fresnel lens cylinder having an engineered surface of known surface roughness and wherein the roller is placed adjacent the image member blanket. A heat source is used to evaporate the FS from the blanket for transfer to the optical roller where the FS wets the roller surface to different degrees based on the FS thickness relative to Fresnel ridge depth. Changes to the optical refraction through the lens varies with the FS thickness. An image sensor (e.g., a CCD camera or image analysis system) evaluates the image through the optical roller for FS thickness determination.

A method for controlling a dispensing system is provided, including the steps of dispensing, by a dispensing device, a coating material onto a substrate according to a first dispensing operation, inspecting, by an inspection device integrated with the dispensing device, the coating material applied to the first substrate, and altering the first dispensing operation based on the inspecting so that the coating material is dispensed onto a subsequent substrate according to a second dispensing operation. An associated coating machine is also provided.