A gyroscope assembly includes a sense proof mass and a compensation proof mass. The sense proof mass has a sense frequency response in a sense dimension and is configured to move in a drive dimension in response to a drive signal, and to move in the sense dimension in response to experiencing an angular velocity about a sense input axis while moving in the drive dimension. And the compensation proof mass has, in the sense dimension, a compensation frequency response that is related to the sense frequency response.

A gyroscope includes at least one anchor and a plurality of gyroscope spring elements coupled to the at least one anchor. The gyroscope also includes a plurality of concentric rings coupled to the plurality of gyroscope spring elements and configured to encircle the plurality of gyroscope spring elements. The gyroscope further includes an excitation/detection/tuning unit electrostatically coupled to the plurality of concentric rings.

A gyroscope includes at least one anchor and a plurality of gyroscope spring elements coupled to the at least one anchor. The gyroscope also includes a plurality of concentric rings coupled to the plurality of gyroscope spring elements and configured to encircle the plurality of gyroscope spring elements. The gyroscope further includes an excitation/detection/tuning unit electrostatically coupled to the plurality of concentric rings.

A vibratory gyro element 100 includes a fixed part 10, a resonator 20 having a cos Nθ (N is a natural number of two or more) mode of vibration, support parts 30, and electrodes 40. The electrodes 40 are arranged in 4N orientations arranged in an outer circumferential direction of the resonator 20. The electrodes 40 include a primary driving electrode PD, a primary pickoff electrode PPO, a secondary pickoff electrode SPO, and a secondary driving electrode SD. The primary pickoff electrode PPO is arranged in the same orientation as that of the primary driving electrode PD, and the secondary driving electrode SD is arranged in the same orientation as that of the secondary pickoff electrode SPO.

A vibratory gyro element 100 includes a fixed part 10, a resonator 20 having a cos Nθ (N is a natural number of two or more) mode of vibration, support parts 30, and electrodes 40. The electrodes 40 are arranged in 4N orientations arranged in an outer circumferential direction of the resonator 20. The electrodes 40 include a primary driving electrode PD, a primary pickoff electrode PPO, a secondary pickoff electrode SPO, and a secondary driving electrode SD. The primary pickoff electrode PPO is arranged in the same orientation as that of the primary driving electrode PD, and the secondary driving electrode SD is arranged in the same orientation as that of the secondary pickoff electrode SPO.

A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.

A vibrating structure angular rate sensor comprises a MEMS structure includes a mount, a plurality of supporting structures fixed to the mount, and a vibrating planar ring structure flexibly supported by the plurality of supporting structures to move elastically relative to the mount. At least one primary drive transducer is arranged to cause the ring structure to oscillate in a primary mode at the resonant frequency of the primary mode. At least one primary pick-off transducer arranged to detect oscillation of the ring structure in the primary mode. At least three secondary pick-off transducers are arranged to detect oscillation of the ring structure in a secondary mode induced by Coriolis force when an angular rate is applied around an axis substantially perpendicular to the ring structure. At least one secondary drive transducer is arranged to null the induced oscillation in the secondary mode.

A ring gyroscope which comprises first and second transversal symmetry axes and first and second diagonal symmetry axes in the ring plane. The gyroscope further comprises one or more primary piezoelectric split transducers configured to drive the ring into resonance oscillation and one or more secondary piezoelectric split transducers configured to sense the oscillation of the ring. The gyroscope further comprises four or more mass elements which form a symmetrical mass distribution in relation to both the first and second transversal symmetry axes and to the first and second diagonal symmetry axes, wherein each mass element is attached to the ring from a bridge connector and the bridge connectors are evenly distributed along the ring.

A ring gyroscope which comprises first and second transversal symmetry axes and first and second diagonal symmetry axes in the ring plane. The gyroscope further comprises one or more primary piezoelectric split transducers configured to drive the ring into resonance oscillation and one or more secondary piezoelectric split transducers configured to sense the oscillation of the ring. The gyroscope further comprises four or more mass elements which form a symmetrical mass distribution in relation to both the first and second transversal symmetry axes and to the first and second diagonal symmetry axes, wherein each mass element is attached to the ring from a bridge connector and the bridge connectors are evenly distributed along the ring.

According to one embodiment, a sensor includes a base body, a first fixed portion, a movable portion, and first and second fixed electrodes. The first fixed portion is fixed to the base body. The movable portion is supported by the first fixed portion. The movable portion includes annular portions and connecting portions. The annular portions are concentric with the first fixed portion as a center in a first plane. One of the connecting portions connects one of the annular portions and an other one of the annular portions. The annular portions include first to third annular portions. The second annular portion includes a first movable portion electrode. The first fixed electrode is fixed to the base body and faces a part of the first annular portion. The second fixed electrode is fixed to the base body and faces the first movable portion electrode.