In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

A microelectromechanical (MEMS) interferometer is provided. The MEMS interferometer includes a pair of movable mirrors that are positioned along perpendicular axes, wherein each of the pair of movable mirrors is coupled to a mechanism. The mechanism includes an electrostatic actuator driving a displacement amplification mechanism, and the displacement amplification mechanism driving each of the pair of the movable mirrors. The MEMS interferometer includes a beam splitter that is positioned at an intersection of the perpendicular axes extending through each movable mirror and the beam splitter. The MEMS interferometer also includes a metasurface microbolometer placed in line with the beam splitter to measure an intensity of a recombined beam from the pair of movable mirrors.

An on-chip interferometer and a spectrometer including the interferometer are provided. An on-chip interferometer includes a waveguide for propagation of an optical signal including an input waveguide; at least two interferometer arms having one or more slot waveguides; and an output waveguide; wherein the input waveguide is split into the at least two interferometer arms which are recombined into the output waveguide; and a control mechanism configured for controlling a relative time delay between optical signals propagating in the two interferometer arms by modifying one or more slot widths of one or more of the slot waveguides; and wherein the relative time delay is at least 1, 2, 5, or at least 10 fs or at least one optical period of the longest optical wavelength of the optical signal.

A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.

The present disclosure relates to a common-path cube-corner retroreflector interferometer with a large optical path difference and high stability, and an interference technique thereof. The interferometer adopts an asymmetric common-path beam splitting structure using right-angled cube-corner retroreflectors, comprising a semi-transmissive and semi-reflective beam splitter, a plane mirror, a first right-angled cube-corner retroreflector, a second right-angled cube-corner retroreflector and an optical path difference element. The incident light is divided into a first transmitted beam and a second reflected beam, which are respectively reflected by the plane mirror and the right-angled cube-corner retroreflectors several times and then split again, two beams of which become interference outputs along directions perpendicular to an incident direction of the incident light, and the other two beams become interference outputs along directions parallel to the incident light. The present disclosure also provides an interference technique based on the interferometer described above.

The present disclosure relates to a common-path cube-corner retroreflector interferometer with a large optical path difference and high stability, and an interference technique thereof. The interferometer adopts an asymmetric common-path beam splitting structure using right-angled cube-corner retroreflectors, comprising a semi-transmissive and semi-reflective beam splitter, a plane mirror, a first right-angled cube-corner retroreflector, a second right-angled cube-corner retroreflector and an optical path difference element. The incident light is divided into a first transmitted beam and a second reflected beam, which are respectively reflected by the plane mirror and the right-angled cube-corner retroreflectors several times and then split again, two beams of which become interference outputs along directions perpendicular to an incident direction of the incident light, and the other two beams become interference outputs along directions parallel to the incident light. The present disclosure also provides an interference technique based on the interferometer described above.

An optical arrangement has a light source, which emits a light beam along a first optical axis. A first reflector is provided, and a second reflector reflects light reflected by the first reflector. The first reflector has a transverse offset from the first optical axis to reflect light along a second optical axis which has a parallel offset of two times the transverse offset of the first optical axis. The second reflector reflects the light beam back to the first reflector along a third optical axis having a parallel offset with a fixed amount in a fixed transverse direction in relation to the second optical axis. The light beam is reflected by the first reflector along a fourth optical axis which has a parallel offset in relation to the first optical axis with a fixed amount counter to the fixed transverse direction.

An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.