Patent classifications
G01L3/107
INSPECTION DEVICE FOR DISPLACEMENT SENSOR AND INSPECTION METHOD OF THE SAME
An inspection device for displacement sensor includes a sequence data obtaining unit configured to obtain sequence data as an output value of the displacement sensor according to input continuously changing in a constant temporal gradient; a difference calculation unit configured to obtain a difference between a value at a certain point in the sequence data and a value at a point advancing from the point by a predetermined evaluation pitch to calculate difference sequence data; a moving average calculation unit—configured to obtain a moving average of a predetermined number of data centered at a certain point in the difference sequence data to calculate post-averaged sequence data; and a determining unit configured to determine that the displacement sensor is normal when an amplitude of an output value of the post-averaged sequence data is smaller than a determination threshold for amplitude.