A tube infrastructure includes a first tube; a second tube that is coupled to the first tube; and a fluid tank that is disposed to surround a coupling region of the first tube and the second tube and is filled with a fluid to seal the coupling region, wherein the fluid tank allows negative pressure to be maintained inside the first tube and the second tube.

A pressure vessel includes a first container and a second container surrounding the first container and including a fluid port. The pressure vessel further includes a barrier space extending between the first container and the second container and a leak detection mechanism connected to the fluid port on the second container that is configured to detect a leak in the pressure vessel.

A CNG leak detection system has a plurality of CNG tanks. A plurality of control valve mechanisms, equal in number to the plurality of CNG tanks, is coupled with each CNG tank. A sensor is coupled with each control valve mechanism. The sensor monitors the CNG in the tank. A processor is electrically coupled with the sensor. A display is coupled with the processor to display the sensed condition of at least one desired tank of the plurality of tanks.

An endoscope leak test connector includes: a rotating body configured to cause a ventilation member to project from a leak test pipe sleeve by rotating in a positive direction and cause the ventilation member to be buried into the leak test pipe sleeve by rotating in a negative direction; a gas inlet configured to be connected with a gas supply source; a facing member configured to face the ventilation member projecting from the leak test pipe sleeve; a gas outlet that is open on the facing member; and a seal portion configured to seal the gas outlet and the ventilation member so that the gas outlet and the ventilation member liquid-tightly communicate with each other.

A module (14) for detecting a leakage, comprising a pressure sensor (8) and a pump (2) for generating pressure, is characterized in that, regarding the object of detecting and/or quantifying a leakage of an arrangement which has a large sealed volume, in a reliable manner with a compact device, the module (14) has a sealable reference volume (11) which can be connected in terms of flow by means of a valve (9) to a tank connection (10) and which can be disconnected therefrom in a flow-tight manner, wherein the pressure inside the reference volume (11) can be detected by the pressure sensor (8), wherein pressure can be generated inside the reference volume (11) by means of the pump (2) and wherein the reference volume (11) can be connected in a flow-conducting manner by means of a shut-off valve (4) via a reference aperture (5) with a defined flow cross section to an atmosphere outlet (1) and can be disconnected therefrom.

A module (14) for detecting a leakage, comprising a pressure sensor (8) and a pump (2) for generating pressure, is characterized in that, regarding the object of detecting and/or quantifying a leakage of an arrangement which has a large sealed volume, in a reliable manner with a compact device, the module (14) has a sealable reference volume (11) which can be connected in terms of flow by means of a valve (9) to a tank connection (10) and which can be disconnected therefrom in a flow-tight manner, wherein the pressure inside the reference volume (11) can be detected by the pressure sensor (8), wherein pressure can be generated inside the reference volume (11) by means of the pump (2) and wherein the reference volume (11) can be connected in a flow-conducting manner by means of a shut-off valve (4) via a reference aperture (5) with a defined flow cross section to an atmosphere outlet (1) and can be disconnected therefrom.

Systems, methods and apparatuses for inspecting a tank containing a flammable fluid are provided. The system includes a vehicle having a propeller, a latch mechanism, a pressure switch, and an inspection device. The system includes a control unit in communication with the propeller, the latch mechanism, and the inspection device, and electrically connected to the pressure switch. The control unit powers on responsive to the pressure switch detecting an ambient pressure greater than a minimum threshold. The control unit receives, from the latch mechanism, an indication of a state of the latch mechanism. The control unit determines that the cable used to lower the vehicle into the tank containing the flammable fluid is detached from the vehicle. The control unit commands the propeller to move the vehicle through the flammable fluid. The control unit determines a quality metric of a portion of the tank.

A diagnostic device for diagnosing leakage of pressurized fluid from at least one pressure chamber to which a pressurized fluid can be applied. The diagnostic device is configured to diagnose the pressurized fluid leakage on the basis of at least one pressure control actuating signal for controlling a valve arrangement provided for closed-loop pressure control of the pressure chamber.

The present disclosure provides systems and methods for controlling a semiconductor manufacturing equipment. A control system includes a sensor unit capturing a set of data related to a gas pressure in the equipment, a sensor interface receiving the set of data and generating at least one input signal for a database server, and a control unit. The control unit includes a front end subsystem, a calculation subsystem, and a message and feedback subsystem. The front end subsystem performs a front end process to generate a data signal. The calculation subsystem performs an artificial intelligence analytical process to determine, according to the data signal, whether a malfunction related to the gas pressure has occurred and generate an output signal. The message and feedback subsystem generates an alert signal and a feedback signal according to the output signal and transmits the alert signal to a user.

A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.