In accordance with some embodiments of the present disclosure, an inspection method of a photomask includes performing a first inspection process, unloading the photomask from the inspection system, and performing a second inspection process. In the first inspection process, a common Z calibration map of an objective lens of an optical module with respect to the photomask is generated and stored, and a first image of the photomask is captured by using an image sensor while focusing the objective lens of the optical module based on the common Z calibration map. The photomask is unloaded from the inspection system. In the second inspection process, the photomask is loaded on the inspection system and a second image of the photomask is captured by using an image sensor while focusing an objective lens of an optical module based on the common Z calibration map generated in the first inspection process.

The disclosed technology relates to an inspection apparatus that includes a stage configured to retain a specimen for inspection, an imaging device having a field of view encompassing at least a portion of the stage to view a specimen retained on the stage, and a plurality of lights disposed on a moveable platform. The inspection apparatus can further include a control module coupled to the imaging device, each of the lights and the moveable platform. The control module is configured to perform operations including: receiving image data from the imaging device, where the image data indicates an illumination landscape of light incident on the specimen; and automatically modifying, based on the image data, an elevation of the moveable platform or an intensity of one or more of the lights to adjust the illumination landscape. Methods and machine-readable media are also contemplated.

An processing apparatus includes a first illumination portion and a first imaging portion. The first illumination portion irradiates ta second inner surface on an opposite side of a second outer surface and a third inner surface on an opposite side of a third outer surface via a first outer surface of the electronic component with irradiation light in a state where the electronic component is disposed on a first inspection position. The first imaging portion captures an image of a first internal corner portion formed by the second inner surface and the third inner surface, based on the first irradiation light emitted from the first outer surface after being specularly reflected on the second inner surface and the third inner surface.

An image inspection device which can image an object with a plurality of cameras in a state in which the object is optimally illuminated and which can also be downsized is provided. The image inspection device includes a plurality of imaging parts that image the object, an illumination part that is disposed between the object and the plurality of imaging parts and radiates light toward the object and has a light-transmissive property, and a control part that controls the plurality of imaging parts and the illumination part. The illumination part includes a plurality of illumination elements which are arranged in a matrix and are allowed to be turned on independently. The control part controls the plurality of illumination elements to cause the illumination part to illuminate a region of the object corresponding to a field of view of the plurality of imaging parts.

A cylindrical-body surface inspection device includes: a light irradiation unit configured to irradiate the cylindrical body with light; a two-dimensional imaging unit; a scanning-position determination unit configured to determine at a predetermined period, with respect to two-dimensional image data acquired by the two-dimensional imaging unit, a scanning position that is corresponding to a circumferential direction of the cylindrical body; a time-series scanning image generator configured to perform extraction of image data in a second direction perpendicular to the first direction at the scanning position determined by the scanning-position determination unit on a plurality of pieces of the two-dimensional image data acquired by the two-dimensional imaging unit, and generate a time-series scanning image by arranging in chronological order in the first direction each piece of extracted image data of the second direction; and an inspection unit configured to inspect the time-series scanning image to detect a defect.

A component-mounting machine including an LED lighting device configured to illuminate an imaging target that is to be imaged by a camera loaded on the component-mounting machine; and an illumination light amount adjusting device configured to adjust in steps with a specified gradation quantity an illumination light amount of the LED lighting device. The LED lighting device uses two types of LED elements with different brightness levels, and the illumination light amount adjusting device is configured to adjust in steps with a specified gradation quantity a pulse width or a current value of a current flowing through low-brightness LED elements that are the LED elements with a lower brightness level out of the two types of LED elements so as to adjust in steps with a specified gradation quantity an emitted light amount of the low-brightness LED elements while maintaining a specified level of illumination light amount.

An inspection system for inspecting a target includes a first lighting device configured to irradiate light onto the target from a given direction; a second lighting device, provided between the target and the first lighting device, configured to irradiate light onto the target from an oblique direction with respect to the given direction; an image capture device, provided at a position opposite to a position of the target with respect to the first lighting device and the second lighting device in the given direction; and circuitry configured to acquire a first inspection target image of the target, captured by the image capture device by irradiating the light from the first lighting device, and a second inspection target image of the target, captured by the image capture device by irradiating the light from the second lighting device, to be used for inspecting the target.

The disclosed technology relates to an inspection apparatus that includes a stage configured to retain a specimen for inspection, an imaging device having a field of view encompassing at least a portion of the stage to view a specimen retained on the stage, and a plurality of lights disposed on a moveable platform. The inspection apparatus can further include a control module coupled to the imaging device, each of the lights and the moveable platform. The control module is configured to perform operations including: receiving image data from the imaging device, where the image data indicates an illumination landscape of light incident on the speciment; and automatically modifying, based on the image data, an elevation of the moveable platform or an intensity of one or more of the lights to adjust the illumination landscape. Methods and machine-readable media are also contemplated.

A method is disclosed for maintaining a desired optical output in a solid state illumination device, where the device is configured to accommodate multiple light emitting diodes (LEDs) and to combine light from the LEDs to produce a single optical output. The method includes testing the LEDs before adding them into the device. The testing produces characterizing information that describes how one or more optical properties (e.g., optical power and/or peak wavelength) of the tested LED change with temperature. This characterizing information is stored in a computer-based memory of the device, and the tested LED is added (connected) into the device. Then, during operation, temperature sensors measure a temperature associated with each respective LED in the device, and electrical current to one or more of the LEDs can be adjusted based on the measured temperatures associated with each LED and its stored characterizing information.

This application provides a tab image acquisition device, system, and method. The tab image acquisition device includes an image acquisition apparatus, where the image acquisition apparatus includes: a first mobile module movable in a first direction; a second mobile module movable in a second direction, where the second mobile module is installed on the first mobile module and the second direction intersects the first direction; an image acquisition module installed on the second mobile module; and a prism module installed on the first mobile module, where the prism module has a reflective surface, and the reflective surface is configured to change an angle of incident light on a tab whose image is to be acquired, so that the incident light enters the image acquisition module.