A testing device for detecting defects of transparent test specimens, in particular of ophthalmological lenses, has an illumination device for transilluminating test specimens to be examined and with an image acquisition device for imaging the test specimen transilluminated by the illumination device. The illumination device includes a plurality of linearly adjustable light sources for generating a stripe pattern. To capture the stripe pattern, the acquisition duration of the image acquisition device can be adjusted in such a way that the light emitted by each of the light sources is detected as a light stripe. Further, the disclosure relates to a testing method for detecting a defect of a transparent specimen.

Methods of and apparatus for inspecting composite layers of a first material formed on a second material are provided including providing an illumination source, illuminating at least a portion of the composite at the layer, receiving light reflected from the sample, determining a spectral response from the received light, and comparing the received spectral response to an expected spectral response.

A wafer measurement apparatus for measuring a bonding strength of a bonded wafer includes a wafer holder to hold a bonded wafer into which a blade is inserted and where a crack occurs, a lighting assembly including a light source, a light source controller to select the light source of the lighting assembly for detection of the crack reflected in the bonded wafer, on photographing conditions, a photographing assembly to photograph the bonded wafer by using the photographing conditions corresponding to a wavelength of the light source, on sensitivity of the wavelength of the light source, and a calculator to select one photographing condition, transmit the selected photographing condition, and calculate bonding strength, on a crack distance from a blade edge, extracted from an image of the bonded wafer, to a crack edge.

The present disclosure generally relates to a system for optical inspection of an object, specifically comprising an illumination assembly operated to provide homogeneous illumination of the object, thereby improving the overall accuracy of the optical inspection. The optical vision system also comprises an image sensor configured to capture an image of the object and a control unit in electrical communication with and configured to operate the image sensor and the illumination assembly, wherein the control unit is configured to automatically control the illumination assembly to illuminate the object with a predetermined illumination pattern based on a selected object type. The present disclosure also relates to a corresponding method and to a computer program product.

A visual inspection device and a method for setting illumination condition thereof are provided to include an illumination part irradiating illumination lights to an inspection object; an imaging part capturing an image of the inspection object; a defect detecting part analyzing the image of the inspection object captured by the imaging part and detecting a defect of the inspection object; an illumination condition setting part setting an illumination condition of the illumination lights irradiated to the inspection object; and an optimum illumination condition deriving part deriving an optimum illumination condition by scoring each of the illumination conditions based on the images captured under plural and different illumination conditions, where the optimum illumination condition is the most suitable illumination condition for detecting the defect of the inspection object by the defect detecting part.

An appearance inspection device that can easily determine optimum values of various imaging parameters is provided. An appearance inspection device includes: a moving means which changes relative positions of at least two or more portions within a work-piece, an imaging part, and an illumination part; an imaging processing part which performs, in a state that the illumination part irradiates a light to the work-piece, a processing for changing imaging parameters and taking a plurality of images by the imaging part under a condition that plural types of imaging parameters with mutually different properties are variably set, the plural types of imaging parameters including a change of the relative position between the work-piece and the imaging part caused by the moving means; and a parameter determining part determining a set of optimum values of the plural types of imaging parameters that are set variably based on the plurality of taken images.

In one embodiment, an optical state monitor includes an a light source detection layer for detecting electromagnetic radiation from an associated good. The optical state monitor uses a processor to evaluate the detected radiation, and make a comparison to a pre-defined optical state profile for the good. By making this comparison, the optical state detector is able to determine a quality for the good. In a particular construction, the optical state detector has an integral light source, and the light detection layer is printed as a thin film device. In this way, a stand-alone self-contained sensor is constructed for determining the good's current quality.

A spectroscopic camera according to the present disclosure includes a spectroscopic section configured by a variable wavelength interference filter that selectively transmits light at a predetermined wavelength and changes the light to transmitted light, a receiving section configured to receive sensitivity information indicating a sensitivity curve in a wavelength region of a predetermined color imaged by an RGB camera, a wavelength-table generating section configured to generate, based on the sensitivity information, a wavelength table indicating a relation between the predetermined wavelength and a transmission time, which is a time for transmitting the transmitted light, an imaging section configured to acquire a spectral image formed by the transmitted light transmitted through the spectroscopic section, and a control section configured to control the spectroscopic section and the imaging section based on the wavelength table.

The present invention relates to an inspection apparatus and an inspection method which selectively adjust a numerical aperture of illuminating light in the form of collimated light when inspecting a target object, such as a wafer or the like, using a spectrum, thereby preventing a diffraction phenomenon caused by the illuminating light. The inspection apparatus may include: a camera unit disposed above a target object; an illumination unit configured to illuminate the target object with illuminating light; and a light detection unit configured to detect reflection light of the target object illuminated with the illuminating light, wherein the illumination unit comprises a numerical aperture adjustment device which has a first optical member having a first numerical aperture that is replaceable with a second optical member having a second numerical aperture different from the first numerical aperture so as to reduce a diffraction phenomenon caused by the illuminating light.

Disclosed is a system that includes a light source for generating an illumination beam and an illumination lens system for directing the illumination beam towards a sample. The system further includes a collection lens system for directing towards a detector output light from the sample in response to the illumination beam and a detector for receiving the output light from the sample. The collection lens system includes a fixed-design compensator plate having individually selectable filters with different configurations for correcting system aberration of the system under different operating conditions. The system also includes a controller operable for: (i) generating and directing the illumination beam towards the sample, (ii) selecting operating conditions and a filter for correcting the system aberration under such selected operating conditions, (iii) generating an image based on the output light, and (iv) determining whether the sample passes inspection or characterizing such sample based on the image.