G01N2021/8845

Inspection apparatus, inspection system, and inspection method

An inspection method includes: spectroscopically separating light from a predetermined imaging range of an inspection object into light of a plurality of wavelengths and imaging spectroscopic images of each of the wavelengths; inspecting a shape of the inspection object using the spectroscopic image of a predetermined wavelength among the wavelengths imaged in the imaging of the spectroscopic images of each of the wavelengths; and inspecting a color of the inspection object using the spectroscopic images of each of the wavelengths imaged. The predetermined wavelength is determined so that a maximum light quantity of the light from the inspection object in the corresponding spectroscopic image at the predetermined wavelength is equal to or higher than maximum light quantities in the other spectroscopic images at the other wavelengths.

MULTI-SOURCE ILLUMINATION UNIT AND METHOD OF OPERATING THE SAME
20210396683 · 2021-12-23 ·

An illumination unit comprising a first electromagnetic wave source including circuitry for outputting a first electromagnetic wave in a first direction to illuminate a first region of a sample; a second electromagnetic wave source including circuitry for outputting a second electromagnetic wave in a second direction substantially opposite to the first direction; and a reflector configured to reflect the second electromagnetic wave substantially in the first direction to illuminate a second region of the sample.

Methods and systems for identifying features

Aspects of the present disclosure include methods, apparatuses, and computer readable media for transmitting a light such that it is incident on a multi-layer stack, wherein the multi-layer stack includes the feature and a region without the feature, detecting a narrow-band light from the feature and the region without the feature, wherein the feature has a first optical response in response to a wavelength of the narrow-band light and the region without the feature has a second optical response in response to the wavelength of the narrow-band light, and generating, based on the narrow-band light, an image indicative of where the first optical response and the second optical response occur on the multi-layer stack.

METHOD FOR SELECTING A LIGHT SOURCE FOR ILLUMINATING DEFECTS, ELECTRONIC DEVICE, AND NON-TRANSITORY STORAGE MEDIUM
20220198634 · 2022-06-23 ·

A method for selecting a light source for illuminating defects, an electronic device, and a non-transitory storage medium are provided. The method includes acquire grayscale images of an object with a known defect and generates a pseudo-hyperspectral image cube based on the grayscale images, so that algorithms related to hyperspectral images can analyze the grayscale images collected under different light sources. A most effective or target light source can be automatically and quickly determined from the plurality of light sources, improving an efficiency of light source selection.

SYSTEM AND METHOD FOR DETECTING GLASS-CERAMIC MATERIAL
20220187217 · 2022-06-16 ·

An automated system for detecting glass-ceramic materials among a cullet, includes at least one white light source and at least one monochromatic ultraviolet light source, each being oriented to emit in the same emission region. The system includes an image acquisition device configured to acquire an image of the emission region and an image processing device configured to process each of the images acquired by the image acquisition device, the image processing device including a colorimetric image processing module configured to ensure the detection of the glass-ceramic material among othertypes of glass.

PRODUCT INSPECTION METHOD AND PRODUCT INSPECTION APPARATUS

Super continuum light having a continuous spectrum over at least 1100 to 1300 nm is emitted from a pulsed light source, is pulse-stretched by a stretching element such that a relationship between a wavelength and an elapsed time in one pulse is one to one, and is radiated to a product. The light transmitted through the product is received by a light receiver, and output data is input to the determination unit. A quality determination program of the determination unit calculates an absorption spectrum from the output data, quantifies the absorption spectrum by chemometrics, and compares the absorption spectrum with a reference value to determine quality. The product determined to be a defective product is excluded by an exclusion mechanism.

METHOD FOR THE IDENTIFICATION OF DEFECTS IN TRANSPARENT SLABS AND RELATED SYSTEM

A method (and system) for the identification of defects in transparent slabs comprises at least the phases of supply of at least one transparent slab to be inspected; acquisition of at least one image of at least one portion of the slab along an acquisition line; identification of at least one defect in the slab depending on the acquired image; at least one emission phase of at least one light radiation transmitted inside the slab along an emission line substantially transverse to the acquisition line and adapted to be incident with at least one defect in the slab in order to identify the position thereof, the light radiation incident with the defect being diffused by the latter at least in part outside the slab.

Combined transmitted and reflected light imaging of internal cracks in semiconductor devices

A first light source is directed at an outer surface of a workpiece in an inspection module. The light from the first light source that is reflected from the outer surface of the workpiece is directed to the camera via a first pathway. The light from the first light source transmitted through the workpiece is directed to the camera via a second pathway. A second light source is directed at the outer surface of the workpiece 180° from that of the first light source. The light from the second light source that is reflected from the outer surface of the workpiece is directed to the camera via the second pathway. The light from the second light source transmitted through the workpiece is directed to the camera via the first pathway.

OPTICAL DETECTION DEVICE, OPTICAL DETECTION METHOD, METHOD FOR DESIGNING OPTICAL DETECTION DEVICE, SAMPLE CLASSIFICATION METHOD, AND DEFECT DETECTION METHOD
20220155237 · 2022-05-19 ·

An optical detection device is an optical detection device that detects a desired wavelength component included in input light, and includes: a spectrometer including, for instance, a diffraction grating that receives the input light as an input and outputs an alignment of spectra each of which is a duplication of a spectrum of the input light; a second slit array including an array of three or more slits that pass light beams of wavelengths at three or more locations in the alignment of the spectra that are output from the spectrometer; and an imaging element composed of an array of pixels that receive the light beams, having passed through the second slit array, each of the light beams having three or more wavelength components. At least two pitches between slits are different in the array of the three or more slits included in the second slit array.

Time domain multiplexed defect scanner

An optical scanning system includes a first radiating source capable of outputting a first source light beam, a second radiating source capable of outputting a second source light beam, a first time-varying beam reflector configured to direct the first source light beam and the second source light beam toward the sample, a scan lens configured to focus the first source light beam and the second source light beam reflected by the first time-varying beam reflector onto the sample, and a compound ellipsoidal collector configured to direct light scattered from the sample toward a scattered radiation detector. The optical scanner causes one of the first or second source light beams to be directed towards a sample at an incident angle. The first light beam has a first wavelength, the second light beam has a second wavelength, and the first wavelength and the second wavelength are not the same.