A moisture sensor comprises a carrier element comprises an insulating material, a first and a second electrode structure at a distance from one another at the carrier element, a moisture-sensitive, dielectric layer element at a first main surface region of the carrier element and adjacent to the first and second electrode structures and a third electrode structure on a first main surface region of the moisture-sensitive, dielectric layer element, such that the moisture-sensitive, dielectric layer element is between the third electrode structure and the first electrode structure and between the third electrode structure and the second electrode structure. The first electrode structure is a first capacitor electrode and the second electrode structure is a second capacitor electrode of a measurement capacitor for capacitive moisture measurement, wherein the third electrode structure is a floating electrode structure.

A sensor semiconductor device comprises a transducer which comprises a capacitor with at least two electrodes. The transducer further comprises a polymer which is arranged between at least two electrodes of the capacitor, and a top surface of the transducer. The polymer is able to absorb water and the top surface is arranged such that it is exposed to the environment of the sensor semiconductor device. Furthermore, at least a part of the top surface is superhydrophobic and the sensor semiconductor device is capable of measuring the humidity of the environment of the sensor semiconductor device.

The present invention relates to a sensor device (10) for detection of liquid and/or humidity. The sensor device comprises a resonance circuit comprising an inductor (13) connected to a capacitor (11), wherein the capacitor comprises a first electrode (11a) and a second electrode (11b) together sandwiching at least a portion of a dielectric substrate (14). The first and second electrodes are configured to provide an overlap mismatch relative to each other, and the overlap mismatch area (ma) is at least 0.1% of the overlapping area (o.sub.a) of the two electrodes. The present invention further relates to a system (70) for reading a sensor device and a method (100, 200) for reading a sensor device.

The invention relates to a control system for measuring pressure and/or humidity, comprising at least one apparatus for measuring pressure and/or humidity, comprising at least one sensor for measuring pressure and/or humidity, wherein the sensor comprises at least one capacitor comprising at least two electrodes that are arranged, in particular, in a horizontal direction along and on an, in particular, flexible support material relative to one another. At least one dielectric layer is arranged between the electrodes, wherein at least one at least partially liquid-permeable and/or liquid-adsorbing moisture layer is arranged at least in some places on a side, facing away from the support material, of at least one electrode and/or of the dielectric layer. The at least one electrode and/or the dielectric layer are thus then arranged between the support material and the moisture layer in a transverse direction, such that a capacitance is at least partially changed by the liquid at least partially hitting the dielectric layer, wherein a processing unit is designed and provided to measure and/or store measurement values of the sensor. This creates a capacitive moisture sensor. The invention is characterized in that the data measured by the sensor is transmitted by the processing unit to a central CPU, wherein this data is processed by the processing unit.

An air flow rate measurement device disposed in an intake passage by passing through an insertion hole of an intake pipe of an engine to communicate inside and outside includes: a case having a bypass channel, a part of air flowing through the intake passage flows into the bypass channel; a flow rate sensor arranged inside of the case, and having a flow rate detector which detects a flow rate of air flowing through the bypass channel; and a humidity sensor arranged outside of the case, and having a humidity detector which detects a humidity of air flowing through the intake passage. A surface of the humidity detector is arranged to oppose a wall of the case through a clearance.

The present invention provides capacitive gas sensor and manufacturing method thereof in which the capacitive gas sensor comprises: a first electrode; a second electrode; a gas-sensitive dielectric material arranged between the first and the second electrodes to form a gas sensitive capacitor, the gas-sensitive dielectric material has a permittivity that depends on an amount of a gas compound absorbed from the environmental medium; and a dielectric-electrode interfacing material arranged at an interface between the gas-sensitive dielectric material and at least one of the first and second electrodes. The dielectric-electrode interfacing material is adapted to absorb thermally-induced dilatation of the at least one of the first and second electrodes for reducing mechanical stress on the gas-sensitive dielectric material.

The invention relates to an apparatus for measuring pressure and/or humidity, and to a method for measuring pressure and/or humidity. The apparatus comprises at least one sensor for measuring pressure and/or humidity, wherein the sensor comprises at least one capacitor comprising at least two electrodes that are arranged, in particular, in a horizontal direction along and on an, in particular, flexible support material relative to one another. At least one dielectric layer is arranged between the electrodes. The invention is characterised in that at least one at least partially liquid-permeable and/or liquid-absorbing moisture layer is arranged at least in some places on a side, facing away from a support material, of at least one electrode and/or the dielectric layer. The at least one electrode and/or the dielectric layer are thus then arranged between the support material and the moisture layer in a transverse direction. In this way, a capacitance is at least partially changed by the liquid at least partially hitting the dielectric layer, wherein a processing unit is designed and provided to measure and/or store this change, so as to create a capacitive moisture sensor.

A capacitive sensor and a preparation method thereof are disclosed. By disposing differential positive-negative electrode pair that include a first positive-negative electrode pair (4, 5, 6) and a second positive-negative electrode pair (11, 12, 13), and disposing a functional material layer (7, 8, 9) on the first positive-negative electrode pair (4, 5, 6), differential measurement is achieved, and thus the accuracy and sensitivity of the capacitive sensor are improved.

A sensor of volatile substances including: a sensitive layer, of a sensitive material that is permeable to a volatile substance and has an electrical permittivity depending upon a concentration of the volatile substance absorbed; a first electrode structure and a second electrode structure capacitively coupled together and arranged so that a capacitance between the first electrode structure and the second electrode structure is affected by the electrical permittivity of the sensitive material; and a supply device, configured to supply a heating current through one between the first electrode structure and the second electrode structure in a first operating condition, so as to heat the sensitive layer.

A sensor for detecting a medium, including a capacitive measuring device having at least two electrodes and at least one dielectric, and including an electronic device, which is configured to ascertain a variable regarding and/or dependent on capacitance and to determine an information item regarding the presence of the medium and/or its concentration in view of the ascertained variable; the electronic device being additionally configured to vary a voltage applied between the electrodes, using at least two frequencies, the variable being ascertainable for each of the frequencies, with the aid of the electronic device, a deviation variable regarding a deviation of the variables ascertained for the different frequencies from one another being able to be determined, and the information item being able to be determined in additional view of the deviation variable. In addition, the present invention relates to a method for operating a capacitive measuring device.