A biological detecting chip and a biological detecting method are disclosed. The biological detecting chip includes a plurality of transistors in parallel. Each of the transistors includes a substrate layer, a floating gate, an extending gate and a biological detecting layer. The substrate layer includes a shared source, a shared drain and a channel area. The floating gate is disposed on the channel area. The floating gate includes a poly oxide layer to extend to an extending metal connect. The extending gate is disposed on the extending metal connect and is electrically connected to the floating gate. The biological detecting layer is disposed on the extending gate. The biological detecting layer includes a plurality of biological probes. The biological detecting layer of the transistors forms a plurality of biological detecting area on the surface of the biological detecting chip.

The present disclosure describes a throughput-scalable sensing system. The system includes a plurality of semiconductor dies sharing a common semiconductor substrate and a plurality of transmembrane pore based sensors configured to detect a change of current flow as a result of analyzing biological or chemical samples. Two immediately neighboring transmembrane pore based sensors are arranged on respective two semiconductor dies separated by a dicing street. Each transmembrane pore based sensor is arranged on a separate semiconductor die of the plurality of semiconductor dies. At least one transmembrane pore based sensor includes one or more detection electrodes disposed above the common semiconductor substrate and a lipid bilayer disposed above the one or more detection electrodes.

An integrated circuit device includes a device layer, an interconnect structure, a conductive layer, a passivation layer and a bioFET. The device layer has a first side and a second side and include source/drain regions and a channel region between the source/drain regions. The interconnect structure is disposed at the first side of the device layer. The conductive layer is disposed at the second side of the device layer. The passivation layer is continuously disposed on the conductive layer and the channel region and exposes a portion of the conductive layer. The bioFET includes the source/drain regions, the channel region and a portion of the passivation layer on the channel region.

Nanopore structures are provided. In one aspect, a nanopore structure includes: an oxide shell surrounding a nanopore, wherein openings on both ends of the nanopore have a diameter D1, and a center of the nanopore has a diameter D2, wherein D1>D2. In another aspect, the nanopore structure includes: a first film disposed on a substrate; a second film disposed on the first film; at least one pore extending through the first film and the second film; a dielectric material disposed in the at least one pore; and a nanopore at a center of the dielectric material in the at least one pore, wherein a top opening to the nanopore has a first diameter d1, and a bottom opening to the nanopore has a second diameter d2, wherein d2>d1. Methods of forming the nanopore structures are also provided.

Apparatuses, systems, and methods are disclosed for chemically differentiated sensor arrays and methods of manufacturing and using the same. In one or more examples. An integrated circuit chip includes a chemically differentiated array of graphene field effect transistors with one or more wells configured to receive a volume of biological sample liquid comprising a plurality of different types of biological substances to be distinguished using electrical measurements of output signals of the graphene field effect transistors. At least one electrode is configured to apply a changing gate bias voltage (V.sub.Gs) that increases and decreases within a predetermined range to the sample liquid and at least one electrode is configured to monitor measurement vectors including slopes of drain current measurements relative to the voltage measurements and differences in slope of the measurement vectors distinguish different biological substances in the sample liquid. Systems and methods utilize the integrated circuit chip.

In one embodiment, a chemical sensor is described. The chemical sensor includes a chemically-sensitive field effect transistor including a floating gate conductor having an upper surface, a first opening extending through a first material and through a portion of a second material located on the first material and a second opening extending from the bottom of the first opening to the top of a liner layer located on the upper surface of the floating gate conductor.

A field effect transistor (FET)-based bio-sensing system is provided. The system comprises a sensor assembly, a light source, a fluidic pump and an electrical measurement. The sensor assembly comprising an FET chip configured with at least one fluidic channel. Wherein the fluidic channel has an inlet and an outlet, and the fluidic pump is connected to the inlet of the fluidic channel and operable to drive a fluid and/or a specimen of interest through the fluidic channel. Wherein the electrical measurement unit is connected to the sensor assembly to detect a change in the electrical characteristics of the FET chip.

A semiconductor device includes a circuit layer and a nanopore layer. The nanopore layer is formed on the circuit layer and is formed with a pore therethrough. The circuit layer includes a circuit unit configured to drive a biomolecule through the pore and to detect a current associated with a resistance of the nanopore layer, whereby a characteristic of the biomolecule can be determined using the currents detected by the circuit unit.

Apparatuses, systems, and methods are disclosed for an integrated circuit with 2D field-effect transistors and on-chip thin film layer deposition with electrical characterization. A corresponding layer structure and manufacturing process are disclosed. The system includes a measurement controller that determines transfer curve information and an analysis module that generates parameters for determining thickness and/or porosity and a thin film deposition controller that controllers thin film deposition using the parameters. Methods include performing liquid mediated deposition of one or more thin film layers on the channel surface and obtaining transfer curve information by generating time dependent measurement vectors for the 2D FETs and controlling and/or performing electrical characterization of the of thin film layers based on the measurement vectors. The disclosed methods may be implemented by the disclosed integrated circuit and the disclosed system.

Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.