G01N29/0681

METHOD OF DETECTING AN ANOMALY IN A SINGLE CRYSTAL STRUCTURE

A method of detecting an anomaly in a crystallographic structure, the method comprising: illuminating the structure with x-ray radiation in a known direction relative to the crystallographic orientation; positioning the structure such that its crystallographic orientation is known; detecting a pattern of the diffracted x-ray radiation transmitted through the structure; generating the simulated pattern based on the known direction relative to the crystallographic orientation; comparing the detected pattern to a simulated pattern for x-ray radiation illuminating in the known direction; and, detecting the anomaly in the crystallographic structure based on the comparison.

Method for the ultrasonic microscopic measurement of semiconductor samples, computer program for the ultrasonic microscopic measurement of semiconductor samples, computer program product and ultrasound microscope
10677760 · 2020-06-09 · ·

Method for ultrasound microscopic measuring of semiconductor samples, computer program for ultrasound microscopic measuring of semiconductor samples, computer program product and ultrasound microscope. Inter alia, a method for the ultrasound microscopic measurement of semiconductor samples is provided, in which the time distances (t) between signals are compared with comparative time distances, which are determined by a known thickness of a layer of the sample.

Method and system for oblique backscattering ultrasound transmissive contrast imaging

An Oblique Backscatter Ultrasound imaging system includes a transceiver that has an US source and a plurality of US detectors configured in receive signals off axis from the US source. While the system is arranged in a reflective configuration, the device produces transmissive contrast signals to yield improved images. The transceiver can be mounted to a movable stage or robotic arm to enable it to scan the surface of a target. Alternatively, scanning can be performed by 1D or 2D phased-array transmission or detection.

HETERODYNE ATOMIC FORCE MICROSCOPY DEVICE, METHOD AND LITHOGRAPHIC SYSTEM

A method to perform sub-surface detection of nanostructures in a sample, uses an atomic force microscopy system that comprising a scan head having a probe with a cantilever and a probe tip arranged on the cantilever. The method comprises: moving the probe tip and the sample relative to each other in one or more directions parallel to the surface for scanning of the surface with the probe tip; and monitoring motion of the probe tip relative to the scan head with a tip position detector during said scanning for obtaining an output signal. During said scanning acoustic vibrations are induced in the probe tip by applying a least a first and a second acoustic input signal respectively comprising a first and a second signal component at mutually different frequencies above IGHz, differing by less than IGHz to the probe, and analyzing the output signal for mapping at least subsurface nanostructures below the surface of the sample.

Device for the volumetric analysis of an organic or inorganic sample

An acoustic analysis device based on atomic force microscopy for the volume analysis of an organic or inorganic sample includes a support on which the sample is immobilized, and an atomic force microscopy lever having a free end provided with a part that interacts with an upper face of the sample and scans said upper face, one or at least two of the independent piezoelectric actuators supplying ultrasonic waves with interferential coupling, and acoustic measurement and analysis bodies associated with the atomic force microscopy lever. The support is a total reflection prism to which the piezoelectric actuators are applied, and the piezoelectric actuators are applied in determined positions on said prism in order to define determined angles of excitation of the ultrasonic waves.

AUTOREGRESSIVE SIGNAL PROCESSING APPLIED TO HIGH-FREQUENCY ACOUSTIC MICROSCOPY OF SOFT TISSUES

A method to create a parameter map depicting acoustical and mechanical properties of biological tissue at microscopic resolutions to identify potential health related issues. The method including mounting the biological tissue on a substrate, raster scanning the biological tissue with an RF frequency, recovering RF echo signals from said substrate and from a plurality of locations on said biological tissue, wherein each of the plurality of locations corresponds to a specific pixel comprising the parameter map, the recovered RF echo signals including a reference signal recovered from the substrate at a point devoid of tissue, a first sample signal recovered from an interface between the biological tissue and water, and a second sample signal recovered from an interface between said biological tissue and said substrate, repeatedly applying a plurality of computer-generated calculation steps based on the reference signal, the first sample signal and the second sample signal to generate estimated values for a plurality of parameters associated with each of the specific pixels in the parameter map. The plurality of computer-generated calculation steps includes a denoising step, and using the generated estimated values to create said parameter map depicting parameters including, but not limited, to acoustic impedance, speed of sound, ultrasound attenuation, mass density, bulk modulus and nonlinear attenuation.

Adjustable fixture for scanning acoustic microscopy

An adjustable fixture for holding a sample for inspection with a scanning acoustic microscope includes a first horizontal bar disposed on a first end of a frame, and a second horizontal bar disposed on a second end of the frame. The second horizontal bar may be engaged with the frame to be movable between the first end and the second end of the frame. The adjustable fixture may further include a side bar disposed on one or more of the first side and the second side of the frame, with an end of the second horizontal bar slidable and lockable along the side bar, and an engagement mechanism releasably coupling the end of the second horizontal bar to the side bar.

METHOD OF AND ATOMIC FORCE MICROSCOPY SYSTEM FOR PERFORMING SUBSURFACE IMAGING

The document relates to a method of performing subsurface imaging of embedded structures underneath a substrate surface, using an atomic force microscopy system. The system comprises a probe with a probe tip, and a sensor for sensing a position of the probe tip. The method comprises the steps of: positioning the probe tip relative to the substrate: applying a first acoustic input signal to the substrate; applying a second acoustic input signal to the substrate; detecting an output signal from the substrate in response to the first and second acoustic input signal; and analyzing the output signal. The first acoustic input signal comprises a first signal component and a second signal component, the first signal component comprising a frequency below 250 megahertz and the second signal component either including a frequency below 2.5 megahertz or a frequency such as to provide a difference frequency of at most 2.5 megahertz with the first signal component, such as to enable analysis of an induced stress field in the substrate; and wherein the second acoustic input signal comprises a third signal component having a frequency above 1 gigahertz, such that the return signal includes a scattered fraction of the second acoustic input signal scattered from the embedded structures. This enables to perform imaging a various depths in one pass, across a large range of depths.

METHOD OF AND SYSTEM FOR PERFORMING DETECTION ON OR CHARACTERIZATION OF A SAMPLE

The present document relates to a anatomic force microscope comprising a probe comprising a probe tip configured to sense a sample disposed proximate to the probe tip, a detector to detect a deflection of the probe tip, an actuator coupled to the probe and configured to move the probe in a sense state with the sample at a predetermined force set point and a vibrator in communication with the sample to provide a vibration to the sample, the vibration comprising a modulation frequency, wherein the acoustic vibrator is configured to provide the vibration in a modulation period after an initial sense period without modulation and wherein the probe is moved during or after said modulation period to a successive sample position over said sample while moving the probe in a non-contact state.

Heterodyne scanning probe microscopy method and system

The present invention relates to a heterodyne scanning probe microscopy method for imaging structures on or below the surface of a sample, the method including applying, using a transducer, an acoustic input signal to the sample sensing, using a probe including a probe tip in contact with the surface, an acoustic output signal, wherein the acoustic output signal is representative of acoustic surface waves induced by the acoustic input signal wherein the acoustic input signal comprises at least a first signal component having a frequency above 1 gigahertz, and wherein for detecting of the acoustic output signal the method comprises a step of applying a further acoustic input signal to at least one of the probe or the sample for obtaining a mixed acoustic signal, the further acoustic input signal including at least a second signal component having a frequency above 1 gigahertz, wherein the mixed acoustic signal comprises a third signal component having a frequency equal to a difference between the first frequency and the second frequency, wherein the frequency of the third signal component is below 1 gigahertz.