An analysis apparatus includes an extraction unit that extracts a baseline portion from chromatographic data that is acquired from an apparatus, and a determination unit that determines a normality in the apparatus based on normal chromatographic data and a feature of the baseline portion of the chromatographic data extracted by the extraction unit.

A thermal conductivity detector (TCD) includes: a detection channel through which a gas to be measured flows as a fluid; a thermal conduction part that has a filament provided at a position in the detection channel where the filament comes into direct contact with the fluid flowing through the detection channel, thereby conducting heat through the fluid flowing through the detection channel; and a detection circuit for detecting an electric signal based on a change in a voltage or a current of the filament. The thermal conduction part has a plurality of filament sections that are substantially parallel to a flow direction of the fluid flowing through the detection channel.

A thermal conductivity detector (TCD) includes: a detection channel through which a gas to be measured flows as a fluid; a thermal conduction part that has a filament provided at a position in the detection channel where the filament comes into direct contact with the fluid flowing through the detection channel, thereby conducting heat through the fluid flowing through the detection channel; and a detection circuit for detecting an electric signal based on a change in a voltage or a current of the filament. The thermal conduction part has a plurality of filament sections that are substantially parallel to a flow direction of the fluid flowing through the detection channel.

A unitary distribution plate of a Gas chromatograph (GC) module having a plurality of valve bores disposed on a bottom surface of the unitary distribution plate and a least one sensor cell and at least one column port machined into the top surface of the unitary distribution plate. The valve bores and sensor cells are connected by fluid pathways within a thickness of the distribution plate. The pathways include a combination of planar, longitudinal, diagonal, and radial fluid pathways relative to the top surface of the distribution plate. The fluid channels are formed by diffusion bonding or more generally laminating multiple plates into the unitary distribution plate.

A unitary distribution plate of a Gas chromatograph (GC) module having a plurality of valve bores disposed on a bottom surface of the unitary distribution plate and a least one sensor cell and at least one column port machined into the top surface of the unitary distribution plate. The valve bores and sensor cells are connected by fluid pathways within a thickness of the distribution plate. The pathways include a combination of planar, longitudinal, diagonal, and radial fluid pathways relative to the top surface of the distribution plate. The fluid channels are formed by diffusion bonding or more generally laminating multiple plates into the unitary distribution plate.

A Gas Chromatograph (GC) detector comprises a first circuit, a second circuit, a digital subtractor and a digital logic shared between one to many detector channels to provide a GC measurement in a digital form. The first circuit includes a first counter circuitry to provide a first counter output. The second circuit includes a second counter circuitry to provide a second counter output. The GC detector includes a digital subtractor to subtract the first counter output from the second counter output and provide a digital subtractor output. The GC detector further includes a digital logic shared between one to many detector channels to implement at least a portion of the first counter circuitry and the second counter circuitry. The digital logic to receive the digital subtractor output and provides the GC measurement in the digital form. The GC detector may be based on a Thermal Conductivity Detector (TCD) in which an integrator of a Sigma-Delta (Σ-Δ) A/D converter is eliminated and the Σ factor of the Sigma-Delta (Σ-Δ) A/D converter is accomplished in a digital form.

A Gas Chromatograph (GC) detector comprises a first circuit, a second circuit, a digital subtractor and a digital logic shared between one to many detector channels to provide a GC measurement in a digital form. The first circuit includes a first counter circuitry to provide a first counter output. The second circuit includes a second counter circuitry to provide a second counter output. The GC detector includes a digital subtractor to subtract the first counter output from the second counter output and provide a digital subtractor output. The GC detector further includes a digital logic shared between one to many detector channels to implement at least a portion of the first counter circuitry and the second counter circuitry. The digital logic to receive the digital subtractor output and provides the GC measurement in the digital form. The GC detector may be based on a Thermal Conductivity Detector (TCD) in which an integrator of a Sigma-Delta (Σ-Δ) A/D converter is eliminated and the Σ factor of the Sigma-Delta (Σ-Δ) A/D converter is accomplished in a digital form.

A thermoresistive gas sensor, e.g. for a flow sensor or a thermal conductivity detector, has a lattice with lattice webs, which consist of a semiconductor material arranged in the plane of the lattice in parallel next to one another, wherein the semiconductor material is formed on a plate-shaped semiconductor substrate that extends over a window-like cutout in the semiconductor substrate and forms the lattice, where the semiconductor layer is doped outside the cutout in areas of two ends of the lattice at least over the width of the lattice until it degenerates and/or bears metallizations, where the semiconductor layer further contains a separation structure insulating the two ends of the lattice from one another, in which the semiconductor material is removed or is not doped, and where the lattice webs extend in an S shape and are connected electrically in parallel to achieve a high measurement sensitivity and mechanical stability.

A thermoresistive gas sensor, e.g. for a flow sensor or a thermal conductivity detector, has a lattice with lattice webs, which consist of a semiconductor material arranged in the plane of the lattice in parallel next to one another, wherein the semiconductor material is formed on a plate-shaped semiconductor substrate that extends over a window-like cutout in the semiconductor substrate and forms the lattice, where the semiconductor layer is doped outside the cutout in areas of two ends of the lattice at least over the width of the lattice until it degenerates and/or bears metallizations, where the semiconductor layer further contains a separation structure insulating the two ends of the lattice from one another, in which the semiconductor material is removed or is not doped, and where the lattice webs extend in an S shape and are connected electrically in parallel to achieve a high measurement sensitivity and mechanical stability.

The invention relates to a heat flux sensor including: a heating wire (1) including a material capable of being taken to a determined temperature by Joule effect, suited to being connected to an electrical source, a resonator (2) of nano electro mechanical system (NEMS) type including: a beam (20) suspended with respect to a support (21), an actuating device (22) capable of generating a vibration of said beam under the effect of an excitation signal, a detection device configured to measure a displacement of said beam in the course of said vibration and to emit an output signal having a resonance at the resonance frequency of the resonator, said resonance frequency depending on the temperature of the beam,
wherein one end (20a) of the beam (20) is integral with the heating wire (1) so as to enable a conduction of heat from the heating wire to the beam, a variation in temperature of the heating wire induced by a variation in a characteristic of a fluid surrounding said wire causing a variation in the resonance frequency of the resonator.