A method of obtaining the concentration of one component in a fluid mixture of a plurality of components, comprising leading to one side of a sensing element from a source of said mixture a sample of said mixture, leading to another side of said sensing element from said source another sample of said mixture after having substantially removed said one component therefrom, thereby to cause a monitoring device to which said sensing element is connected to signal the ratio between the concentrations of the one component in the samples at the respective sides of the sensing element.

The invention relates to a sensor structure and a method. The sensor structure includes a first sensor having a sensing element sensitive to humidity of the environment. In accordance with the invention the sensor structure also includes s second sensor having a sensing element sensitive to humidity, the second sensor comprising a catalytic permeable layer positioned on the second sensor such that it is between the sensing element of the second sensor and the environment.

A system includes a plurality of semiconductor processing tools; a carrier purge station; a carrier repair station; and an overhead transport (OHT) loop for transporting one or more substrate carriers among the plurality of semiconductor processing tools, the carrier purge station, and the carrier repair station. The carrier purge station is configured to receive a substrate carrier from one of the plurality of semiconductor processing tools, purge the substrate carrier with an inert gas, and determine if the substrate carrier needs repair. The carrier repair station is configured to receive a substrate carrier to be repaired and replace one or more parts in the substrate carrier.

A method for chemical analysis of a gaseous sample comprising a first species, the first species exhibiting a spectroscopic first activity in a predetermined wavelength range, comprises: converting the first species into a second species by reaction with a conversion reagent in a conversion cell, the second species exhibiting a spectroscopic second activity greater than the first activity; acquiring an absorption spectrum by spectroscopic measurement of the gaseous sample in a measuring cell fluidically connected to the conversion vial after the converting of the first species into the second species; and mathematically processing the absorption spectrum to deduce a concentration of the first species in the gaseous sample.

A measuring device for measuring a concentration of a gas component in a gas includes a flow generating device, a first conduit, a second conduit, and an electrochemical detector configured for sensing the gas component concentration in the gas. The first and second conduits are arranged in parallel, and the flow generating device is connected with an inlet of the first conduit and an inlet of the second conduit. The flow generating device is arranged for generating a gas flow in each of the conduits. The measuring device is arranged to alternately couple either an outlet of the first conduit or an outlet of the second conduit to an inlet of the detector, wherein the first conduit is provided with a reactant for absorbing or stripping the gas component.

A method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. The method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. Inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.