An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.

Methods and systems for detecting and limiting the water in a photoionization detector are provided. The method may include powering off a lamp configured to ionize particles of air. The method may also include monitoring a signal from the photoionization detector. The signal may be monitored based on a current between a signal electrode and a bias electrode. In an instance the signal is above a signal threshold, the method may also include electrolyzing one or more particles of water present in the photoionization detector by closing a leakage switch in order to allow current to flow through the bias electrode and the signal electrode. In an instance the signal is below the signal threshold, the method may include powering on the lamp to begin photoionization detection. Corresponding systems are also provided.

Embodiments of the present specification provide methods and systems for maintaining accuracy and precision of calibration for a detector. The methods and systems include reducing the humidity of an internal calibration assembly by directing flow path of dry air periodically through the internal calibration assembly.

Methods and systems for detecting and limiting the water in a photoionization detector are provided. The method may include powering off a lamp configured to ionize particles of air. The method may also include monitoring a signal from the photoionization detector. The signal may be monitored based on a current between a signal electrode and a bias electrode. In an instance the signal is above a signal threshold, the method may also include electrolyzing one or more particles of water present in the photoionization detector by closing a leakage switch in order to allow current to flow through the bias electrode and the signal electrode. In an instance the signal is below the signal threshold, the method may include powering on the lamp to begin photoionization detection. Corresponding systems are also provided.

A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.

A microelectromechanical gas sensor including a fixed part, at least one suspended part in relation to fixed part, at least one sensitive zone carried on the suspended part, the sensitive zone being able to adsorb/absorb and desorb gaseous species or families of gaseous species, a heater for heating at least the sensitive zone, a detector for detecting the adsorption/absorption and desorption of gaseous species or families of gaseous species on the sensitive zone, a controller of controlling the heater so that the heating is applied to at least the sensitive zone with one or more temperature profiles ensuring the adsorption/absorption and desorption of the gaseous species in a controlled manner so as to obtain an individual desorption of each species or families of gaseous species.

A gas detecting device includes a casing, an optical mechanism, a gas transporting actuator, a laser module, a particle detector and an external sensing module. The casing includes a chamber, an inlet, an outlet and a communication channel. The optical mechanism is disposed in the chamber. The optical mechanism includes an airflow channel and a light-beam channel. The airflow channel is in fluid communication with the at least one inlet and the outlet. The light-beam channel is in communication with the airflow channel. The gas transporting actuator is disposed on the optical mechanism. The laser module is disposed in the optical mechanism for emitting a light beam to the airflow channel. The particle detector detects sizes and a concentration of the suspended particles in the air. The external sensing module is installed in the communication channel to measure the air.

A method for utilizing a gas sampling panel is provide, including at least one system sample gas inlet, a purge gas inlet, a system outlet, a system vent outlet, a purge gas valve, at least one manifold station valve, a regulator isolation valve, a regulator, a flow meter inlet valve, a flow meter, a flow meter outlet valve, a relief valve, a process valve, a process check valve, a purge check valve, and a vent check valve.

A device (1) for generating clean air in a measuring apparatus, comprising: a duct (2) having an inlet and an outlet for the passage of an air flow to be cleaned; a platinum wire (3), positioned inside the duct (2), for intercepting the air flow to be cleaned, the platinum wire (3) is inserted in an electrical circuit (17) connectable to an electricity supply (15) to be operatively crossed by an electrical current.

A gas sampling lance with a gas sample pipe for sampling gases wherein the gas sample pipe is divided in a lance pipe and a connecting pipe which connects the lance pipe to a gas scrubber, a first scraper to clean the inside of the lance pipe and a second scraper to clean the inside of the connecting pipe.