A MEMS includes, in part, a parallel plate capacitor, a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor, and a piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS. The second voltage causes the MEMS to transition from a standby mode to an active mode of operation. The proofmass is displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage. A spring couples the proofmass to the piezoelectric material, and a transistor turns on in response to the second voltage thereby causing the MEMS to transition to the active mode of operation. The proofmass returns to the rest state when the MEMS is in the active mode of operation.

A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.

A MEMS includes, in part, a parallel plate capacitor, a proofmass adapted to be displaced by a first distance from a rest state in response to a first voltage applied to the capacitor, and a piezoelectric material adapted to generate a second voltage in response to an external force applied to the MEMS. The second voltage causes the MEMS to transition from a standby mode to an active mode of operation. The proofmass is displaced by a second distance in response to the external force thereby causing the piezoelectric material to generate the second voltage. A spring couples the proofmass to the piezoelectric material, and a transistor turns on in response to the second voltage thereby causing the MEMS to transition to the active mode of operation. The proofmass returns to the rest state when the MEMS is in the active mode of operation.

A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.

A MEMS accelerometer incorporating a metrology element to directly measure minute changes in measurement baseline. In particular, the MEMS accelerometer incorporates a metrology bar (MB). Embodiments also relate to stress isolation into the sensor design to isolate the sensitive areas of the chip (i.e., the metrology baseline and the proof mass mounting points) from outside stress.

A MEMS system includes a proof mass, an anchor, an amplifier, first and second sense elements and their corresponding feedback elements. The proof mass moves responsive to a stimulus. The anchor coupled to the proof mass via a spring. The amplifier receives a proof mass signal from the proof mass and amplifies the signal to generate an output signal. The first sense element is connected between the proof mass and a first input signal and the second sense element is connected between the proof mass and a second input signal. The second input signal has a polarity opposite to the first input signal. The first feedback element is connected between the proof mass and the output signal and its charges change responsive to proof mass displacement. The second feedback element is connected between the proof mass and the output signal and its charges change in response to proof mass displacement.

An illustrative example embodiment of a sensing device includes a force sensor that detects a force and provides an output indicative of the detected force. An acceleration sensor detects acceleration and provides an output indicative of the detected acceleration. A processor receives the output from the force sensor and the acceleration sensor. The processor provides an indication of a relationship between the detected force and the detected acceleration.