A mirror holding structure includes: a holder; at least one protrusion part provided to one of a mirror body and the holder; at least one reception part provided to the other of the mirror body and the holder and having an insertion hole in which the at least one protrusion part is to be inserted; and at least one elastic part located between an outer peripheral surface of the at least one protrusion part and an inner peripheral surface of the insertion hole and being elastic.

A driving apparatus which is capable of smoothly moving a follower by a cam portion, and realizes the stopper structure of the follower by a small number of components without the size increased. The driving apparatus comprises an up cam gear having an up radial cam and an up thrust cam, and a down cam gear unit having a down radial cam and a down thrust cam. The up cam gear and the down cam gear unit mesh with each other in a vicinity of a region in which a lift amount of the up radial cam with respect to the follower increases. In a vicinity of a position at which the up cam gear and the down cam gear unit mesh with each other, a lift amount of the up thrust cam is larger than a lift amount of the down thrust cam in the thrust direction.

A measurement illumination optical unit guides illumination light into an object field of a projection exposure apparatus for EUV lithography. The illumination optical unit has a field facet mirror with a plurality of field facets and a pupil facet mirror with a plurality of pupil facets. The latter serve for overlaid imaging in the object field of field facet images of the field facets. A field facet imaging channel of the illumination light is guided via any one field facet and any one pupil facet. A field stop specifies a field boundary of an illumination field in the object plane. The illumination field has a greater extent along one field dimension than any one of the field facet images. At least some of the field facets include tilt actuators which help guide the illumination light into the illumination field via various field facets and one and the same pupil facet.

The invention relates to a heliostat sub-assembly and to a method of forming such a sub-assembly. The method of mounting a concave mirror to a supporting structure of a heliostat includes the steps of bonding a plurality of risers at predetermined spaced intervals to a rear face of the mirror, each riser having a bonding pad and a stem extending from the bonding pad, and applying a predetermined concave curvature to the mirror by conforming the front face of the mirror with a convex forming jig or die. The supporting structure and curved mirror are then aligned, and the supporting structure is clinched to the stems of the risers when the curved mirror is conformed with the forming die. The riser stems may be coupled to the bonding pads via multi-axial joint assemblies to enable limited multi-pivotal movement of the stems relative to the bonding pads to facilitate alignment of faces of the stems with the faces of the ribs defined by webs, and relative expansion and contraction of the mirror and supporting structure, the overlap between the riser stems and the webs being sufficient to accommodate clinching with variations in curvature of the glass sheet.

The present invention relates to a mirror assembly for use by an individual, the mirror assembly comprising: —a base unit (4) having a user fastening (6) for releasably fastening the base unit to a user; and a mirror unit (1) connected to the base unit by an arm member (2,3), the arm member being deployable to move the mirror unit away from the base unit, wherein the arm member is formed of first and second limbs, hingedly coupled together. The present invention further concerns a strap for use with such an assembly.

An additive manufacturing system including a two-dimensional energy patterning system for imaging a powder bed is disclosed. Improved structure formation, part creation and manipulation, use of multiple additive manufacturing systems, and high throughput manufacturing methods suitable for automated or semi-automated factories are also disclosed.

An actuator device includes a motor and a reduction device operatively coupled to the motor and oriented about a central axis, the reduction device configured to modify an input angle of rotation provided by the motor to an output angle of rotation. Further included is a rotary flexure mechanism that includes a rotary flexure operatively coupled to an output portion of the reduction device. The rotary flexure mechanism also includes a plurality of flexure blades coupled to the rotary flexure, each of the flexure blades angularly oriented from the central axis. The rotary flexure mechanism further includes a diaphragm flexure pair operatively coupled to the flexure blades, wherein the diaphragm flexure comprises a rotational and in-plane stiffness greater than an axial stiffness resulting in the rotary flexure mechanism being configured to convert a rotational input to an axial translation.

The invention concerns an adjustment system for aligning optical elements and/or samples in vacuum (3) for projecting electromagnetic radiation in the terahertz range up to the range of hard X-ray radiation, consisting of at least one vacuum chamber (3″), at least one mirror (3′) adjustable in spatial direction and/or at least one optical element adjustable in spatial direction or at least one sample adjustable in spatial direction, with translational actuators (X1, X2, Z1, Z2, Z3) in the undeflected state (idle state) being provided for adjusting the alignment of the at least one mirror (3′) adjustable in spatial direction and/or the at least one optical element adjustable in spatial direction or the at least one sample adjustable in spatial direction in a maximum of three essentially mutually perpendicular spatial directions (X, Y, Z, y, y, z).

Pursuant to the invention it is provided that the at least one mirror (3′) adjustable in spatial direction (X, Y, Z, y, y, z) and/or the at least one optical element adjustable in spatial direction (X, Y, Z, y, y, z) or sample within the vacuum chamber (3″) is mounted in a fixed position in relation to the vacuum chamber (3″), with the vacuum chamber (3″) being directly or indirectly connected with the translational actuators (X1, X2, Z1, Z2, Z3) for aligning the spatial position of the mirror and/or the optical element or the sample.

This setup facilitates a very compact and small design of the vacuum chamber and achieves a very high precision of the alignment.

The disclosure relates to arrangements for manipulating the position of an element. An arrangement according has at least one actuator for each degree of freedom of the positional manipulation for exerting adjustable forces on the element, at least one position sensor for each degree of freedom of the positional manipulation for generating in each case a sensor signal that is characteristic of the position of the element, and at least one position controller, which in a position control circuit controls a force exerted on the element by the at least one actuator for the positioning of the element in dependence on the at least one sensor signal. At least one actuator and at least one position sensor are mounted on a common module frame.

In a directed infrared countermeasure system, to assure parallelism between the line-of-sight to a target and the output beam, the input and output mirrors are fixedly attached to a uni-construction arm mounted to a rotatable azimuth platter to which internal mirrors are also fixedly attached. A system is provided for zeroing out alignment errors by developing an aim-point map for the gimbal that records initial alignment errors induced by manufacturing tolerances and uses the aim-point map error values to correct the output mirror orientation. The system also corrects for alignment errors induced by thermal gradients.