A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

An optical device includes a base layer, and active layers on the base layer and having optical IC devices. The optical device also includes a cover layer over the base layer and encapsulating the optical IC devices, the base layer and the cover layer each having a glass material.

An optical device includes a base layer, and active layers on the base layer and having optical IC devices. The optical device also includes a cover layer over the base layer and encapsulating the optical IC devices, the base layer and the cover layer each having a glass material.

Reflective optics for transporting, transforming or correcting a light beam in particular of the laser type, including a mirror receiving the light beam, a primary cooling circuit formed by an intermediate chamber of thermally conductive fluid arranged against the mirror at the rear thereof, and a secondary cooling circuit formed by a thermal heat sink arranged against the intermediate chamber of thermally conductive fluid, the heat sink being either in the form of a cold mass cooled by convection or conduction, or in the form of a plate made from a material with good thermal conductivity, the heat sink having a size and a shape equivalent to those of the reflective optics.