A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

A projection exposure apparatus for semiconductor lithography includes a mirror and a temperature-regulating device for regulating temperature on the basis of radiation. The mirror includes at least one cutout. The temperature-regulating device includes a temperature-regulating body arranged without contact in the cutout of the mirror. The temperature-regulating body has a cavity. A fluid for temperature regulation of the temperature-regulating body is present in the cavity.

An assembly in an optical system, such as a microlithographic projection exposure apparatus, includes an optical element, at least one cooling channel through which can flow a cooling fluid for cooling the optical element during the operation of the optical system, and at least one corrosion detector for detecting an existing or imminent corrosion on the basis of the determination of at least one measurement variable indicating a corrosion-dictated change in state of the cooling fluid.

A display mirror assembly for a vehicle includes a housing. An electro-optic element may be operably coupled with the housing. A circuit board may be adjacent the electro-optic element. An electrostatic fluid accelerator may be adjacent the circuit board and may be configured to move ions within the housing. An actuator device may be disposed on the housing and may be operably coupled with the electro-optic element. The actuator device may be adjustable to tilt the electro-optic element in one direction, thereby moving the electro-optic element to an off-axis position which approximately simultaneously changes an activation state of a display module. The actuator device may be also adjustable to tilt the electro-optic element in another direction, thereby moving the electro-optic element to an on-axis position which approximately simultaneously changes the activation state of the display module.

The present disclosure generally pertains to lightweight adaptive metal cooled mirrors and methods of producing the same. The metal mirror surface is integrated with and supported by metal channels which are physically incorporated into the mirror surface through an additive manufacturing process. These channels are nominally conformal with the desired mirror surface shape. A liquid or gaseous coolant may be directed through some or all of the channels to cool the mirror surface. The mirrors are produced through an additive manufacturing process which allows for the creation of a unitary optical mirror containing finely spaced channels.

The present disclosure generally pertains to lightweight adaptive metal cooled mirrors and methods of producing the same. The metal mirror surface is integrated with and supported by metal channels which are physically incorporated into the mirror surface through an additive manufacturing process. These channels are nominally conformal with the desired mirror surface shape. A liquid or gaseous coolant may be directed through some or all of the channels to cool the mirror surface. The mirrors are produced through an additive manufacturing process which allows for the creation of a unitary optical mirror containing finely spaced channels.

An optical module includes: a lens unit including a collimating lens array that collimates a plurality of beams output from a multi-emitter semiconductor laser bar including a plurality of emission points; and element units including respective optical elements disposed in front of the lens unit in a direction of propagation of the beams, in which the element units further include respective holding members that hold the respective optical elements. An orientation of a curve of the collimating lens array and orientations of curves of the optical elements are aligned with an orientation of a curve of a line connecting the plurality of emission points, and the holding members are joined by corresponding third joining members in the direction of propagation.

A method for cooling an optical element for EUV applications is disclosed. Heat is transferred from the optical element to a heat sink, and, via a first feed line, a first cooling medium is introduced into a cooling channel in the heat sink, in such a way that the first cooling medium effects laminar flow through the cooling channel and in the process absorbs heat from the heat sink. After flowing through the cooling channel, the first cooling medium is discharged into a discharge line leading away from the optical element. A second cooling medium is introduced into the discharge line via a second feed line, and the first cooling medium and the second cooling medium, downstream of the second feed line at a location that is further away from the optical element than the cooling channel, are subjected to a force field introduced into the discharge line externally.

An optical device may include an optical body having first and second opposing sides, and passageways extending between the first and second opposing sides. The optical device includes a mirror layer carried by the optical body adjacent the second opposing side, thermally conductive fingers extending in the passageways, and a heatsink carried by the optical body adjacent the first opposing side and coupled to the thermally conductive fingers.

An optical device may include an optical body having first and second opposing sides, and passageways extending between the first and second opposing sides. The optical device includes a mirror layer carried by the optical body adjacent the second opposing side, thermally conductive fingers extending in the passageways, and a heatsink carried by the optical body adjacent the first opposing side and coupled to the thermally conductive fingers.