A steerable laser transmitter pairs a MEMS MMA with an optical amplifier to provide a high-power steered laser beam over a wide FOR. A single MEMS MMA may be positioned downstream of the optical amplifier. In a two-stage architecture, a MEMS MMA provides continuous fine steer upstream of the optical amplifier and a beam steerer, another MEMS MMA or a QWP and stack of switchable PGs, provides discrete coarse steering downstream. In the two-stage architecture, the upstream MEMS MMA is configured to limit its steering range to the acceptance angle of the optical amplifier, at most ±2°×±2°. The MEMS MMA may include piston capability to shape the wavefront of the beam.

A calibration circuit providing a programmable voltage generator that is selectively connectable to a first capacitor plate of a capacitive structure to supply a voltage thereto. A reference voltage generator is coupled to the output of the programmable voltage generator and generates a reference voltage. A comparator receives the reference voltage and a discharging voltage from the capacitive structure during a discharge period and, based on those inputs, generates a signal that is output to a digital controller. A constant current source is selectively connectable to the capacitive structure to generate a constant current. Based on the output of the comparator, the constant current, and a count representing a time during which the discharging voltage decreases, the digital controller measures capacitance to calibrate a movable mirror of the capacitive structure. During calibration, the digital controller controls the programmable voltage generator and a second capacitor plate of the capacitive structure.

A method for designing an optical scanning mirror is provided. The method may include receiving, by a communication interface, a set of design parameters of the scanning mirror. The method may also include simulating scanning mirror oscillation, by at least one processor, based on the set of design parameters using a computer model. In certain aspects, the computer model may include a lookup table that correlates electrostatic force applied to a sample scanning mirror and angular displacement in the sample scanning mirror caused by the electrostatic force. The method may further include generating, by the at least one processor, mirror oscillation data as an output of the computer model for designing the scanning mirror. The mirror oscillation data may include a correlation of drive frequency, angular displacement, and time.

A Micro-Electro-Mechanical Systems (MEMS) device includes a substrate, an electronic circuit mounted on the substrate, a movable element mounted on the substrate whose movement is controlled by application of an operating voltage by the electronic circuit, a stopper mounted on the substrate that stops the movement of the movable element through mechanical contact of the stopper with the movable element, and an auto-inspection mechanism that applies a test voltage between the movable element and the stopper and determines whether or not a leak current is present. The auto-inspection mechanism is mounted, at least in part, on the substrate. The test voltage is lower than the operating voltage.

A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.

The present disclosure provides a MEMS micromirror with a high duty cycle, a micromirror array, and a preparation method thereof, wherein a plurality of first movable combs and a plurality of first fixed combs of the MEMS micromirror are located under the silicon layer of the reflector, which improves the duty cycle and effectively reduces the size of the MEMS micromirror while achieving large angle deflection in two directions. The silicon layer of the reflector has a reinforcing rib underneath, which effectively improves surface smoothness of the MEMS micromirror when the latter is still or moving. In addition, the MEMS micromirror has a variety of electrode lead-out forms including a double-sided electrode structure, and the electrode lead-out form during actual implantation can be selected as needed, which is conducive to the commercialization of MEMS micromirrors and micromirror arrays.

The present disclosure relates to an optical scanner package comprising a scanner element, a lower substrate having an inner space, and a semi-spherical transmissive window. The semi-spherical transmissive window has different inclinations in an incident position thereof and in an emission position thereof, and interference caused by sub-reflection can thus be reduced. Since the incident angle α and the maximum emission angle β are small, anti-reflection coating design is easy, and light loss can be reduced. There is an advantage in that, even when the optical scanning angle (OSA) γ of a laser is large, the maximum emission angle β is small, and emitted laser light thus has a small change in characteristics. In addition, since there are curvatures on both sides of two axes, there is little restriction regarding the incident direction even in the case of two-axis driving.

Systems and Apparatus for micromirror designs with electrode contact. In some examples, a micromirror including a mirror, a mirror via coupled to the mirror, a hinge coupled to the mirror via, the hinge including a springtip associated with a first side of the micromirror, the springtip associated with a first terminal, and an electrode associated with the first side of the micromirror, the electrode having a dielectric coating in contact with the springtip, the electrode associated with a second terminal different than the first terminal.

A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.