A camera device is provided, including a first lens unit, a second lens unit, a frame, a base, a plurality of suspension wires, and an electromagnetic driving mechanism. The frame surrounds the first lens unit and the second lens unit. The suspension wires are connected to the base and the frame. The electromagnetic driving mechanism can drive the frame to move along a first direction relative to the base.

A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.

A scanning mirror apparatus, including a hermetic package having a cavity formed therein; a micro-mirror device with a reflective mirror surface disposed within the cavity; a gaseous species with pressure and with humidity content less than a predetermined index value disposed within the cavity; an optical transparent window disposed on the hermetic package bonded by glass frit bonding or metal bonding covering the internal cavity, the optical transparent window containing the gaseous species inside the internal cavity; and at least one metal pin for providing a signal, power, or ground to the micro-mirror device, attached to the hermetic package by glass frit bonding.

An actuator that swings a swing portion about a first axis and a second axis perpendicular or substantially perpendicular to each other, includes a fixed portion, two first stator cores, two second stator cores, two first coils, and two second coils. The first coil is in the same region as a tooth portion of the first stator core, and the second coil is in the same region as a tooth portion of the second stator core. As viewed in a central axis direction, each extending portion of each of the first stator cores includes end surfaces that face a magnet and oppose each other with the magnet interposed therebetween along the first axis, and each extending portion of each of the second stator cores includes end surfaces that face the magnet and oppose each other with the magnet interposed therebetween along the second axis.

An optical member driving mechanism is provided. The optical member driving mechanism includes a first movable portion, a fixed portion, a first driving assembly, and a plurality of second guiding members. The first movable portion is configured to connect an optical member. The optical member is used for adjusting a direction of a light from an incident direction to an outgoing direction. The first movable portion can move relative to the fixed portion. The first driving assembly is configured to drive the first movable portion to move relative to the fixed portion. The second guiding members include a first ball, a second ball, and a third ball. The first ball, the second ball, and the third ball are disposed in a plane that is perpendicular to the incident direction.

An optical scanning device includes a substrate and a plurality of movable mirror elements. The substrate includes a main surface. The plurality of movable mirror elements are two-dimensionally arranged on the main surface of the substrate. The plurality of movable mirror elements are capable of operating independently of each other and capable of forming a diffraction grating. Each of the plurality of movable mirror elements includes a beam, a movable mirror, and a pillar. The beam is bendable in a direction perpendicular to the main surface. The movable mirror includes a movable plate and a mirror film disposed on the movable plate. The pillar connects the movable plate and the beam to each other.

A display apparatus comprises a mirror oscillating about a first axis upon excitation by a first excitation signal and about a second axis upon excitation by a second excitation signal, a light source projecting a light beam onto the mirror for deflection towards an image plane, the light source being controller according to pixels read-out by an image processor from a buffer, a gaze tracker detecting a user’s region of interest, ROI, within the image plane, and a controller modulating one of the excitation signals by a modulation signal which is dependent on the ROI such that the number of passes of the light beam per unit area is higher in the ROI than in a region outside thereof, wherein the number of pixels read-out per unit area by the image processor is higher in the ROI than in a region outside of the ROI.

An optical arrangement, in particular to a lithography system, includes: a first component, in particular a carrying frame; a second component which is movable relative to the first component, in particular a mirror or a housing; and at least one stop having at least one stop face for limiting the movement of the second component in relation to the first component. The stop includes a metal foam for absorbing the kinetic energy of the second component when it strikes against the stop face. A method for repairing an optical arrangement of this kind after a shock load includes replacing at least one stop, in which the metal foam was compressed under the shock load, with a stop in which the metal foam is not compressed.

A method and apparatus for quantitatively characterizing performance of a laser steering galvanometer mirror directs a laser beam from a calibration “sensor” onto a side region of the mirror to directly determine rotational positioning, velocity, and/or acceleration thereof using interferometry, time-of-flight measurements, and Doppler measurements. Measured positioning errors can be compared with a database to predict required calibration adjustments. Embodiments automatically adjust digital calibrations. Mirrors, splitters, and/or a plurality of sensors can apply measurement beams simultaneously or sequentially to both sides of a mirror, and/or to more than one mirror. Large rotation ranges, for example larger than +/−15 degrees, can be accommodated by applying measurement beams from a plurality of directions. The calibration apparatus can be distinct, or integral with the galvanometer, and can be used to monitor and/or to control the mirror positioning.