The micromirror device includes a mirror part, a first actuator that reciprocally rotates the mirror part about the first axis, and a second actuator that reciprocally rotates the mirror part about the second axis. A resonance frequency Ain a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator are rotated about the first axis in opposite phases to each other, a resonance frequency B in a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator oscillate in opposite phases in a direction orthogonal to both of the first axis and the second axis, a frequency difference F=A−B, a resonance frequency C less than F and closest to the F, and a resonance frequency D greater than F and closest to F satisfy F−C≥20 Hz and F−D≤−150 Hz.

A piezoelectric rotary optical mount including a clamp including a first hole to hold a hollow member, wherein a contact between the clamp and the hollow member generates a coefficient of friction; a bias element adjacent to the first hole to apply a force to control rotational movement of the hollow member by adjusting the coefficient of friction; and a piezoelectric element to actuate the bias element to apply the force. The clamp may include a housing body including a first end and a second end, wherein the first hole extends in a first axis through the housing body to accommodate the hollow member; a pair of elongated cutout regions extending from the first hole towards the second end to define the bias element; and a second hole adjacent to at least one of the cutout regions to accommodate the piezoelectric element.

Examples are disclosed that relate to pixel-shifting devices for increasing display resolution. One example provides a pixel-shifting device comprising an outer frame, an inner frame coupled to the outer frame via a flexure, a path-shifting optical element mounted to the inner frame, and one or more piezoelectric actuators configured to drive motion of the inner frame.

The micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a pair of movable frames that face each other across the first axis; a second support portion that swingably supports a movable portion around a second axis; a driving portion that surrounds the movable portion and has a gap with the second support portion on the second axis; a coupling portion that couples the second support portion and the driving portion; and a fixed frame, in which, in a state where the mirror portion rotates around the first axis and an absolute value of a rotation angle is larger than 0 degrees, assuming that, in a plane orthogonal to the first axis and including the second axis, a distance between an intersection between the second axis and a straight line located on a surface of the second support portion and including each end point of the second support portion and an end part of the second support portion on a mirror portion side in a stationary state is denoted by A, and a total length of the second support portion in a direction of the second axis is denoted by L, a relationship of A/L ≤ 2/3 is satisfied.

The micromirror device includes: a mirror portion; a first support portion that swingably supports the mirror portion around a first axis; a pair of movable frames that face each other across the first axis; a second support portion that swingably supports a movable portion around a second axis; a driving portion that surrounds the movable portion and has a gap with the second support portion on the second axis; a coupling portion that couples the second support portion and the driving portion; and a fixed frame, in which, in a state where the mirror portion rotates around the first axis and an absolute value of a rotation angle is larger than 0 degrees, assuming that, in a plane orthogonal to the first axis and including the second axis, a distance between an intersection between the second axis and a straight line located on a surface of the second support portion and including each end point of the second support portion and an end part of the second support portion on a mirror portion side in a stationary state is denoted by A, and a total length of the second support portion in a direction of the second axis is denoted by L, a relationship of ⅔<A/L is satisfied.

An apparatus and a method for image display include a projection screen, a projection device, a control unit, and an imaging element. The projection screen is movable back and forth along an axis perpendicular to the projection face under control from the control unit. The control unit is configured to divide an image to be projected into a set of sub-images depending on distances, of one or more objects in the image, to be perceived by a user along the axis, and to control the projection screen and the projection device such that the projection device projects the set of sub-images onto the projection face when the projection face is moving to different positions respectively. The imaging optical element is configured to form a virtual image of the respective sub-image when the projection face is moving to the corresponding position.

An actuator includes a first driving beam that is connected to an object to be driven and includes multiple first beams extending in a direction orthogonal to a first predetermined axis, ends of each adjacent pair of the first beams being connected to each other via one of first turnaround parts such that the first driving beam forms a zig-zag bellows structure as a whole; first driving sources formed on first surfaces of the first beams; and ribs formed on second surfaces of the first beams at positions that are closer to the first predetermined axis than the first turnaround parts. The first driving sources are configured to move the first driving beam and thereby rotate the object around the first predetermined axis.

An actuator including a beam configured to support an object to be driven, and a drive source to which a drive signal is input, wherein the drive signal includes a drive waveform in a shape of sawtooth waveform, a rising of the drive waveform in the shape of sawtooth waveform includes a first staircase waveform and a second staircase waveform continuing from the first staircase waveform, the first staircase waveform generates oscillation of a ringing suppressing waveform for suppressing a ringing waveform to be generated in the second staircase waveform, and the object to be driven is driven to swing in a direction of rotating around the predetermined axis by driving the drive source.

An optical scanning device includes a mirror that includes a mirror reflection surface, a driving part that drives the mirror, and a fixed frame that supports the mirror via the driving part. The fixed frame includes one or more inspection patterns that are formed while at least one of the mirror and the driving part is formed.

A mirror, e.g. for a microlithographic projection exposure apparatus, includes an optical effective surface, a mirror substrate, a reflection layer stack for reflecting electromagnetic radiation incident on the optical effective surface, at least one first electrode arrangement, at least one second electrode arrangement, and an actuator layer system situated between the first and the second electrode arrangements. The actuator layer system is arranged between the mirror substrate and the reflection layer stack, has a piezoelectric layer, and reacts to an electrical voltage applied between the first and the second electrode arrangements with a deformation response in a direction perpendicular to the optical effective surface. The deformation response varies locally by at least 20% in PV value for a predefined electrical voltage that is spatially constant across the piezoelectric layer.