An optical deflection apparatus includes a movable member configured to deflect incident light from a light emitter, and a lid member configured to cover the movable member. The lid member includes an opening through which the incident light and deflected light of the incident light pass. The deflected light is deflected by the movable member. The lid member includes a light attenuation portion configured to attenuate reflected light of the incident light or of the deflected light. The reflected light is reflected by the lid member.

Examples are disclosed herein related to controlling a scanning mirror system. One example provides a display device, comprising a light source, a scanning mirror system configured to scan light from the light source in a first direction at a first, higher scan rate, and in a second direction at a second, lower scan rate, and a drive circuit configured to control the scanning mirror system to display video image data by providing a control signal to the scanning mirror system to control scanning in the second direction, and for each video image data frame of at least a subset of video image data frames, combining the control signal with an adjustment signal to adjust the scanning in the second direction, the adjustment signal comprising a low pass filtered signal with a cutoff frequency based on a lowest resonant frequency of the scanning mirror system in the second direction.

A MEMS device includes a semiconductor body with a cavity and forming an anchor portion, a tiltable structure elastically suspended over the cavity, first and second support arms to support the tiltable structure, and first and second piezoelectric actuation structures biasable to deform mechanically, generating a rotation of the tiltable structure around a rotation axis. The piezoelectric actuation structures carry first and second piezoelectric displacement sensors. When the tiltable structure rotates around the rotation axis, the displacement sensors are subject to respective mechanical deformations and generate respective sensing signals in phase opposition to each other, indicative of the rotation of the tiltable structure. The sensing signals are configured to be acquired in a differential manner.

A light deflector includes a reflector having a reflecting surface, a movable part coupled to the reflector, a drive circuit configured to cause the movable part to deform so as to oscillate the reflector, a supporting unit having an opening in part; and a spring having a bending structure. The spring is disposed between the movable part and the supporting unit, the spring coupled to each of the movable part and the supporting unit.

An oscillator system includes an electrostatic oscillator structure configured to oscillate about an axis based on a deflection that varies over time; an actuator configured to drive the electrostatic oscillator structure about the axis, the actuator including a first capacitive element having a first capacitance dependent on the deflection and a second capacitive element having a second capacitance dependent on the deflection; a sensing circuit configured to receive a first displacement current from the first capacitive element and a second displacement current from the second capacitive element, to integrate the first displacement current to generate a first capacitive charge value, and to integrate the second displacement current to generate a second capacitive charge value; and a measurement circuit configured to receive the first and the second capacitive charge values and to measure the deflection of the electrostatic oscillator structure based on the first and the second capacitive charge values.

Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

Electrical connections are created between the actuator frame of a piezoelectric MEMS scanning mirror system and the substrate separate from the structural adhesive creating the mechanical bond between the actuator frame and the substrate. A structural bond (with no conducive properties) is formed between the actuator frame and the substrate. After the bond is fully formed, separate electric connections can be created by one or both of: 1) coating the actuator frame with a coating that enables a surface of the actuator frame to be wire bondable and creating a wire bond between the actuator frame and the substrate; or 2) depositing a trace of conductive material on the outside edge of the mechanical bond between the actuator frame and the substrate and a final protection layer may be applied over the conductive trace to protect the trace from mechanical or environmental damage.

A light deflector includes a stationary part; a movable unit having a reflecting surface; a connecting part between the movable unit and the stationary part; a drive unit disposed on a first surface of the connecting part, the drive unit configured to deform the connecting part to oscillate the movable unit; and a rib disposed on a second surface of the connecting part, the second surface being an opposite surface of the first surface. The rib includes a portion whose longitudinal direction is orthogonal to a direction at which the connecting part is bent.

In a micromirror device, in a case where a resonance frequency around a first axis is denoted by f.sub.1 and a resonance frequency around a second axis is denoted by f.sub.2, a relationship of f.sub.1<f.sub.2 is satisfied, and in a case where a mirror portion is driven around the first axis and the second axis simultaneously, the resonance frequency around the first axis changes by Δf from f.sub.1. A first driving signal and a second driving signal each having a driving frequency f.sub.d satisfying a relationship of f.sub.1−Δf<f.sub.d are provided to a first actuator and a second actuator, respectively, to cause the mirror portion to perform precession.

A method of making a MEMS actuator with a monolithic body of semiconductor material includes forming a supporting portion of semiconductor material, orientable with respect to first and second rotation axes, the first rotation axis being transverse with respect to the second rotation axis, and forming a first frame of semiconductor material. The method further includes forming first deformable elements, of semiconductor material, coupled to the first frame, and configured to control a rotation of the supporting portion about the first rotation axis. The method also includes forming a second frame of semiconductor material, and forming second deformable elements, of semiconductor material, coupled to the first frame and to the second frame, and configured to control a rotation of the supporting portion about the second rotation axis. The first and second deformable elements are formed to carry respective first and second piezoelectric actuation elements.