An optical scanning device and an imaging apparatus are provided. The optical scanning device includes a light source for emitting a light beam, a first optical unit for collimating the light beam emitted by the light source in a main scanning direction and focus the light beam in an auxiliary scanning direction, an optical deflector for deflecting the light beam, and an imaging optical system for guiding the light beam to a scanned surface for imaging. When the optical deflector deflects the light beam at a maximum deflection angle, the light beam in the main scanning direction forms a maximum incident angle Φ.sub.max with a normal line of the scanned surface. A spot tilt rate e/a of a light spot on the scanned surface satisfies

[00001]$\frac{e}{a}\le 10\%,$

where a is a size of the light spot in the main scanning direction and e is a spot tilt.

An exposure device that draws a pattern on a substrate by shining a beam from a light source device on substrate and scanning the beam in a main scanning direction while varying the intensity of beam according to pattern information, including: a scanning unit having a beam scanning unit that includes a polygonal mirror whereby the beam is oriented to scan the beam, and light detector for photoelectric detection of reflected light generated when beam is shined on substrate; an electro-optical element for controlling the beam's intensity modulation according to pattern information such that at least part of second pattern to be newly drawn is drawn on top of at least part of first pattern formed on substrate; and a measurement unit measuring relative positional relationship between the first and second pattern on the basis of a detection signal output by the detector while second pattern is drawn on substrate.

A laser measuring device includes a light transceiving module configured to emit laser pulses and receive laser pulses reflected by a detection object; a scanning module including a rotatable transmissive optical element, the scanning module being configured to change a transmission direction of the laser pulse passing through the scanning module; and a reflection module including a rotatable reflective optical element, the reflective optical element being configured to reflect the laser pulse passing through the reflective optical element, the scanning module and the reflection module being sequentially disposed on a light exiting path of the light transceiving module.

The present disclosure provides a light scanning unit and an electronic image forming apparatus including the light scanning unit. The light scanning unit includes a light source, a first optical unit, an optical deflector, and a second optical unit. The light source includes at least two light-emitting points; the at least two light-emitting points are distributed along a straight line; and an angle between an extension direction of a distribution line thereof and a main scanning direction or a secondary scanning direction of the light scanning unit includes an acute angle, where the main scanning direction is perpendicular to the secondary scanning direction. The first optical unit is configured to collimate at least two light beams emitted from the light source along the main scanning direction and to focus the at least two light beams emitted from the light source along the secondary scanning direction.

The light guide device includes a first light guide part, a polygon mirror, a second light guide part, and an adjustment part. The first light guide part reflects and guides the laser light emitted from the laser generator. The polygon mirror has a reflective part (33), and the reflective part (33) reflects the laser light guided by the first light guide part while the reflective part (33) rotates. The second light guide part reflects the laser light reflected at the reflective part (33) of the polygon mirror and directs the light so that the laser light is illuminated to the workpiece at each reflective part (33), respectively. The adjustment part adjusts the position of the light incident on the polygon mirror in the rotation axis direction of the optical axis, thereby changing the positions of light incident on the irradiation target in the line width direction. The irradiation target is irradiated with the light while the position of the light in a line width direction.

Various arrangements and methods are disclosed for forming one or more perforations on a substrate surface using a laser system, at least one rotating polygon mirror, and at least one other movable mirror. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface by incrementing (e.g., moving) a first mirror between a plurality of fixed (e.g., pointing) positions. A rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate using a first mirror that is maintained in a fixed (e.g., pointing) position. A first rotating polygon mirror and a second rotating polygon mirror may be used to define a plurality of perforations in a row set or band on a substrate surface, where the first and second polygon mirrors are used to define an extent of a given perforation in two dimensions on the substrate.

Disclosed is an optical scanning device, including: a motor (301) including a rotor (302) capable of rotating integrally with a shaft (305); a polygon mirror (308) including a through-hole (308g); a holding spring (309) configured to be engaged to the shaft (305) that is inserted into the through-hole (308g) and configured to press the polygon mirror (308) onto the rotor (302); and a restricting member (310) disposed in the through-hole (308g) of the polygon mirror (308), the restricting member (310) being configured to be in contact with the rotor (302) and the holding spring (309) and to restrict the holding spring (309) from moving toward a side of the rotor (302), wherein a linear expansion coefficient (A1) of the restricting member (310) is less than a linear expansion coefficient (B1) of the polygon mirror (308).

Embodiments of the disclosure provide an apparatus for adjusting a light beam that includes a microelectromechanical system (MEMS), a non-MEMS system. The MEMS may include: an array of first rotatable mirrors to receive and reflect the light beam and an array of first actuators configured to rotate each rotatable mirror of the array of first rotatable mirrors. The non-MEMS system may include a second adjustable mirror to receive and reflect the light beam and a second actuator configured to adjust the second adjustable mirror. The light beam received by the array of first rotatable mirrors is the light beam reflected by the second adjustable mirror or the light beam received by the second adjustable mirror is reflected by the array of first rotatable mirror.

An optical distance measuring device includes a light emitting element in which a plurality of light emitting units 16 that emit light are arranged so that a gap is present between adjacent ones of the light emitting units, a transmission unit through which the light is transmitted, a drive unit that changes a positional relationship between the light emitting element and the transmission unit, and a light receiving unit that receives reflected light of the light. The drive unit changes the positional relationship between the light emitting element and the transmission unit, thereby changing an irradiation path of the light along an arrangement direction.

A mounting assembly for mounting a mirror to a frame in a laser scanning unit of an electrophotographic image forming device includes a bracket attached between the frame and the mirror. The bracket includes a body having a first surface and a second surface transverse to the first surface. A first set of protrusions extends from the first surface for defining a first gap between the frame and the bracket that limits adhesive thickness therebetween when the first surface of the bracket is adhesively attached to the frame. A second set of protrusions extends form the second surface for defining a second gap between the mirror and the bracket that limits adhesive thickness therebetween when the second surface of the bracket is adhesively attached to the mirror.