Implementations described herein relate to pressure control for vacuum chuck substrate supports. In one implementation, a process chamber defines a process volume and a vacuum chuck support is disposed within the process volume. A pressure controller is disposed on a fluid flow path upstream from the vacuum chuck and a flow restrictor is disposed on the fluid flow path downstream from the vacuum chuck. Each of the pressure controller and flow restrictor are in fluid communication with a control volume of the vacuum chuck.

A water quality monitoring system is provided, including several sensors, several actuators, and an embedded system. The sensors sense environmental parameters and separately output a plurality of sensing signals including the environmental parameters. The actuators change the environmental parameters. The embedded system includes a storage module, a data collection module, a data analysis module, and a control module. The storage module stores a plurality of normal parameter ranges that correspond to the respective environmental parameters. The data collection module is connected to the sensors for receiving the sensing signals. The data analysis module is connected to the storage module and the data collection module to determine whether the sensing signals are abnormal according to the normal parameter ranges and output a determination result. The control module is connected to the data analysis module to control the actuators or output a warning signal according to the determination result.

Valve systems and related methods include valve actuators and control systems configured to monitor at least one characteristic of the valve system during movement of a valve element to a position in the valve system and to determine a drift of the position based on the monitored at least one characteristic of the valve system.

A mass flow sensor is provided with reduced zero point fluctuation, and a mass flow meter and a mass flow controller using the mass flow sensor, the mass flow sensor comprising a U-shaped flow path passage in which a fluid flows from first end to a second end, having a bottom portion and two straight portions connecting the bottom portion to the ends, a first thermal resistor wound around one of the straight portions, a second thermal resistor wound around the same straight portion as the first thermal resistor and provided away from the first thermal resistor toward the second end, and a heat dissipating portion provided so as to be in contact with the flow path passage on the side opposite to the second thermal resistor across the first thermal resistor.

In order to prevent unnatural behavior of a calculated flow rate, provided is a fluid control device in which a fluid control valve and upstream and downstream pressure sensors are provided on a flow path. The device includes a calculation unit configured to calculate a flow rate based on measured pressures; and an output unit configured to output the calculated flow rate, and exhibit a zero output function of outputting a zero value regardless of the calculated flow rate when the valve is in a closed state. The device is further configured to switch between execution and stop of the zero output function, and when the valve is in an open state and a difference between the measured pressures of the pressure sensors is larger than a threshold, stop the zero output function and cause the flow rate output unit to output the calculated flow rate.

An autonomous device for measuring at least one characteristic of a fluid circulating in a conduit in a flow direction comprises a permanent magnetic field source, a magneto-electric converter and a processing circuit capable of using the electric charges supplied by the converter to supply a measurement of a characteristic of its environment. The source and the converter are placed in a stator and a rotor forming the device. The autonomous device further comprises attachment means allowing the stator to be fixedly placed in the conduit or at one end of the conduit, in a configuration in which the axis of rotation of the rotor is parallel to the flow direction. A control system may employ at least one such autonomous device.

A grill device having at least a first gas grill unit and a second gas grill unit for cooking food is described. The grill device includes a stand which carries the grill units and is intended for placement on the ground, and a base cabinet which is housed in the stand, and a central work unit disposed at a head end of the stand. The two grill units are fastened to the stand laterally from the work unit substantially opposite one another. Each grill unit includes a grill tray having a burning unit.

Implementations of the present disclosure generally relate to one or more flow ratio controllers and one or more gas injection inserts in the semiconductor processing chamber. In one implementation, an apparatus includes a first flow ratio controller including a first plurality of flow controllers, a second flow ratio controller including a second plurality of flow controllers, and a gas injection insert including a first portion and a second portion. The first portion includes a first plurality of channels and the second portion includes a second plurality of channels. The apparatus further includes a plurality of gas lines connecting the first and second pluralities of flow controllers to the first and second pluralities of channels. One or more gas lines of the plurality of gas lines are each connected to a channel of the first plurality of channels and a channel of the second plurality of channels.

Included are mass flow controllers and methods of use. An example mass flow controller comprises a flow pathway through the mass flow controller; the flow pathway comprising a first cavity and a second cavity. The mass flow controller further comprises a laminar flow element. The mass flow controller additionally comprises a combination absolute and differential pressure transducer assembly comprising: a third cavity in fluid communication with the first cavity, an absolute pressure transducer exposed to absolute pressure in the third cavity, and a differential pressure transducer exposed to differential pressure between the third cavity and the second cavity. The mass flow controller also comprises a flow control valve assembly downstream of the laminar flow element and the combination absolute and differential pressure transducer assembly.

A system includes an emergency response vehicle transitionable between a motive state and a non-motive state and a tool. The tool includes an identifier and is configured to be removably secured to the emergency response vehicle. The system further includes a scanner coupled to the emergency response vehicle and operable to identify the identifier when the tool is secured to the emergency response vehicle. A control module is communicatively coupled to the scanner and includes a processor and a memory storing instructions which cause the processor to determine that the emergency response vehicle has transitioned between the motive state and the non-motive state, and, in response to determining that the emergency response vehicle has transitioned between the motive state and the non-motive state, cause the scanner to scan the emergency response vehicle for the identifier to determine whether the tool is secured to the emergency response vehicle.