Embodiments for modifying a spring mass configuration are disclosed that minimize the effects of unwanted nonlinear motion on a MEMS sensor. The modifications include any or any combination of providing a rigid element between rotating structures of the spring mass configuration, tuning a spring system between the rotating structures and coupling an electrical cancellation system to the rotating structures. In so doing unwanted nonlinear motion such as unwanted 2.sup.nd harmonic motion is minimized.

A single Micro-Electro-Mechanical System (MEMS) sensor chip is provided, for measuring multiple parameters, referred to as multiple degrees of freedom (DOF). The sensor chip comprises a central MEMS wafer bonded to a top cap wafer and a bottom cap wafer, all three wafer being electrically conductive. The sensor comprises at least two distinct sensors, each patterned in the electrically conductive MEMS wafer and in at least one of the top and bottom cap wafer. Insulated conducting pathways extend from electrical connections on the top or bottom cap wafers, through at least one of the electrically conductive top cap and bottom cap wafers, and through the electrically conductive MEMS wafer, to the sensors, for conducting electrical signals between the sensors and the electrical connections. The two or more distinct sensors are enclosed by the top and bottom cap wafers and by the outer frame of MEMS wafer.

A system and/or method for utilizing mechanical motion limiters to control proof mass amplitude in MEMS devices (e.g., MEMS devices having resonant MEMS structures, for example various implementations of gyroscopes, magnetometers, accelerometers, etc.). As a non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished during normal (e.g., steady state) gyroscope operation utilizing impact stops (e.g., bump stops) of various designs. As another non-limiting example, amplitude control for a MEMS gyroscope proof mass may be accomplished utilizing non-impact limiters (e.g., springs) of various designs, for example springs exhibiting non-linear stiffness characteristics through at least a portion of their normal range of operation.

Systems and methods are described herein for detecting and measuring inertial parameters, such as acceleration. In particular, the systems and methods relate to vibratory inertial sensors implementing time-domain sensing techniques. Within a composite mass sensor system, a sense mass may oscillate at a frequency different from its actuation frequency, allowing flexibility when integrating the sensor into drive systems without sacrificing sensitivity.

A gyro sensor includes a substrate, and a first function element, a second function element and a third function element which are arranged above the substrate. With respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of a vibrating body of one function element is different from the direction of displacement of a movable body of the other function element, and the direction of displacement of a movable body of the one function element is different from the direction of vibration of a vibrating body of the other function element.

A gyro sensor includes a substrate, and a first function element, a second function element and a third function element which are arranged above the substrate. With respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of a vibrating body of one function element is different from the direction of displacement of a movable body of the other function element, and the direction of displacement of a movable body of the one function element is different from the direction of vibration of a vibrating body of the other function element.

The invention relates to a controller (200) for controlling a rotation rate sensor, having a first control circuit (202) and a second control circuit (204). The first control circuit has a first control unit (210) for controlling an oscillation of the rotation rate sensor along a first direction, a first digital-to-analog converter (240) for converting a first digital control signal (215) output by the first control unit (210) into a first analog signal (245) with which the oscillation of the rotation rate sensor along the first direction is controlled, and a first analog-to-digital converter (250) for converting a first analog measurement signal (235) which describes the oscillation of the rotation rate sensor along the first direction into a first digital read-out signal (255) which is supplied to the first control unit (210). The second control circuit (204) has a second control unit (220) for controlling an oscillation of the rotation rate sensor along a second direction which is different from the first direction and a second digital-to-analog converter (270) for converting a second digital control signal (225) output by the second control unit into a second analog signal (275) with which the oscillation of the rotation rate sensor along the second direction is controlled.

The invention relates to a controller (200) for controlling a rotation rate sensor, having a first control circuit (202) and a second control circuit (204). The first control circuit has a first control unit (210) for controlling an oscillation of the rotation rate sensor along a first direction, a first digital-to-analog converter (240) for converting a first digital control signal (215) output by the first control unit (210) into a first analog signal (245) with which the oscillation of the rotation rate sensor along the first direction is controlled, and a first analog-to-digital converter (250) for converting a first analog measurement signal (235) which describes the oscillation of the rotation rate sensor along the first direction into a first digital read-out signal (255) which is supplied to the first control unit (210). The second control circuit (204) has a second control unit (220) for controlling an oscillation of the rotation rate sensor along a second direction which is different from the first direction and a second digital-to-analog converter (270) for converting a second digital control signal (225) output by the second control unit into a second analog signal (275) with which the oscillation of the rotation rate sensor along the second direction is controlled.

A microelectromechanical gyroscope includes: a substrate; a stator sensing structure fixed to the substrate; a first mass elastically constrained to the substrate and movable with respect to the substrate in a first direction; a second mass elastically constrained to the first mass and movable with respect to the first mass in a second direction; and a third mass elastically constrained to the second mass and to the substrate and capacitively coupled to the stator sensing structure, the third mass being movable with respect to the substrate in the second direction and with respect to the second mass in the first direction.

According to one embodiment, an angular velocity acquisition device includes a movable body that vibrates in a first direction and in a second direction that is based on Coriolis force and includes a movable electrode portion extending in the second direction, a hold electrode that extends in the second direction and includes a fixed electrode portion opposite to the movable electrode portion across a gap, and a stopper that is provided between the fixed electrode portion and the movable electrode portion and includes an end portion closer to the movable electrode portion than a surface of the fixed electrode portion facing the movable electrode portion.