A position sensor is provided. The position sensor includes a target and a segment sensor element. The segment sensor element defines a circumferential direction and a radial direction. The segment sensor element includes a transmit coil. The segment sensor element includes a plurality of receive coils positioned within a space defined by the transmit coil. The plurality of receive coils are offset relative to one another. The shape of each of the plurality of receive coils corresponds to a periodic waveform having a radial width that varies along the circumferential direction. Furthermore, the shape of at least one receive coil of the plurality of receive coils is distorted along at least one of the radial direction or the circumferential direction.

A sensor device for measuring a rotational position of an element that is rotatable about an axis of rotation includes a sender member emitting a magnetic field, a first receiving member formed by a first conductor and receiving the magnetic field, and a second receiving member formed by a second conductor and receiving the magnetic field. The first receiving member and the second receiving member are arranged within an annular ring segment having a period along a circumferential direction about the axis of rotation. The first conductor and the second conductor each define a plurality of loops. A shape of each of the loops follows in the circumferential direction a base function with half the period, the shape of only some of the loops deviates from the base function by a correction function.

A scanning element includes a circuit board and electronic components. The circuit board includes first and second shielding layers, a first detector unit is arranged in first and second layers, and a second detector unit is arranged in third and fourth layers. A first straight line passes through the first detector unit and the first shielding layer but not through the second shielding layer. Starting from the first detector unit, the first shielding layer is located beyond the center plane. A second straight line passes through the second detector unit and the second shielding layer but not through the first shielding layer. Starting from the second detector unit, the second shielding layer is located beyond the center plane. The first and second straight lines are orthogonal to the center plane.

An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.

An improved inductive sensor determines angular positions for rotating objects, such as rotors of synchronous electric motors. The inductive sensor includes an arcuate transmitter coil, one or more receiver coils, and a conductive target configured to rotate with the rotating object, relative to the transmitter coil and the receiver coil(s). The conductive target includes a plurality of lobes and individual of the lobes is split into multiple lobe portions.

A system, comprising: a processing circuitry configured to: receive a first signal that is indicative of a flux density of a magnetic field, the magnetic field being generated by a rotating target; identify a level of a predetermined type of peak in the first signal, the predetermined type of peak occurring once during each revolution of the target; and output a reference signal when an instant level of the first signal matches the level of the predetermined type of peak.

Methods and apparatus for determining a mechanical angle of a target from sine and cosine signals generated by inductive sensing elements by applying harmonic compensation on the sine and cosine signals using possible mechanical angles and analyzing results of the applied harmonic compensation. One of the mechanical angles can be selected based on the results of the applied harmonic compensation. In embodiments, a cost function can be used to select the mechanical angle.

A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

A scale capable of maintaining measurement accuracy even if the pattern of the scale pattern is scratched is provided. The scale 2 comprises a scale pattern 4 having a plurality of unit patterns provided at a predetermined pitch along the measurement direction on a surface thereof. At least one of the plurality of unit patterns comprises a plurality of loop portions 8 formed with conductors in a loop shape. The plurality of loop portions 8 included in the unit pattern are arranged so as to be spaced from each other such that the centers of gravity of the loop portions 8 are at the same position in the measurement direction on the surface of the scale 2. Thereby, the plurality of loop portions 8 included in the unit pattern can prevent deviation of the center of gravity of the magnetic flux distribution in the measurement direction, even if any of the plurality of the loop portions 8 is scratched. Therefore, the scale 2 can maintain the measurement accuracy.

Disclosed is an inductive position sensor including, on the one hand, a primary winding and, on the other hand, at least two secondary windings each having a plurality of turns formed of a succession of sides and produced on two opposite faces of a printed circuit board. Two pairs of two adjacent sides of each turn of at least one secondary winding form a first point directed toward a first longitudinal end and a second point directed toward a second longitudinal end of the printed circuit board, a projection on a plane of the printed circuit board of the two adjacent sides of each pair defining between them an acute projected angle.