There is provided a position detection device to suppress an influence of a signal distortion due to a processing error, an assembly error of a sensor, or the like. The position detection device includes: a waveform correction unit that corrects waveforms of a first signal and a second signal, the first signal being detected from a first track provided on a moving body and having a scale of predetermined cycles, and the second signal being detected from a second track provided on the moving body and having a scale of cycles less than the predetermined cycles; and a position calculation unit that calculates a position of the moving body on the basis of the corrected first signal and second signal.

A measurement system includes a plurality of RFID tags, each RFID tag configured to output tag information, each RFID tag having a width and spaced from an adjacent RFID tag by a pitch, a single RFID reader configured to read the tag information from at least one RFID tag of the plurality of RFID tags and a plate having a window disposed between the RFID reader and the plurality of RFID tags, wherein the window is dimensioned to control a transmission range between the RFID tags and the RFID reader. The system further includes a carrier to which the plurality of RFID tags are mounted and a control system configured to determine a position of the at least one RFID tag based on the tag information.

A method for measuring a distance between features of a sample, according to one embodiment, includes moving a precision stage having the sample thereon for positioning a first feature of the sample in a field of view of an imaging device. The imaging device is instructed to generate a first image of the first feature of the sample. The sample is moved a defined distance using the precision stage. The imaging device is instructed to generate a second image of a second feature of the sample at the defined distance. The first image and the second image are used to determine an actual distance between the first feature and the second feature. A product, according to one embodiment, includes a thin film structure having a plurality of elements, and at least two features dedicated for enabling measurement therebetween. Each feature is positioned at a known position relative to a respective one of the elements.

A magnetic sensor is provided with first and second magnetoresistive effect elements that can detect an external magnetic field. The first and second magnetoresistive effect elements are a plurality of layers of multilayer body including free layers where their magnetization directions vary due to the external magnetic field. Shapes of the first and second magnetoresistive effect elements viewed from the upper side in the lamination direction are different from each other. The first magnetoresistive effect element has a shape that can increase a slope of an output of the first magnetoresistive effect element relative to the change of the external magnetic field. The second magnetoresistive effect element has a shape that can decrease a slope of an output of the second magnetoresistive effect element relative to the change of the external magnetic field compared to the slope of the output of the first magnetoresistive effect element.

Apparatus and associated methods relate to cascaded sets of two or more individual permanent magnets distributed in a predetermined spatial relationship on a source carrier configured to translate proximate two or more magnetic field sensors distributed in a predetermined spatial relationship on a reference carrier. In an illustrative example, the permanent magnets may be arranged in at least two predetermined orientations. For example, each of the permanent magnets may direct its field in a predetermined orientation to produce a unique output code from a set of the magnetic field sensors. The output code may, for example, uniquely identify a relative position between the source carrier and the reference carrier. The magnetic field sensors may be, for example, anisotropic magneto-resistive elements. Cascaded sets of permanent magnets may cost-effectively increase the dynamic range of the relative position between the source carrier and the reference carrier by adding additional magnetic targets.

A magnetic sensor is provided with first and second magnetoresistive effect elements that can detect an external magnetic field. The first and second magnetoresistive effect elements are a plurality of layers of multilayer body including free layers where their magnetization directions vary due to the external magnetic field. Shapes of the first and second magnetoresistive effect elements viewed from the upper side in the lamination direction are different from each other. The first magnetoresistive effect element has a shape that can increase a slope of an output of the first magnetoresistive effect element relative to the change of the external magnetic field. The second magnetoresistive effect element has a shape that can decrease a slope of an output of the second magnetoresistive effect element relative to the change of the external magnetic field compared to the slope of the output of the first magnetoresistive effect element.

System for measuring the position of a mechanical member, which comprises an optical detection system and a positioning track arranged on two mechanical members of a mechanical device. The positioning track is provided with a succession of multiple sectors, each of which comprises a first delimitation section and a second delimitation section spaced from each other, and a first identification section and a second identification section which are provided with a different optical contrast with respect to the first delimitation section and to the second delimitation section. In each sector, the first identification section is delimited between the first delimitation section and the second delimitation section. In addition, the length of the identification sections of each sector is different from the length of the identification sections of each other sector of the succession, so as to unequivocally identify the corresponding sector.

A position detecting device for a rotary shaft is provided. The position detecting device for a rotary shaft comprises a shaft, a coding element and a detecting element. The coding element comprises a body, a first coding unit and a second coding unit wherein the body is disposed on the shaft and coaxial to the shaft, and the first coding unit and the second coding unit are configured on the body. The first coding unit comprises a plurality of first tracks in an annular arrangement. The detecting element is disposed on an additional part and corresponding to the coding element for retrieving the signal of the first coding unit and the second coding unit.

An apparatus and a method provide an output signal indicative of a speed of rotation and/or a direction of movement of a ferromagnetic object having ferromagnetic features and capable of moving. A variety of signal formats of the output signal are described, each of which have pulses at a rate faster than the ferromagnetic features pass by the magnetic field sensor. The magnetic field sensor includes a plurality of diagnostic circuits that detect a failure of the magnetic field sensor and output a diagnostic signal indicative of the failure. The controller can receive the diagnostic signals and generate a sensor output signal including a failure state to indicate the detected failure.

A sensing chip structure of an optical scale reader includes a substrate having at least one conductive pad. The substrate has thereon a photosensitive chip. The photosensitive chip has at least one pin. The pins are each connected to a conductive pad by a conducting wire. A coded graphic layer is disposed on a side of the photosensitive chip, and the side of the photosensitive chip faces away from the substrate. The sensing chip structure is conducive to structural simplification and miniaturization of the optical scale reader.