Patent classifications
G01D5/34707
SENSOR AND METHOD OF MANUFACTURING SENSOR
A sensor including a generating unit; a detecting unit; a substrate; a member that exerts influence on an object to be detected; and a housing that includes a first housing that operably supports the member and a second housing to which a part of the substrate is fixed. The substrate includes a first portion provided with the generating unit and a second portion provided with the detecting unit that are integrated, and has a curved shape or a bent shape in which a surface of the first portion at which the generating unit is provided and a surface of the second portion at which the detecting unit is provided face each other. One of the first portion and the second portion is fixed to the second housing. A surface of the other of the first portion and the second portion adheres to the first housing.
ROBOT AND ENCODER
A robot includes a first member, a second member that is provided to be turnable about a turning axis with respect to the first member, marks that are disposed around the turning axis on a surface of the second member, and a mark detection portion that is disposed in the first member and detects the marks.
Length-measuring device
A length-measuring device includes a scale and a mounting element. The mounting element has a first fastening portion by which the mounting element is stationarily attached to the scale and a second fastening portion configured to be stationarily attached to a support. An arrangement of a plurality of flexible struts is provided between the first fastening portion and the second fastening portion which, through flexure, allows the first fastening portion to move relative to the second fastening portion perpendicularly to the longitudinal direction. The arrangement of struts is configured to compensate for a flexure-induced change in length of the struts in such a way that no movement will result from the flexure-induced change in length between the first fastening portion and the second fastening portion in the longitudinal direction.
Metrological scale
A method of applying a marking onto a metrological scale. The method includes locating one or more markings on the scale substrate in a provisional state; checking whether the one or more markings located on the scale substrate are acceptable; and finalizing the one or markings which are acceptable so as to transform the one or more markings into a finalized state.
POSITION DETECTION APPARATUS, MACHINE TOOL APPARATUS, AND EXPOSURE APPARATUS
A position detection apparatus (100) includes a scale (20) including a reference position grating (22), a detector (10), a detection grating (19), and a signal processor (10), the signal processor acquires a relative reference position between the scale and the detector by using a light intensity distribution of a divergent light beam obtained via the reference position grating and the detection grating, the detection grating has a first spatial frequency that is offset by a predetermined frequency offset amount with respect to a local spatial frequency of an interference image from the reference position grating, the detection grating is provided in an optical path between the scale and a light receiver of the detector, and the light receiver detects a component of a second spatial frequency that is lower than the first spatial frequency in the light intensity distribution transmitting through the detection grating.
Method of obtaining a reference correction value for an index mark of an angular encoder
A method for finding a reference correction value of an angular encoder index mark is given. The angular encoder has a first read head, a second read head, and a patterned element that includes incremental marks and an index mark. In a first instance, the first read head detects the presence of the index mark and, in response, the second read head generates a first analog signal. In a second instance, the first read head detects the presence of the index mark and, in response, the second read head generates a second analog signal. A processor determines the reference correction value based at least in part on the first analog signal and the second analog signal.
SCALE AND METHOD OF MANUFACTURING THE SAME
A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.
ROTATION ANGLE ENCODER APPARATUS
A rotation angle encoder apparatus is disclosed. The rotation angle encoder apparatus may comprise a plurality of light sources, a plurality of light detectors, and a plurality of pinions rotatable about a shaft. Each of the pinions may comprises a plurality of teeth and a plurality of gaps. The rotation angle encoder apparatus may comprise a plurality of stacked configurations such that, when the shaft is rotated, transmissivity may be measured to determine or calculate at least one measurement, such as an angle of rotation, position, movement, distance, or other discernable measurement. The rotation angle encoder apparatus with a plurality pinions and associated measurable transmissivities may enable an optical spectrum analyzer to increase wavelength accuracy and improve resolution in optical measurements.
Linear Encoder
A linear encoder for numeric-control machine tools is provided that includes: a substantially rectilinear section-bar, which is adapted to be fixed on the structure of the machine tool; a substantially rectilinear scale strip, which is fixed on the section-bar so as to extend along the section-bar parallel to the section-bar longitudinal axis; a movable slider which is fitted/mounted on the section-bar so as to be able to move along the section-bar parallel to the section-bar longitudinal axis and skimming the scale strip, and which is adapted to be rigidly fixed to the movable piece of the machine tool; an electronic reading apparatus which is at least partially placed aboard the movable slider and is adapted to read the position of the movable slider on the scale strip; and a thermal-stabilization device which is adapted to bring and maintain substantially the whole scale strip stably at a predetermined target temperature.
OPTICAL ENCODER
An optical encoder comprises an emitter; a receiver; a reflector; and a code carrier, wherein the emitter emits electromagnetic radiation along an emission axis in the direction of the reflector and the reflector deflects the electromagnetic radiation along a reception axis in the direction of the receiver. The code carrier is movably supported and has a sequence of code sections to interrupt or to give way for the emitted electromagnetic radiation to impinge on the detector in dependence on the position of the code carrier, wherein the emission axis and the reception axis extend at an alignment angle with respect to one another that has a value in the range from 30 degrees to 150 degrees.