A length-measuring device includes a scanning carriage for scanning a measuring graduation that is to be guided longitudinally in the measurement direction on a guide surface. A coupling couples the scanning carriage to a drive dog rigidly in the measurement direction and resiliently transversely to the measurement direction. A first spring is disposed between a connecting element of the coupling and the drive dog and exerts a pressure force on the scanning carriage at a first position so as to press the scanning carriage against the guide surface. A second spring is disposed between the connecting element and the scanning carriage. The second spring is spaced apart from the first spring in the measurement direction and exerts a pressure force on the scanning carriage at a second position spaced apart from the first position in the measurement direction so as to press the scanning carriage against the guide surface.

A scale is provided with a two-level code pattern according to a pseudo random code sequence along a length measurement direction. Each code of the two-level code pattern indicates a code “1” or “0”, each code includes two bits, and each bit of the two bits is L or H. The code “1” is represented by an A pattern which is a combination of L and H, and the code “0” is represented by a B pattern which is a combination of L and L or by a C pattern which is a combination of H and H. When the codes “0” are continued, the B pattern and the C pattern are alternately used. The scale is commonly used in a reflective type encoder or transmissive type encoder. A detection head part includes an inversion processing unit which performs inversion processing to a detection image of the scale as required.

Position sensor for a mechanical device, including: an optical emitter arranged for projecting an incident radiation on a positioning track of the mechanical device provided with multiple optical sections; an optical detector arranged for detecting a reflected radiation coming from the positioning track and for generating a corresponding measurement signal; an electronic processing unit arranged for calculating, on the basis of such measurement signal, a reflectance value indicative of the reflectivity of the zone of the positioning track hit by the incident ray so as to distinguish the different optical sections of the positioning track. The position sensor also comprises a signaling module arranged for sending a warning signal as a function of the reflectance value, in order to provide to the user indications relative to the level of deterioration of the optical sections of the positioning track.

A photoelectric encoder according to the present invention comprises a light-receiving unit including: a first and second light-receiving element column; and a light-blocking layer configured from a light-blocking portion and a light-transmitting portion, the first and second light-receiving element columns being disposed staggered in a second direction such that an arrangement pattern of light-receiving elements in the first and second light-receiving element columns has a pitch which is the same in a first direction and a phase which differs in the first direction, and the light-transmitting portion on the light-receiving surface of the light-receiving element in the first light-receiving element column and the light-transmitting portion on the light-receiving surface of the light-receiving element in the second light-receiving element column being formed so as not to overlap each other when staggered in the second direction.

There is provided a three-dimensional coordinate measurement apparatus capable of reducing shaking of a Y carriage and improving measurement accuracy. A groove is formed along a Y-axis direction in a right side part of a surface plate made of stone, and a Y guide is formed between the groove and a right side surface of the surface plate to support a Y carriage in a portal shape in a movable manner in the Y-axis direction. A support section is provided at a lower end of a right Y carriage on the right side of the Y carriage, and the support section is supported by the surface plate through air pads which are disposed by two air pads back and forth on the corresponding one of a top surface, a right side surface, and a bottom surface, of the surface plate, and a right side surface of the groove.

There is provided an absolute encoder advantageous in accuracy of an output thereof against a defect in a scale thereof. In the absolute encoder, a detector detects a part of an array of marks of the scale, and outputs a data sequence corresponding to the part. A processor stores information indicating a correspondence between each of a plurality of code sequences and an absolute coordinate of motion of the scale, and outputs information of the absolute coordinate based on the data sequence and the information. The processor detects an error of the data sequence, and performs rewriting of the information based on the detected error.

A method of applying a marking onto a metrological scale. The method includes locating one or more markings on the scale substrate in a provisional state; checking whether the one or more markings located on the scale substrate are acceptable; and finalizing the one or markings which are acceptable so as to transform the one or more markings into a finalized state.

A position detection apparatus (100) includes a scale (20) including a reference position grating (22), a detector (10), a detection grating (19), and a signal processor (10), the signal processor acquires a relative reference position between the scale and the detector by using a light intensity distribution of a divergent light beam obtained via the reference position grating and the detection grating, the detection grating has a first spatial frequency that is offset by a predetermined frequency offset amount with respect to a local spatial frequency of an interference image from the reference position grating, the detection grating is provided in an optical path between the scale and a light receiver of the detector, and the light receiver detects a component of a second spatial frequency that is lower than the first spatial frequency in the light intensity distribution transmitting through the detection grating.

In a scale, a reference detection pattern and a displacement detection pattern are formed. A detection head outputs a reference detection signal, a phase compensation signal, and a displacement detection signal. A signal processing unit generates a reference signal by amplifying one or both of the phase compensation signal and the reference detection signal and adding up them, and detects a position of the detection head relative to the scale. A combined light receiving grating includes a reference detection light receiving grating and a phase compensation light receiving grating disposed so as to be shifted from the reference detection light receiving grating in the measurement direction. A combined light receiving element includes a reference detection light receiving element configured to output the reference detection signal and a phase compensation light receiving element configured to output the phase compensation signal.

Adjusting emulated encoder frequencies in an example embodiment can include determining a difference between an encoder count and a theoretical encoder count and adjusting a frequency of an emulated encoder signal to mitigate at least some of the difference between the encoder count and the theoretical encoder count.