A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

A linear encoder for numeric-control machine tools is provided that includes: a substantially rectilinear section-bar, which is adapted to be fixed on the structure of the machine tool; a substantially rectilinear scale strip, which is fixed on the section-bar so as to extend along the section-bar parallel to the section-bar longitudinal axis; a movable slider which is fitted/mounted on the section-bar so as to be able to move along the section-bar parallel to the section-bar longitudinal axis and skimming the scale strip, and which is adapted to be rigidly fixed to the movable piece of the machine tool; an electronic reading apparatus which is at least partially placed aboard the movable slider and is adapted to read the position of the movable slider on the scale strip; and a thermal-stabilization device which is adapted to bring and maintain substantially the whole scale strip stably at a predetermined target temperature.

A shadow-cast encoder apparatus includes a scale and a readhead. The readhead includes at least one electromagnetic radiation source for illuminating the scale in order to produce a shadow-cast fringe pattern at a detector configured to detect the shadow-cast fringe pattern. The encoder apparatus can be configured so as to suppress the total harmonic distortion of the fringe pattern, e.g. such that the total harmonic distortion of the fringe pattern is not more than 6%.

A length measuring instrument for measuring length with a measure includes: a measure on which a code is printed, a plurality of patterns each allotted to a different number being arranged, each of the patterns having digits to which an N-notation number (N being 3 or greater) is allotted, each of the digits having a different color corresponding to the allotted numerical value, the patterns being arranged in ascending order or descending order, a Hamming distance between patterns adjacent to each other in an array direction being 1, an amount of change in numerical value at the same digit between the adjacent patterns being 1 in the code; a reading unit that optically reads patterns printed on the measure; and a measuring unit that measures a length of a measurement target from a result of the reading by the reading unit.

A grating measuring module includes a light source, a collimating device, a first grating, a second grating, and an image sensing chip. The first grating is arranged on an optical path of the collimating device and the second grating is arranged on an optical path of the first grating. Each of the two gratings comprises a first pattern and a plurality of second patterns locating at the both sides of the first pattern. The first and second gratings can each be attached to an object which may be displaced in relation to another object, so allowing light of a certain pattern to pass depending on the magnitude of the displacement. The image sensing chip arranged on an optical path from the second grating receives light emitted from the light source and forms an image from which a displacement can be calculated and displayed.

An optical encoder includes a scale, a calculator, and a head having a light source, an image capturer, and a lens array having first and second lenses. The calculator includes a signal generator, an extractor, a signal combiner, and a displacement calculator. The signal generator generates a sine wave signal. The extractor extracts first and second regions. The signal combiner, based on an inter-regional distance, uses a sine wave signal of the second region to generate a sine wave signal that extends to a first end of the first region such that the generated sine wave signal overlaps with a sine wave signal of the first region. The signal combiner also combines the sine wave signal of the first region with the generated sine wave signal. The displacement calculator calculates an amount of relative displacement based on the sine wave signal that is combined by the signal combiner.

There is provided a motor driving system in which an encoder sensor is configured to move with a driven object with respect to an encoder scale and output an encoder signal. A controller is configured to control a motor based on the encoder signal, thereby controlling movement of the driven object. The controller estimates an obstructing area. In the obstructing area, the encoder sensor reads a part of the encoder scale where an obstacle is adhered. The controller calculates a control error of the motor in the obstructing area based on the encoder signal output after the encoder sensor passes through the obstructing area, and determines a compensation amount of a controlling input value input during a period while the encoder sensor passes through the obstructing area.

A linear encoder for numeric-control machine tools is provided that includes: a substantially rectilinear section-bar, which is adapted to be fixed on the structure of the machine tool; a substantially rectilinear scale strip, which is fixed on the section-bar so as to extend along the section-bar parallel to the section-bar longitudinal axis; a movable slider which is fitted/mounted on the section-bar so as to be able to move along the section-bar parallel to the section-bar longitudinal axis and skimming the scale strip, and which is adapted to be rigidly fixed to the movable piece of the machine tool; an electronic reading apparatus which is at least partially placed aboard the movable slider and is adapted to read the position of the movable slider on the scale strip; and a thermal-stabilization device which is adapted to bring and maintain substantially the whole scale strip stably at a predetermined target temperature.

An encoder apparatus includes an encoder and a processor. The encoder includes a scale portion, a light emitting portion, and a light receiving portion. The scale portion includes a first track and a second track. The processor obtains a plurality of candidate values of a gap between the light emitting portion and the scale portion on a basis of an amplitude of a first signal obtained by receiving light reflected on or transmitted through the first track by the light receiving portion. The processor determines a measured value from among the plurality of candidate values on a basis of an amplitude of a second signal obtained by receiving light reflected on or transmitted through the second track by the light receiving portion.

An encoder includes scale and detection head. The detection head includes light source (transmitting unit) and light-receiving unit (receiving unit). The light-receiving unit includes light-receiving surface (receiving surface) and converts light received at the light-receiving surface 50 into differential detection signals with two phases and outputs the same. The light-receiving surface includes element array group including four element arrays provided in a parallel manner along an orthogonal direction, with each element array including a plurality of light-receiving elements (receiving elements). The plurality of element arrays in the element array group are disposed at positions where the sum of: (i) a distance in the orthogonal direction from a reference position to a positive phase signal element array; and (ii) a distance in the orthogonal direction from the reference position to the negative phase signal element array, is the same for all the phases of the at least two phases.