A differential pressure detection element includes: a support portion having an opening; a cantilever portion supported in a cantilever manner by the support portion so as to protrude into the opening; a diffusion layer including a piezoresistive portion provided at a fixed end of the cantilever portion; a pair of wiring portions electrically connected to the diffusion layer; a first insulating layer covering the diffusion layer; and a second insulating layer laid on the first insulating layer. A linear expansion coefficient of the first insulating layer is smaller than a linear expansion coefficient of a material of which the cantilever portion is composed, and a linear expansion coefficient of the second insulating layer is larger than the linear expansion coefficient of the first insulating layer.

A through-flow measurement arrangement and measuring transducer for process instrumentation that includes the through-flow measurement arrangement, wherein the through-flow measurement arrangement operating in accordance with the differential-pressure method includes a tube and an elastically deformable measuring diaphragm arranged in the cross section of the tube and a strain sensor that detects the deformation and converts it into an electric signal, where the measuring diaphragm and the tube are formed in one piece from uniform material, and where both side of the measuring diaphragm each pass into the tube via a fillet groove and the at least one strain sensor is arranged on the circumferential side of the tube opposite the fillet groove.

A fluid flow velocity sensor using a differential pressure measurement includes a stack having a tip pointing in a first direction, the stack including first and second plates arranged in parallel one another along the first direction; and a pressure-sensitive diaphragm arranged between the first and second plates along the first direction, the pressure-sensitive diaphragm being spaced apart from the first plate by a first cavity and from the second plate by a second cavity. The first cavity is entirely sealed, except at the tip of the stack, so as to be under a stagnation pressure during operation of the fluid flow velocity sensor. The second cavity is opened so as to be under a reference pressure during operation of the fluid flow velocity sensor. The fluid flow velocity sensor includes a detector to measure a parameter representative of the differential pressure between the first and the second cavities.

In order to solve a problem occurring in a capacitance type pressure sensor adapted to measure absolute pressure, and thereby reduce error, a pressure type flowmeter includes a fluid resistance part in a flow path through which fluid flows and measures a flow rate by detecting the upstream and downstream pressures of the fluid resistance part. Respective pressure sensors for detecting the upstream and downstream pressures are configured to be gauge pressure sensors. Each of the gauge pressure sensors is a capacitance type pressure sensor adapted to measure gauge pressure by detecting a change in the capacitance between a diaphragm displaceable by pressure and a fixed electrode and has a main body part that supports the fixed electrode and the diaphragm and forms a space between them. Further, the internal space is adapted to communicatively connect to the outside through a communicative connection part.

A subsea flow meter assembly includes a pipe section extending in an axial direction and providing a flow path for a medium. At least four measuring ports are provided at different locations in the pipe section. A first assembly measures at least a differential pressure between a first and second ports and an absolute pressure at one of the ports. A second assembly measures a differential pressure between a third and a fourth ports, and an absolute pressure at one of the ports. A first measuring unit is used to take measurements of the differential pressure and the absolute pressure via the first sensor assembly. A second measuring unit is used to take measurements of the differential pressure and the absolute pressure via the second sensor assembly. An evaluation unit of each determines a flow rate of a flow of medium through the pipe section based on the measurements.

A measuring device with a measuring tube is disclosed. The measuring device includes a sensor unit for capturing a parameter of a medium, a control and evaluation unit, and a deflectable measuring sensor with a cavity and a base unit. The sensor unit is at least partially integrated in the wall of the measuring tube. The measuring sensor is connected to the base unit via a spring element. The base unit is arranged outside of the measuring tube. A side of the measuring sensor is in contact with the medium during operation. The cavity is arranged on the side of the measuring sensor facing the medium. The measuring sensor is integrated into the measuring tube wall in such a way that it can be deflected at least in the plane of the measuring tube wall. The sensor unit has a means for capturing the deflection of the measuring sensor.

A sensing and controlling module of airflow for an active aerosol suction device has a tube, a sensing membrane, a sensing coil, a controlling membrane, a controlling coil, and a magnetic unit. The sensing membrane is mounted in the tube. The controlling membrane is disposed at an air inlet of the tube. The sensing membrane and the controlling membrane are capable of bending deformation. The sensing coil is adhered to and spread on the surface of the sensing membrane, and the controlling coil is adhered to and spread on the surface of the controlling membrane. The magnetic unit is disposed at a spaced interval from the sensing membrane and the controlling membrane. With the sensing membrane and the controlling membrane, the sensing and controlling module is capable of sensing and controlling airflow rate.

The flow channel unit includes: a pair of end flow channels disposed at an inflow port and an outflow port, respectively, and extending along in flow direction; a center flow channel including a pressure receiving portion having a thin film shape and disposed at a position sandwiched between the pair of end flow channels, a distance from an inner peripheral surface of the pressure receiving portion to an outer peripheral surface thereof being shorter than a distance from an inner peripheral surface of the pair of end flow channels to an outer peripheral surface thereof. The pair of end flow channels and the center flow channel are integrally formed of a flexible resin material, and the pressure detection portion is disposed such that the pressure of the fluid circulated through a flow channel is transmitted via the pressure receiving portion.

Provided is a pressure detection device including: a pressure detection unit; and a flow channel unit provided with a flow channel and a pressure receiving portion. The pressure detection unit includes a pressure sensor including a diaphragm, and a pressure transmission portion which is disposed in a state where one end of the pressure transmission portion is in contact with the diaphragm and the other end thereof is in contact with the diaphragm, and transmits a pressure of a fluid received by the diaphragm to the diaphragm. The pressure transmission portion is disposed in a state where the diaphragm is displaced toward the flow channel and an urging force directed from the diaphragm to the diaphragm is received.

An airflow sensor for a heat sink has a first portion having a first electrical point of contact, a second portion have a second electrical point of contact, and a deformable portion made of an electroactive material electrically coupled to the first and second portions. The deformable portion has first electrical properties measured between the first and second electrical points of contact when there is no airflow and the deformable portion is in a first position, and has second electrical properties different than the first electrical properties when a source of airflow blows air against the deformable portion, thereby causing the deformable portion to extend to a second position farther away from the source of airflow than the first position. The airflow sensor can be incorporated into a heat sink for an electronic component.