A wafer processing apparatus includes a vacuum chuck on which a wafer is seated, a ring cover installed on a circumferential portion of the vacuum chuck, a medium supply part connected to the vacuum chuck to supply an inspection medium to the vacuum chuck, and a sealing ring which is installed in the vacuum chuck to support the wafer and into which the inspection medium supplied to the vacuum chuck is introduced.

A rotorcraft actuator monitoring system to monitor leakage past dynamic rotorcraft actuator seals of a rotorcraft actuator includes a body member and a fluid level indication housing attached to the body member. The body member is mounted to surround a dynamic rotorcraft actuator seal that seals fluid in a rotorcraft actuator, where the body member captures fluid that leaks past the dynamic rotorcraft actuator seal. The fluid level indication housing collects the fluid captured by the body member and indicates that a predetermined volume of fluid that leaked past the dynamic rotorcraft actuator seal has been collected.

In some aspects, waterjet cutting pressurization systems can include a water pump: (i) having a pressurization chamber and (ii) having a high-pressure water seal maintaining water pressure within the chamber; and a leak detector in fluid communication with the high-pressure water seal and configured to monitor a leak rate of a fluid from the high-pressure water seal.

A device for measuring permeability of a filter cartridge seal includes a blocking member for blocking an input to the filter cartridge and a housing for tightening the seal. A removable chamber wall is configured to form a sealed chamber with the housing and the blocking member. Pressure in the sealed chamber is varied to test the seal and to detect leaks.

The invention in provides an apparatus, system and method of monitoring a sealing device. The apparatus comprises an inlet configured to receive pressurised fluid from a seal activation fluid pressure source and an outlet configured to be connected to a sealing device to deliver pressurised fluid to a seal element of the sealing device to energise the sealing device in use. A fluid barrier is disposed between the inlet and the outlet and is operable to isolate the inlet from the outlet. A fluid chamber is defined between the fluid barrier and the outlet, and the apparatus comprises means for detecting a change in condition in the fluid chamber indicative of a change in volume of the seal element of the sealing device.

Device for testing sealing of at least a part of a double-door sealed transfer system between two closed volumes, the system including a first flange and a and a second flange capable of being rigidly connected to one another, and a first door and a second door normally sealing openings respectively defined by the first and the second flanges, the device including a casing including a cavity provided with an opening, mechanical connection to a flange so that the cavity is closed by the flange and the door and an inflatable joint which, in the inflated state, is in contact with the flange and ensures a sealing allowing to verify the sealing between the flange and the door.

In accordance with an embodiment, a gas turbine engine is provided having a bearing chamber leak detection system. The gas turbine engine includes a rotatable shaft, a bearing assembly supporting the rotatable shaft, and a plurality of bearing chamber seals surrounding the rotatable shaft creating an annular bearing chamber enclosing the bearing assembly. One or more walls substantially surrounding the bearing chamber create a plenum between the walls and the bearing chamber, and a pressurized air inlet to the plenum is provided. The pressurized air inlet includes an airflow sensor configured and positioned to sense a flow of pressurized air into the plenum, such that airflow at the sensor is indicative of airflow from the plenum into the bearing chamber via one or more of the plurality of bearing chamber seals.

A device for testing mechanical seal performance includes a main shaft (4), a working chamber (18) with two end covers (6, 13) respectively located at two ends thereof, and two groups of mechanical seals to be tested (7); wherein a shaft sleeve (5) and the main shaft (4) form a clearance fit and penetrate through the end covers (6, 13) at two ends of the working chamber (18) together; the shaft sleeve (5) extends outside U-shaped openings (23) which are arranged at two ends of the end covers (6, 13) and arranged on the same generatrix; driven pins (15) are arranged on the locations of the main shaft (4) corresponding to the U-shaped openings (23); the middle part of the shaft sleeve (5) is provided with two segments of threads having the same thread pitch and opposite rotating directions.

One embodiment of the present invention relates to a sealing system having a leakage sensing function. A leakage sensing unit is arranged in a sealed space which is formed between sealing members of a sealing device body so as to sense, in real time, whether the sealing members are leaking, wherein a sensing value of the leakage sensing unit can be transmitted to the outside by using a communication unit.

A system for monitoring a health of one or more seals includes a flow control valve, and a controller. The flow control valve is located upstream of the seal and disposed in fluid communication therewith. The flow control valve is configured to maintain a pre-determined fluid pressure between the flow control valve and the seal. The controller is communicably coupled to the flow control valve. The controller is configured to receive a position of the flow control valve, and determine the health of the seal based on the received position of the flow control valve.