An optical foreign matter inspection device includes a rotation stage; a laser light source; a sensor that is a charge accumulation type sensor; a detecting circuit; a light emission timing signal generating circuit configured to generate a light emission timing synchronizing signal synchronized with laser emission; a trigger signal generating circuit configured to receive a first signal (a stage encoder signal) indicating a rotation state of a sample, and generate a trigger signal synchronized with the light emission timing synchronizing signal; a number-of-emitted-pulse calculating circuit configured to receive the light emission timing synchronizing signal and the first signal, and calculate the number of pulses in each period corresponding to a position in a radial direction of the sample; and a processing system configured to measure a state of each position on a surface of the sample by using a detection signal and the number of pulses.

According to a method for cavity enhanced microscopy, a sample is arranged on a sample carrier of an optical cavity, which is formed by a pair of opposing mirrors. A description defining a lateral motion of the sample during a predefined time interval and a variation of the cavity length during the time interval in a temporally synchronized manner is stored and an actuator system is triggered to move the sample carrier and/or at least one mirror of the pair of mirrors to effect the lateral motion of the sample with respect to the cavity and the variation of the cavity length according to the description. Light is introduced into the cavity and transmitted portions and/or reflected portions and/or scattered portions and/or emitted portions are detected to generate a sensor dataset.

A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

This fluorescence observation method is a method of observing a living organism into which a fluorescent dye is injected. The method includes the steps of: irradiating the living organism with excitation light including a wavelength for exciting the fluorescent dye using a light irradiation means, acquiring a first fluorescence image of the living organism generated by the irradiation with the excitation light using an image acquisition means, specifying an observation object in the living organism on the basis of the first fluorescence image; acquiring a second fluorescence image of the observation object generated by the irradiation with the excitation light using the image acquisition means; and specifying a linear fluorescence pattern appearing in the second fluorescence image.

A gas analysis device includes a light source configured to emit laser beam to a target gas, a reflection body which reflects the laser beam, a light reception device that receives the laser beam reflected by the reflection body, a container which contains the light source and the light reception device, and an alignment mechanism that includes an insertion member inserted from outside of the container to inside of the container to move, along a plane intersecting with the irradiation direction of the laser beam, at least any one of the light source and the light reception device.

This fluorescence observation method is a method of observing a living organism into which a fluorescent dye is injected. The method includes the steps of: irradiating the living organism with excitation light including a wavelength for exciting the fluorescent dye using a light irradiation means, acquiring a first fluorescence image of the living organism generated by the irradiation with the excitation light using an image acquisition means, specifying an observation object in the living organism on the basis of the first fluorescence image; acquiring a second fluorescence image of the observation object generated by the irradiation with the excitation light using the image acquisition means; and specifying a linear fluorescence pattern appearing in the second fluorescence image.

Techniques are disclosed relating to fluorescence-based flow cytometry. A flow cytometer may include a partially-reflective surface configured to reflect a first portion of fluorescent emissions from a sample to a first optical sensor and direct a second, greater portion of fluorescent emissions from the sample to a second optical sensor and a controller configured to determine a value representing the intensity of the fluorescent emissions based on a first measurement taken by the first optical sensor, a second measurement taken by the second optical sensor, or both. A flow cytometer may include a baseplate with a first side and a second, opposing side with a flow cell, a laser, and a reflective surface disposed above the first side and an optical sensor and isolating material disposed below the second side. The reflective surface receives fluorescent emissions and reflects at least a portion through the baseplate to the optical sensor. A flow cytometer may include a flow cell, a laser, a first optical sensor positioned to measure scattered laser light, a second optical sensor positioned to measure fluorescent emissions, and a controller configured to adjust the measurements taken by the second optical sensor based on a comparison of measurements taken by the first optical sensor with expected measurements based on a known beam profile of the laser beam.

This fluorescence observation method is a method of observing a living organism into which a fluorescent dye is injected. The method includes the steps of: irradiating the living organism with excitation light including a wavelength for exciting the fluorescent dye using a light irradiation means, acquiring a first fluorescence image of the living organism generated by the irradiation with the excitation light using an image acquisition means, specifying an observation object in the living organism on the basis of the first fluorescence image; acquiring a second fluorescence image of the observation object generated by the irradiation with the excitation light using the image acquisition means; and specifying a linear fluorescence pattern appearing in the second fluorescence image.

A single-wavelength light source is configured to generate an excitation light source. A sample holder that defines an inner cavity is capable of holding a sample and includes a surface transparent to the excitation light source. One or more mounts are attached to at least one of the light source or the sample holder. The mounts are configured to change an incident angle of the excitation light source on the surface. One or more optical components are positioned in a path of a fluorescence emission emitted from the surface and guide the fluorescence emission to a detector. A detector detects an intensity of the fluorescence emission.

A single-wavelength light source is configured to generate an excitation light source. A sample holder that defines an inner cavity is capable of holding a sample and includes a surface transparent to the excitation light source. One or more mounts are attached to at least one of the light source or the sample holder. The mounts are configured to change an incident angle of the excitation light source on the surface. One or more optical components are positioned in a path of a fluorescence emission emitted from the surface and guide the fluorescence emission to a detector. A detector detects an intensity of the fluorescence emission.