G01N2021/4723

Method and device for the contactless assessment of the surface quality of a wafer

A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle () at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.

METHOD AND DEVICE FOR THE CONTACTLESS ASSESSMENT OF THE SURFACE QUALITY OF A WAFER
20180245911 · 2018-08-30 · ·

A method and a device for contactless assessment of the surface quality of a workpiece (W) according to the angle-resolved scattered light measuring technique comprises an optical sensor (10) which illuminates a measuring spot (14). The intensity of the radiation which is reflected back is detected by means of a line sensor (16), and an intensity characteristic value (Ig) is determined therefrom. A horizontal initial rotation angle () at which the intensity characteristic value is at a maximum is determined. In a measuring operating mode, surface characteristic values are calculated taking into account this initial rotational angle (). The measuring method is defined by extremely high lateral and vertical spatial resolution, extending into the subnanometer range, and by a high measuring speed.

Surface characteristics evaluation method, surface characteristics evaluation apparatus, and surface characteristics evaluation program

A surface characteristics evaluation method for evaluating a surface characteristic of a painted surface including a glittering material, including: a multi-angle condition image acquisition step S101 for acquiring a multi-angle condition image including multi-angle conditions in a continuous manner by performing an image-capturing process to capture how a reflection condition of the painted surface changes when rotating an illumination device 2 emitting light onto the painted surface, the image-capturing process being performed by the line scan camera 4 while a sample P having the painted surface is moved in a certain direction; an in-plane chromaticity distribution acquisition step S102 for acquiring an in-plane chromaticity distribution of the painted surface from the multi-angle condition image acquired; and a surface characteristics evaluation step S107 for calculating particle characteristics S as surface characteristics evaluation values of the multi-angle conditions, on the basis of the in-plane chromaticity distribution acquired.

EARLY WARNING OF CHANGES IN HEALTH AND ROBUSTNESS USING NARROWLY FORWARD SCATTERED LIGHT TO TRACK EASE OF MORPHOLOGICAL CHANGES OF BLOOD CELLS

Early warning of changing health and robustness is given by tracking of ease of morphological changes in blood cells obtained by comparing intensities in a first scattered light intensity angular distribution and intensities in a second scattered light intensity angular distribution, with the light being scattered by blood cells into very narrowly forward scattered light intensity angular range.