In one example in accordance with the present disclosure, a fluid analysis system is described. The fluid analysis system includes a fluidic die. The fluidic die includes a fluid chamber to hold a volume of fluid to be analyzed and an impedance sensor disposed within the fluid chamber. The impedance sensor measures an impedance of the fluid in the fluid chamber. The fluid analysis system also includes an evaluator device electrically coupled to the impedance sensor. The evaluator device determines at least one property of the fluid based on the impedance.

A wireless sensor measures properties of a substance and transmits the properties to a remote wireless receiver. The wireless sensor can be fully enclosed within a container containing the substance, allowing remote monitoring of the properties of the substance without compromising integrity of a closed system.

A sensor component and a mobile communication device including a sensor component are disclosed. In an embodiment a sensor component includes a subcomponent configured to sense a gas level including a resistive heater and a gas sensitive element disposed on the resistive heater; a package enclosing a cavity and accommodating the subcomponent, the package including a first opening in a position facing the gas sensitive element of the subcomponent and a second opening configured to allow a flow of gas to enter the package through the first opening and exit the package through the second opening; and an evaluation circuit configured to generate an output signal indicative of a speed of the flow of gas in response to electrical power to be supplied to the resistive heater.

A sensor system includes an unmanned vehicle system is provided that includes a housing, and an environmental sensor system coupled to the housing, the environmental sensor system configured to detect one or more environmental conditions of an environment in operational contact with the unmanned vehicle system. The environmental sensor includes a sensing element that includes a sensing material to detect and quantify at least one analyte gas by measuring impedance of the sensing element at one or more frequencies of the different frequencies during exposure of the sensing material to the at least one analyte gas. A control unit includes one or more processors coupled with the environmental sensor and configured to receive a detector signal from the detector circuit of the environmental sensor indicative of the one or more environmental conditions, and control the movement of the unmanned vehicle system based on an operation signal of a remote device, instructions received at a vehicle controller, the detector signal, or in response to detected route conditions.

A gas sensor system includes a gas sensing element that includes a gas sensing material and electrodes configured to apply electrical stimuli to the gas sensing material and one or more processors configured to control the gas sensing element. The one or more processors are configured to direct the electrodes to apply the electrical stimuli at two or more different electrical excitation frequencies to the gas sensing material. A first electrical excitation frequency of the two or more different electrical excitation frequencies is configured to provide a quantitative gas response of the gas sensing material, the quantitative gas response including a response drift. A second electrical excitation frequency of the two or more different electrical excitation frequencies is configured to provide a baseline response of the gas sensing material based at least in part on the response drift.

A sensor system includes a sensing element that includes a sensing material and electrodes configured to apply a first electrical stimuli to the sensing material at an electrical excitation frequency, a modifier assembly including one or more circuits configured to change an electrical impedance of the sensing element, and one or more processors configured to control the modifier assembly. Responsive to exposure of gas to the sensing element, the one or more processors change a linearity of a first electrical signal received from the sensing element by changing the electrical impedance of the sensing element and applying a second electrical stimuli to the sensing material at the electrical excitation frequency.

A wireless sensor measures properties of a substance and transmits the properties to a remote wireless receiver. The wireless sensor can be fully enclosed within a container containing the substance, allowing remote monitoring of the properties of the substance without compromising integrity of a closed system.

A micro-heater element for a MEMS sensor device, envisages, in a single conductive layer: an outer ring, defining inside it a window; a heat-diffusion structure, arranged within the window, separated from the outer ring by a first separation gap; and connection elements, arranged between the heat-diffusion structure and the outer ring, and designed to connect the heat-diffusion structure to the outer ring. The outer ring is designed to dissipate energy upon passage of an electric current, and the heat-diffusion structure is designed to distribute, within the micro-heater element, the heat that is transferred by the outer ring through the connection elements.

A MEMS apparatus with heater includes central part, periphery part, gap and first connecting part. Central part includes center of mass, heater and first joint. Heater is disposed inside central part. First joint is located on boundary of central part. Displacement of first joint is produced when central part is heated by heater. Periphery part surrounds central part. Gap surrounds central part, and is located between central part and periphery part. First connecting part connects central part and periphery part along first reference line and includes first inner connecting portion and first outer connecting portion. First inner connecting portion is connected to first joint. First outer connecting portion is connected to periphery part. First reference line passes through first joint, and first reference line is not parallel to line connecting center of mass and first joint.

A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gas sensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.