An apparatus for calculating a thermal conductivity of a gaseous substance is provided. The apparatus includes a substrate; a cover member disposed on the substrate, wherein the cover member comprises a flow tunnel for the gaseous substance; a flow sensing element disposed on the substrate, wherein the flow sensing element is exposed to the gaseous substance in the flow tunnel; and a pressure sensing element disposed on the substrate, wherein the pressure sensing element is exposed to the gaseous substance in the flow tunnel.

A system and a method for multi-gas sensing using dielectric excitation of a single sensing material at multiple operating temperatures. By measuring dielectric excitation responses of the gas sensing material, enhanced multi-gas differentiation and differentiation can be achieved using fewer operating temperatures than would be used by the same MOS gas sensing material configured to perform multi-gas differentiation based on resistance responses alone. The disclosed gas sensors and gas sensing techniques enable improved response linearity, improved dynamic range, and reduced computational resource consumption for multi-gas quantitation relative to traditional resistance-based gas sensing methods. Present embodiments unexpectedly demonstrate MOS-based gas sensors that can differentiate between different gases using responses collected using at least two different operating temperatures, wherein this differentiation is superior in the differentiation between different gases and in baseline stability, as compared to the resistance response of the same gas sensing material at more than two operating temperatures.

A moisture detection element includes: an insulating substrate of an insulating material; an application part which is formed on the insulating substrate and to which a voltage is applied; an output part which is formed on the insulating substrate and configured to output a voltage signal corresponding in response to a current flowing through an electric path via water molecules adhering to a surface of the insulating substrate under the voltage applied to the application part; and a conductive film which is electrically insulated from the application part and the output part and is provided on the insulating substrate. An insulating film of an insulating material is provided on the application part, the output part, and the conductive film.

Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.

A gas sensing device includes one or more chemo-resistive gas sensors; one or more heating elements for heating each of the gas sensors; a preprocessing block for filtering signal samples in order to generate filtered signal samples for each of the gas sensors; an information extraction block for generating representations for the filtered signal samples for each of the gas sensors based on dynamic characteristics of the received filtered signal samples of the respective gas sensor; and a decision making block for receiving the representations, wherein the decision making block includes a trained model based algorithm stage having an input layer and an output layer, wherein the decision making block includes trained models, wherein the decision making block creates sensing results based on output values of the output layer of the algorithm stage, and wherein the output values are created by using the trained models.

The invention relates to a heated sensitive layer sensor comprising an insulating substrate bearing the sensitive layer; two complementary measurement electrodes in the form of two adjacent conductive tracks configured in electrical contact with the sensitive layer; and a heating element in the form of a resistive track arranged on the substrate for uniformly heating an active area of the sensitive layer. The resistive track comprises at least three power supply points regularly spaced over the length of the resistive track, and each point of even rank is supplied at a first supply voltage and each point of odd rank is supplied at a second supply voltage.

The invention relates to a sensor module (1), comprising: a circuit board (2), at least one temperature sensor (3) arranged on the circuit board (2) for measuring an ambient temperature, at least one further sensor (4) arranged on the circuit board (2), which further sensor (4) generates waste heat when the further sensor (4) is operated. According to the invention, the sensor module (1) is designed for thermal decoupling of the temperature sensor (3) from the further sensor (4) and/or for dissipating the waste heat of the further sensor (4).

A MEMS gas sensor is disclosed. In an embodiment a MEMS gas sensor includes a carrier having a recess, a gas sensitive element arranged in the recess and a shielding layer at least partially covering the recess.

A semiconductor structure is provided. The semiconductor structure includes a substrate, a plurality of vias, a signal transmitting portion, a heater and a sensing material. The plurality of vias penetrates the substrate, wherein each of the plurality of vias includes a conductive or semiconductive portion surrounded by an oxide layer. The signal transmitting portion is disposed in the substrate, wherein adjacent vias of the plurality of vias surrounds the signal transmitting portion. The heater is electrically connected to the signal transmitting portion, and the sensing material is disposed over the heater and electrically connected to the substrate. A method of manufacturing a semiconductor structure is also provided.

A gas sensor includes a silicon substrate, a detecting electrode, a first isolation film, a heating resistor, and a second isolation film that are successively stacked. The gas sensor has a base structure and a cantilever structure with a curled free end, and a gassensitive material is provided on the end of the cantilever structure. A sensor array composed of the gas sensor, and a method for manufacturing the gas sensor are also provided. The method includes (1) selecting a sacrificial layer; (2) preparing a detecting electrode; (3) preparing a first isolation film; (4) preparing a heating resistor; (5) preparing a second isolation film; (6) releasing the membrane; and (7) loading the gas sensitive material.