A sensor board includes an insulating substrate having an upper surface and a lower surface, first detection electrodes located on the upper surface of the insulating substrate, second detection electrodes located on the lower surface of the insulating substrate, and a heat generator located between the first detection electrodes and the second detection electrodes inside the insulating substrate and including at least one conductor layer. A portion of the insulating substrate between the heat generator and the first detection electrodes has the same thickness as a portion of the insulating substrate between the heat generator and the second detection electrodes.

A laminated gas sensor element is provided by laminating a plurality of ceramic layers. The gas sensor element includes: a solid electrolyte body having oxygen ion conductivity; a measurement electrode provided on a first principal surface of the solid electrolyte body; a reference electrode provided on a second principal surface of the solid electrolyte body; a chamber facing the measurement electrode and into which a measured gas is introduced; and a heater heating the solid electrolyte body. The chamber comprises at least one projecting corner portion, the at least one projecting corner portion projecting, on a cross section perpendicular to a longitudinal direction of the gas sensor element, in a width direction perpendicular to both of the longitudinal direction and a laminating direction. A tip of the projecting corner portion is disposed on a side closer to the heater than a center of the chamber in the laminating direction is.

There is provided a method of manufacturing a gas sensor that includes: forming an insulating layer on a main surface of a substrate; forming a porous oxide layer on the insulating layer; and forming a porous metal layer on the porous oxide layer, wherein the forming the porous metal layer is performed by depositing a constituent material of the porous metal layer in an inclined direction with respect to a normal line of a main surface.

A sensor element for a gas sensor includes: an element base being a ceramic structure including a sensing part to sense a gas component to be measured; and a leading-end protective layer being a porous layer to surround a predetermined range from a leading end portion on a side of the sensing part of the element base. The leading-end protective layer protrudes at a first end portion thereof opposite to a portion surrounding the element base in a longitudinal direction of the element base. A/B≥1.1 where A is maximum thickness of the leading-end protective layer, and B is thickness of the leading-end protective layer in a base portion that does not protrude.

In a sensor element for a limiting-current type gas sensor measuring concentration of NOx in a measurement gas, an inner pump electrode located to face a first internal space communicating, under predetermined diffusion resistance, with a gas inlet through which a measurement gas is introduced from an external space is made of a cermet of a Pt—Au alloy and zirconia, and includes a first portion located on a surface farther from a heater part and a second portion located on a surface closer to the heater part from among surfaces opposing each other in the first internal space, an Au content with respect to the Pt—Au alloy as a whole of the second portion is 0.3 wt % or more smaller than that of the first portion, and a total area of the first portion and the second portion is 10 mm.sup.2 to 25 mm.sup.2.

A sensor element and fabrication method thereof, the sensor element includes: a main pump cell including an inner pump electrode facing a first inner space into which a measurement gas is introduced, an external pump electrode provided on an element surface, and a solid electrolyte therebetween; an auxiliary pump cell including an auxiliary pump electrode provided facing a second inner space, the external pump electrode, and the solid electrolyte therebetween; and a measurement pump cell including a measurement electrode, the external pump electrode, and the solid electrolyte therebetween. The inner pump electrode has a porosity of 10 - 25%, the auxiliary pump electrode has a porosity of 30 - 50%, a thickness ratio of both the electrodes is 1.0 - 4.0, and current flowing to the main pump cell has a current density of 0.05 - 0.5 mA/mm.sup.2 when the measurement gas has an oxygen concentration of 20.5%.

A gas sensor includes: a sensor element; a ceramic housing holding a rear end portion of the sensor element and provided with metal terminals electrically connected to the sensor element; and an elastic insulating member that is fixed in the rear of the sensor element and into which a plurality of lead wires electrically connected to the metal terminals are inserted. The elastic insulating member has one or more common spaces formed in a surface of the elastic insulating member that faces the ceramic housing. Two or more of the lead wires are arranged in each common space.

A resistance-integrated gas sensor is provided, including a substrate, a first metal oxide layer, an insulating layer, a contact metal layer, a contact hole, a second metal oxide layer, and an interdigitated electrode layer. The first metal oxide layer is disposed in the substrate. The insulating layer is disposed on the substrate and the first metal oxide layer. The contact metal layer and the contact hole are disposed in the insulating layer. The second metal oxide layer is disposed on the insulating layer. A portion of the interdigitated electrode layer is disposed on the insulating layer, and another portion is disposed in the second metal oxide layer. The contact metal layer and the contact hole connect the first metal oxide layer and the interdigitated electrode layer.

Provided is a gas sensor element that can be used for relatively long period of time without leading to a problem even in a harsh usage environment. A gas sensor element according to one aspect of the present invention includes a laminate in which an internal space is provided, and a first porous layer arranged so as to face the internal space. The first porous layer is in contact with the first solid electrolyte layer and a side face of the spacer layer that faces the internal space, and has a porosity or 10% or more and 50% or less.

A sensor element is used to detect the concentration of a predetermined component in a gas. The sensor element includes a sensor element body including a solid-state-electrolyte layer having oxygen-ion conductivity, an outer pump electrode that is disposed on an upper surface, which is one of the surfaces, of the sensor element body, and a porous protective layer that is provided so as to cover at least the outer pump electrode. A spatial layer is provided between the porous protective layer and the sensor element body. The spatial layer includes a first spatial layer between the porous protective layer and the outer pump electrode. The maximum-height roughness Rz of a region of the inner surface of the porous protective layer, the region facing the outer pump electrode, is 50 μm or smaller.