An exhaust stream monitoring system for a photolithography track of an IC fabrication process comprises a reaction chamber including a housing, an inflow port and an outflow port, the housing containing a thermal plate for heating a semiconductor process wafer for a predetermined amount of time. An influent pipe coupled to the inflow port supplies a photoresist adhesion promoter in a gaseous form to the reaction chamber. An effluent pipe coupled to the outflow port is operative to remove byproducts from the reaction chamber as an exhaust stream. At least one gas sensor manifold assembly is coupled to the effluent pipe for monitoring the exhaust stream from the reaction chamber to detect presence of one or more byproducts of a reaction between the photoresist adhesion promoter and the semiconductor process wafer.

A chemical release detection system includes a camera, an output control member, a mitigation member, and a controller in operative communication with the camera, the output control member, and the mitigation member. The camera is configured to detect a chemical release. The output control member is configured to generate commands. The mitigation member is configured to reduce risk generated by the chemical release based on the commands by the output control member. The controller is configured to notify a user of the chemical release, and provide an origin of the release and a direction of the release. The controller controls the operation of the output control member and the mitigation member.

The present invention refers to a gas sensor comprising a hybrid material of perovskite and graphene, to the method for obtaining said sensor and to the gas detection method using said sensor.

A method and apparatus are described for measuring the concentration of a gas with an absorption band in the ultraviolet range. The device includes an absorption chamber containing a gas, a light source, a selected optical bandpass filter, and ultraviolet photodetectors. The gas concentration is measured by the ratio of a transmitted intensity to an incident intensity with the Beer-Lambert Law relation. A second light source may be used for a compensation signal. A second method periodically changes the absorption coefficient by inserting a transparent material in the absorption path to measure the optical compensation signal. A third method periodically shortens the optical absorption path by moving the active detector closer to the light source to measure the optical compensation signal. The fourth method uses an optical element to deflect the optical beam to create a shorter absorption path as a reference for the incident signal using one detector.

A method, includes: reacting at least one donor group with at least one protected acceptor group to form a plurality of protecting group-containing OSC polymers; removing the protecting group from the plurality of protecting group-containing OSC polymers to form H-bonding sites; and fusing the H-bonding sites of a first OSC polymer backbone with H-bonding sites of a second OSC polymer backbone to form π-π interactions between conjugated OSC polymers.

A resistor-assembly includes a substrate, a heater, a resistor-element, and conductive-leads. The substrate is formed of a ceramic-material. The heater heats the resistor-assembly. The resistor-element is formed of an ion-conducting material that overlies the substrate. The conductive-leads are formed of a catalytic-metal that are in communication with a gas and in electrical contact with the resistor-element. The resistor-element is characterized by a resistance-value influenced by an oxygen-presence in the gas when the resistor-element is heated by the heater such that a resistor-temperature is greater than a temperature-threshold.

Methods and systems of analyzing and quantifying a surface acidity on a low surface area sample are disclosed. The methods include analyzing a quantity of an effluent molecular probe desorption from a temperature programmed desorption (TPD) process and system, by employing a mass spectroscopy (MS) system. The molecular probe is chemically adsorbed on a clean surface of the sample before the TPD process. The sample has a surface area to mass ratio of less than 5 m.sup.2/g. In some embodiments, the total surface area analyzed in the method can be as low as 3 m.sup.2.

An air quality notification device is disclosed. The air quality notification device includes an actuating and sensing module, a microprocessor, a first communication module and a power source. The actuating and sensing module includes a sensor and an actuating device. The actuating device is disposed near the sensor. The sensor senses air transmitted by the actuating device to generate air quality information. The microprocessor is electrically connected to the actuating and sensing module. The first communication module is electrically connected to the actuating and sensing module to receive and transmit the air quality information. The power source is electrically connected to the microprocessor.

A gas sensor includes a biomaterial comprising electrically-conductive protein nanowires and at least two electrodes. The at least two electrodes are in operative arrangement with the protein nanowires and configured to provide a signal indicative of a change in conductivity of the protein nanowires. The conductivity of the protein nanowires is responsive to a change in concentration of a gas exposed to the biomaterial, such as ammonia, or to a change in relative humidity.

An amperometric electrochemical sensor for measuring the concentrations of one or more target gas species in a gas sample or gas stream, the sensor having at least one electrochemical cell with first and second surface electrodes, an electrolyte layer and a passive signal amplifying layer (“SAL”) comprising electrically conductive material like platinum, wherein at least a portion of the electrolyte layer is located between the surface electrodes and the SAL such that the SAL is in direct, conductive contact with the electrolyte layer but is not in direct contact with the surface electrodes. Sensor systems and detection methods are also provided.