A method for monitoring gas in a wafer processing system is provided. The method includes producing an exhaust flow in an exhausting conduit from a processing chamber. The method further includes placing a gas sensor in fluid communication with a detection point located in the exhausting conduit via a sampling tube that passes through a through hole formed on the exhausting conduit. The detection point is located away from the through hole. The method also includes detecting a gas condition at the detection point with the gas sensor. In addition, the method also includes analyzing the gas condition detected by the gas sensor to determine if the gas condition in the exhausting conduit is in a range of values.

Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

We disclose herein an electronic device comprising: a state machine for receiving an output signal from a sensor; a comparator operatively coupled with the state machine; and a first processor operatively coupled with the comparator. The state machine is configured to receive the output signal from the at least one sensor to obtain sensor measurement data and configured to pass the obtained sensor measurement data to the comparator. The comparator is configured to process the obtained sensor measurement data into first processed sensor data, and configured to compare the first processed sensor data with a first predetermined threshold limit. The comparator is configured to inform the first processor about the obtained sensor measurement data if the first processed sensor data exceed the first predetermined threshold limit.

Systems, apparatuses, and methods for monitoring an environment are provided. One system includes a monitoring unit positioned within an environment and including an acoustic sensor configured to generate detected acoustic data regarding acoustics in the environment, and a controller having one or more processors and one or more non-transitory memory devices that store instructions for controlling the one or more first processors to receive and store the detected acoustic data, determine, based on the detected acoustic data, whether a noise is above a threshold, and determine, based on the detected acoustic data and that the noise is above the threshold, an estimated source of the noise.

Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

Disclosed are a method, a device and a system of sensor-based breathable air quality monitoring in a safety system of a structure. In accordance therewith, an air quality analyzer is coupled to a fixed piping system installed within the structure to facilitate delivery of breathable air from a source thereof. The air quality analyzer includes an air sequestration chamber in which a portion of the breathable air is segregated for analysis as an air sample, and one or more sensor(s) to sense one or more air quality parameter(s) from the air sample within the air sequestration chamber. An analysis module of the safety system performs analysis of the sensed one or more air quality parameter(s) based on coupling thereof to the air quality analyzer and transmits data associated with the analysis over a communication link.

A method is provided for operating a gas concentration monitoring system as well as a gas-measuring device, a central unit, a gas concentration monitoring system as well as computer program product. The safety of persons or the safety of a situation is determined with respect to at least one hazardous gas. The concentration of the gas is provided to a memory and analysis device. A measured value rating number is determined for a preset period of use. A number of instances, of the measured concentration values exceeding of a preset gas concentration limit value is input. A safety code is determined from at least one of: the measured concentration values, the measured value rating numbers and from the a total number of instances in which a gas concentration limit value was exceeded.

Embodiments of a sensor device, method and system employ a multiplicity of environmental sensors as a single monitoring and alerting mechanism, operable to provide a profile of any contaminant in terms of various gases and particles in the atmosphere, quantified in terms of relative concentrations. In various embodiments, the sensor device can comprise hardware and firmware elements, including an electronic control system, a case, a shield and a cover. The environmental sensors can be secured as part of the electronic control system and the shield can be formed so as to facilitate proper channeling of air and sound for effective operation.

A gas-detecting apparatus includes a pump module connected to a first input and a second input to intake air, a sensor module including at least one unit sensor configured to output a sensing signal in response to gas present in the air, and a control module configured to detect the gas using the sensing signal. The control module controls the pump module to intake second air by opening the second input when gas is detected in first air introduced through the first input, and determines that gas is detected when a concentration of gas detected in the second air is lower than a concentration of gas detected in the first air.

A method includes receiving a carrier with a plurality of wafers inside; supplying a purge gas to an inlet of the carrier; extracting an exhaust gas from an outlet of the carrier; and generating a health indicator of the carrier while performing the supplying of the purge gas and the extracting of the exhaust gas.