Provided is a technology for detecting a change in an inspection target containing moisture. A sensor circuit (1) for inspecting property of an inspection target includes an oscillator (20) having a resonance frequency of 30 to 200 GHz, and a detection circuit (3) that estimates an oscillation frequency of the oscillator.

Embodiments described herein involve a sensor test structure, comprising a substrate. A moat structure is configured to at least partially surround a resonating structure comprising at least one piezoelectric layer. An electrode comprises an electrode path. The electrode path crosses the moat region at least one time. Each moat crossing is configured to cause a change in resistance based on passivation failure of the moat structure.

A method and system of a method of measuring complex dielectric constant and permeability includes directing two polarizations onto a material under test and measuring one or more values of reflection coefficients. Further, the method includes integrating a p-wave reflection coefficient and a s-wave reflection coefficient and calculating, based on the measured one or more values of the reflection coefficients in association with a Brewster's angle, one or more of a complex dielectric constant and permeability.

A device for measuring a property of a substrate comprises an enclosure, two resonators, and two probes. The substrate has a top surface, and the enclosure defines a cavity for placing the substrate. The resonators extend into the cavity of the enclosure. The probes extend into the cavity, and each of the probes comprises a loop that extends about an axis that is substantially parallel to the top surface of the substrate so that the probes are operable to excite a transverse magnetic mode signal in the cavity.

A technique capable of reducing variations in measurement results of electrical resistance due to the assembly accuracy of a channel device is provided. A first lid member closes an upper opening of a measurement chamber of an intermediate member. An upper working electrode is disposed on a surface of the first lid member. The upper working electrode includes a first upper working portion and a second upper working portion. A dimension from a second edge of the first upper working portion to a first edge of the second upper working portion is greater than the width of the measurement chamber. A distance between the first upper working portion and the second upper working portion as measured in a width direction is smaller than the width of the measurement chamber.

In a dielectric characteristic measurement method, a step of mounting a sample of which dielectric characteristic is measured on an open resonator and adjusting a position of the sample includes: a first measurement step for performing a first resonance measurement by sweeping a predetermined sweep frequency range at a first number of measurement points; and a second and subsequent measurement steps for performing a plurality times of resonance measurement following the first resonance measurement, wherein each of the plurality times of resonance measurement is performed by sweeping a sweep frequency range specified based on an immediately preceding resonance measurement at a second number of the measurement points which is less than the first number of the measurement points, and the sweep frequency range of a second resonance measurement in the plurality times of resonance measurement is specified based on the first resonance measurement.