G01R33/345

Multi-probe ferromagnetic resonance (FMR) apparatus for wafer level characterization of magnetic films

A ferromagnetic resonance (FMR) measurement system is disclosed with a plurality of “m” RF probes and one or more magnetic assemblies to enable a perpendicular-to-plane or in-plane magnetic field (H.sub.ap) to be applied simultaneously with a sequence of microwave frequencies (f.sub.R) at a plurality of “m” test locations on a magnetic film formed on a whole wafer under test (WUT). A FMR condition occurs in the magnetic film (stack of unpatterned layers or patterned structure) for each pair of (H.sub.ap, f.sub.R) values. RF input signals are distributed to the RF probes using RF power distribution or routing devices. RF output signals are transmitted through or reflected from the magnetic film to a plurality of “n” RF diodes where 1≤n≤m, and converted to voltage signals which a controller uses to determine effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening at the predetermined test locations.

Probe for operando in situ electrochemical nuclear magnetic resonance spectroscopy

Electrochemical devices with metal casings have been considered incompatible with nuclear magnetic resonance (NMR) spectroscopy because the oscillating magnetic fields (“rf fields”) responsible for excitation and detection of NMR active nuclei do not penetrate metals. According to the present invention, rf fields can still efficiently penetrate into nonmetallic layers of electrochemical cells (such as a coin cell battery configuration) provided the magnetic field is oriented tangentially to the electrochemical cell electrodes in a “skimming” orientation. As an example, noninvasive high field in situ .sup.7Li and .sup.19F NMR of an unmodified commercial off-the-shelf rechargeable coin cell was demonstrated using a traditional external NMR coil setup. The in operando NMR measurements revealed that irreversible physical changes accumulate at the anode during electrochemical cycling.

MR RF COIL WITH NON-CONDUCTIVE WAVEGUIDES

A magnetic resonance RF receive coil with non-conductive waveguides for data transfer between the RF coil antennas and the channel aggregator is described. The non-conductive waveguide for each channel includes a plastic waveguide transferring data between a millimeter wave transmitter and a millimeter wave receiver.

MR RF COIL WITH NON-CONDUCTIVE WAVEGUIDES

A magnetic resonance RF receive coil with non-conductive waveguides for data transfer between the RF coil antennas and the channel aggregator is described. The non-conductive waveguide for each channel includes a plastic waveguide transferring data between a millimeter wave transmitter and a millimeter wave receiver.

On-chip excitation and readout architecture for high-density magnetic sensing arrays based on quantum defects

A sensing array includes a plurality of pixels, one pixel of which includes: a sensor, the sensor including a first electrode, a second electrode, and an atomic defect site configured to be excited by light of a first frequency; a light source below the sensor and configured to emit light of the first frequency toward the defect site; and a radio frequency (RF) source below the sensor and configured to provide a first voltage to the first electrode, a second voltage to the second electrode, and an RF signal to the sensor, wherein the sensor is configured to sense a magnitude of a physical parameter by generating a photocurrent corresponding to a magnitude of a physical parameter and a differential between the first and second voltages, when excited by the light of the first frequency and affected by the RF signal.

Probe for Operando In Situ Electrochemical Nuclear Magnetic Resonance Spectroscopy

Electrochemical devices with metal casings have been considered incompatible with nuclear magnetic resonance (NMR) spectroscopy because the oscillating magnetic fields (“rf fields”) responsible for excitation and detection of NMR active nuclei do not penetrate metals. According to the present invention, rf fields can still efficiently penetrate into nonmetallic layers of electrochemical cells (such as a coin cell battery configuration) provided the magnetic field is oriented tangentially to the electrochemical cell electrodes in a “skimming” orientation. As an example, noninvasive high field in situ .sup.7Li and .sup.19F NMR of an unmodified commercial off-the-shelf rechargeable coin cell was demonstrated using a traditional external NMR coil setup. The in operando NMR measurements revealed that irreversible physical changes accumulate at the anode during electrochemical cycling.

Shifting Phase in a Resonator Device for Magnetic Resonance

In some aspects, a resonator device includes a dielectric substrate, a ground plane on a first side of the substrate, and conductors on a second, opposite side of the substrate. The conductors include first and second resonators and two baluns. Each balun includes a feed, a first branch and a second branch. The feed is connected to the first and second branches, and the first and second branches are capacitively coupled to the respective first and second resonators. The first branch includes a delay line configured to produce a phase shift relative to the second branch. The resonator device includes a sample region configured to support a magnetic resonance sample between the first and second resonators.

Shifting Phase in a Resonator Device for Magnetic Resonance

In some aspects, a resonator device includes a dielectric substrate, a ground plane on a first side of the substrate, and conductors on a second, opposite side of the substrate. The conductors include first and second resonators and two baluns. Each balun includes a feed, a first branch and a second branch. The feed is connected to the first and second branches, and the first and second branches are capacitively coupled to the respective first and second resonators. The first branch includes a delay line configured to produce a phase shift relative to the second branch. The resonator device includes a sample region configured to support a magnetic resonance sample between the first and second resonators.

STRIPLINE DETECTOR FOR IN SITU BATTERY AND FUEL CELL NMR
20210242509 · 2021-08-05 ·

Provided are batteries and fuel cells incorporating a stripline detector for use in nuclear magnetic resonance (NMR). The stripline batteries and fuel cells can be used for in situ NMR measurement of battery or fuel cell chemistry. Also provided are methods for measuring in situ battery and fuel cell NMR using the stripline batteries and fuel cells of the invention.

Scanning ferromagnetic resonance (FMR) for wafer-level characterization of magnetic films and multilayers

A ferromagnetic resonance (FMR) measurement system is disclosed with a waveguide transmission line (WGTL) connected at both ends to a mounting plate having an opening through which the WGTL is suspended. While the WGTL bottom surface contacts a portion of magnetic film on a whole wafer, a plurality of microwave frequencies is sequentially transmitted through the WGTL. Simultaneously, a magnetic field is applied to the contacted region thereby causing a FMR condition in the magnetic film. After RF output is transmitted through or reflected from the WGTL to a RF detector and converted to a voltage signal, effective anisotropy field, linewidth, damping coefficient, and/or inhomogeneous broadening are determined based on magnetic field intensity, microwave frequency and voltage output. A plurality of measurements is performed by controllably moving the WGTL or wafer and repeating the simultaneous application of microwave frequencies and magnetic field at additional preprogrammed locations on the magnetic film.