G02B7/1825

Optical element angle adjustment device and extreme ultraviolet light generation device
10627640 · 2020-04-21 · ·

An optical element angle adjustment device includes a first hinge that is an elastic hinge configured to connect a first plate and a second plate with each other, an optical element holding part attached to at least one of the first plate and the second plate, and a first adjusting screw configured to apply force in a direction of closing the first hinge to adjust a tilt angle of at least one of the first plate and the second plate. An end in an axis direction of the first adjusting screw is provided with a first press member configured to slidably abut on one of the first plate and the second plate. At least one of a first press member side abutting portion and a first hinge side abutting portion on which the first press member abuts has a curved surface in a curved surface shape.

OPTICAL ELEMENT ADJUSTMENT MODULE AND PROJECTOR
20200103732 · 2020-04-02 · ·

An optical element adjustment module includes a mount comprising at least one first mount hole, at least one first fixing member, and at least one adjustment structure disposed on the mount and comprising an optical element, a supporting member, and a base. The optical element comprises a first surface and is held on the supporting member. The supporting member is fixed on the base, and the base includes a first base hole. The central axis of the first base hole is parallel to the first surface of the optical element. Each of the adjustment structures is rotated relative to the mount with respect to the first fixing member, so as to adjust the relative positions of the adjustment structure and the mount slightly as required.

MOUNTING DEVICES WITH INTEGRATED ALIGNMENT ADJUSTMENT FEATURES AND LOCKING MECHANISMS
20200064580 · 2020-02-27 ·

An apparatus includes a device mount configured to be coupled to a component. The apparatus also includes an inner hub coupled to the device mount by a first flexure, where the first flexure is configured to permit translational movement of the device mount within the inner hub along a first axis. The apparatus further includes an outer hub coupled to the inner hub by a second flexure, where the second flexure is configured to permit translational movement of the device mount and the inner hub within the outer hub along a second axis different from the first axis. The first and second flexures form a compound nested flexure. The outer hub is configured to be coupled to a support structure and to permit both (i) translational movement of the apparatus along a third axis different from the first and second axes and (ii) tip/tilt adjustment of the apparatus.

Optical Mount
20200026029 · 2020-01-23 ·

An optical mount has a component support for an optical component, a clamp member and a frame. The frame has a component support interface that, when positioned against the component support, defines a first spherical curvature for pivoting the component support about a center of curvature. A clamping interface defines a second spherical curvature, concentric with the center of curvature of the component support interface, for pivoting the clamp member. A coupling is configured to urge the clamp member toward the component support against the frame.

Adjustable alignment mount

A ruggedized adjustable mounting system is described for adjustably coupling and selectively locking a component supported in a fixture of the mount in a desired orientation. In some embodiments, the mounting system includes one or more kinematic couplings that support a fixture on a base and one or more adjustable couplings that are configured to adjust a separation distance between two opposing portions of the fixture and the base to selectively pivot the fixture about one or more axes of rotation.

Method and apparatus for multiple degree of freedom precision adjustable mount

An apparatus configured for precision adjustment includes a support fitting having a void oriented along a first axis. The apparatus also includes an adjustment screw disposed within the void. The apparatus further includes first and second set screws coupled to the support fitting, where each set screw has a substantially conical tip. The first and second set screws are oriented such that a plane bisecting the first and second set screws is substantially perpendicular to the first axis. An edge of the conical tip of the first set screw is substantially parallel to an edge of the conical tip of the second set screw.

Mount for flat optical surface

An optical apparatus has an optic having a first flat surface and a second surface opposite the first flat surface. A frame has a first fixed contact point, a second fixed contact point, and a third fixed contact point that extend from the frame. The first surface of the optic seats against the first, second, and third fixed contact points. A clamping plate applies a three-point nesting force by extending, against the second flat surface of the optic, a first opposing contact point aligned with the first fixed contact point, a second opposing contact point aligned with the second fixed contact point, and a third opposing contact point aligned with the third fixed contact point.

Optomechanical Part for Parabolic Mirror Fine Rotation and On-Axis Linear Positioning

An opto-mechanical apparatus including a hollow housing member having a first end and a second end, the housing member having a longitudinal axis, a parabolic mirror positioned on a side of to the first end of the housing member, and a mirror adjustment mechanism attached to the second end of the housing member, the mirror adjustment mechanism connected to the parabolic mirror through the housing member, the mirror adjustment mechanism configured to adjust an axial position of the parabolic mirror along the longitudinal axis and to adjust a radial position of the parabolic mirror about the longitudinal axis.

High precision and low cross-coupling laser steering
11982870 · 2024-05-14 · ·

Disclosed is an adjustable mirror mount that is capable of adjusting a mirror in two axes with a high degree of precision and low cross-coupling. Long horizontal and vertical adjustment arms are used to allow the precision adjustment about both a horizontal axis and a vertical axis.

OPTICAL MOUNT ASSEMBLY WITH ADJUSTMENT MECHANISM HAVING A BALL BEARING
20240176092 · 2024-05-30 ·

An optical mount assembly includes a first plate configured to mount one or more optical components and a second plate arranged adjacent to the first plate and comprising a cavity formed therein. The first plate has an opening formed therein. The optical mount assembly further includes at least one adjustment mechanism secured to the first and second plates for adjusting the optical component(s). The adjustment mechanism(s) includes a ball bearing disposed within the cavity. The ball bearing defines a through hole. Further, the adjustment mechanism(s) includes an adjustment fastener extending through the opening in the first plate and at least partially within the through hole of the ball bearing.