An optical system mount assembly can include a first post and a movable mount configured to mount an optical element, the moveable mount being configured to move relative to the first post assembly between a first position and a second position. The assembly can include a first magnetic latch system member disposed on or within the first post, and a second magnetic latch system member disposed on or within the moveable mount such that the first magnetic latch system member magnetically interacts with the second magnetic latch system member to magnetically latch the moveable mount to the first post in the first position.

A directable light beam handling device for use in optical communication contains is provided that contains a rotation mechanism with a rotatable ring of soft magnetic material encircling a path of the beam from a beam expander. A mirror or prism being coupled to the rotatable ring is rotated with the ring. The ring includes an array of soft magnetic ridges, forming elevations extending from a surface of the ring. At least three electromagnets are used to drive rotation of the ring around the beam axis. Each electromagnets comprises a soft magnetic yoke, having poles at a first and second end portion of the yoke. The pole at the first end portion faces said surface of the ring, the first end portion having ridges elevated from the yoke in the direction towards the ring, in parallel with the ridges of the ring.

A reaction compensation device includes a drive mechanism driving a first movable part with respect to a base, a reaction mass drive mechanism driving a second movable part with respect to the base; and a first relative position sensor measuring a relative position between the first movable part and the base. There is also a second relative position sensor measuring a relative position between the second movable part and the base, a first control system controlling the drive mechanism by taking in a signal outputted from the first relative position sensor as a feedback signal in response to a command value, and a second control system correcting the command value using a correction parameter for adjusting a difference between mass properties of the drive mechanism and reaction mass drive mechanism and for controlling the reaction mass drive mechanism.

A control device actuates actuator unit to set a position of an optical element of a lithography system. The control device includes an amplifier unit for providing a control signal for the actuator unit via a voltage signal and a PWM signal. The PWM signal has a duty factor and a clock frequency. The control device also includes a modulator unit designed to provide the PWM signal having the duty factor and a defined clock frequency from a plurality of defined clock frequencies. A defined clock frequency of the plurality of defined clock frequencies is an integer multiple of a basic clock frequency. The basic clock frequency is in the range of 10 kHz to 1 MHz.

An optical system is provided and includes a fixed assembly, a movable member, a driving assembly and a buffering member. The movable member is movably connected to the fixed assembly and is configured to hold an optical member having an optical axis. The driving assembly is for driving the movable member to move relative to the fixed assembly. The buffering member is disposed on a first surface of the fixed assembly. The buffering member, the movable member and the fixed assembly are arranged along the optical axis. The buffering member includes a soft resin material. The buffering member is disposed to surround the optical axis.

An optical element driving mechanism is provided. The optical element driving mechanism includes a fixed portion, a movable portion, a plurality of first elastic elements, and a first driving assembly. The movable portion is movably connected to the fixed portion, and includes a holder to hold an optical element, wherein the optical element has an optical axis. The first elastic elements are elastically connected to the fixed portion and the movable portion. The first elastic elements extend in a first direction, and the first direction is perpendicular to the optical axis. The first driving assembly drives the movable portion to move relative to the fixed portion in a direction that is perpendicular to the first direction. The first driving assembly is electrically connected to the first elastic elements.

A calibration method of an optical system is provided, wherein the optical system includes a movable element that can move within an operation interval. The calibration method includes the step of establishing a relationship between the operation interval and an electrical signal coding sequence. The calibration method further includes the step of establishing a relationship between the operation interval and a sensing signal coding sequence.

A system for a projection exposure apparatus which comprises a first component, a second component, and a decoupling device configured to decouple the second component in more than one degree of freedom from mechanical excitations of the first component. The decoupling device comprises first decoupling elements which have a positive stiffness. The decoupling device also comprises second decoupling elements, which have a negative stiffness. The decoupling device further comprises a third component, which is arranged between the first and second components.

The present invention relates to an optical element driving mechanism, including a base, a holder, a frame and a light intensity adjusting assembly. The holder is movably connected to the base and carries the optical element, wherein the optical element has an opening and an optical axis so that light passes through the opening to the optical element. The frame is connected to the holder and the base. The light intensity adjusting assembly is disposed on the frame. The light intensity adjusting assembly includes a first shutter, a second shutter and a shutter driving member. The second shutter is disposed between the first shutter and the frame. The shutter driving member is disposed between the second shutter and the frame to drive the first shutter and the second shutter.

A reflecting unit is provided, including an optical member holder, an optical member, a frame, a first bearing member, a first hinge, and a first driving module. The optical member is disposed on the optical member holder. The first bearing member is disposed on the frame or the optical member holder. The first hinge is pivotally connected to the optical member holder and the frame. The first driving module can drive the optical member holder to rotate relative to the frame. When the optical member holder rotates relative to the frame, the first hinge rotates relative to the optical member holder or the frame via the first bearing member.