A probe element includes a conduction pin, a cylindrical barrel, and a bushing. The barrel accommodates the conduction pin inside thereof such that the tip portion of the conduction pin is exposed to the outside. The bushing holds the conduction pin inside the barrel in a state in which the tip portion is movable, and has predetermined permittivity. The conduction pin includes a tip portion, an intermediate portion partially accommodating the tip portion, and a cylindrical socket portion coupled to the intermediate portion. A distance between the socket portion and the inner wall surface of the barrel, and a distance between the intermediate portion and the inner wall surface of the barrel in a direction orthogonal to an extending direction of the barrel are different from each other.

The present disclosure relates to a socket having a thin structure and to a spring contact suitable thereto. The socket includes: a plurality of spring contacts (100) each of which includes an upper contact pin (110), a lower contact pin (120) assembled to the upper contact pin such that the upper and lower contact pins cross each other to mutually linearly operate, and a coil spring (130) supporting the upper and lower contact pins (110 and 120); a lower film plate (310) including a plurality of first through-holes (311) through which the respective spring contacts (100) are positioned; an intermediate plate (320) provided on the lower film plate (310) and including second through-holes formed at positions corresponding to the first through-holes (311); and an upper film plate (330) provided on the intermediate plate (320) and including third through-holes formed at positions corresponding to the second through-holes.

A measurement unit includes: a ground portion forming a part of a line configured to provide continuity for grounding electric potential, the ground portion including a surface forming a plane at one end of the ground portion; a signal portion forming a part of a line configured to provide continuity for a signal for measurement, the signal portion including an end portion configured to come out in a plane that is same as the plane of the ground portion; an insulative dielectric portion provided between the ground portion and the signal portion; an electrically conductive first contact probe configured to expand and contract along a longitudinal axis, the first contact probe coming into contact with the signal portion; and an electrically conductive second contact probe configured to expand and contract along a longitudinal axis, the second contact probe coming into contact with the ground portion.

A method for assembling an ultrahigh-frequency spring probe test assembly includes: drilling signal cavities, power supply cavities, and grounding cavities, assembling an upper mold core and a lower mold core and performing curing, mounting an upper shaft sleeve and a lower shaft sleeve, inserting a signal probe, a power supply probe and a grounding probe, and mounting an upper base to complete assembling the probe test assembly. The signal probe becomes coaxial with the signal cavity by mounting the insulating ring, achieving small signal loss; the insulating mold core is inserted into the power supply cavity after drilling and is bonded to the power supply cavity via adhesive to form a dual-layer insulating structure between the power supply probe and the base, having high insulation performance and low power loss; the grounding probe is in direct contact with the metal base, achieving high conductivity.

A contact pin, in particular a spring contact pin, comprising a test head for contacting an electrically conductive contact surface of a test object, in particular a wafer, a printed circuit board or the like, and comprising a pin sleeve, in which the test head is mounted with a guide end in a longitudinally displaceable manner. At least in some sections, a flexible, deformable/deformed circuit carrier is provided, on which at least one electrical/electronic component is arranged and which is or can be axially inserted into the pin sleeve by rolling and/or folding.

The contact probe comprises a barrel 50, an inspection device side terminal 60, a test board side terminal 70, and a spring 80 disposed in a state of being in contact with the test board side terminal 70 and the inspection device side terminal 60, the test board side terminal 70 includes a stop portion 74 that can abut on the caulked portion 52 in the barrel 50 and a terminal body that projects from the other end 56 of the barrel 50, and the terminal body includes, in order from a tip end, a first shaft section 71, a second shaft section 72 having a diameter larger than a diameter of the first shaft section 71, and a third shaft section 73 having a diameter smaller than the diameter of the second shaft section 72 and having at least a part that can be housed in the barrel 50.

A contact terminal includes a tubular body extending in an axial direction of the contact terminal and having conductivity; a bar-shaped first conductor having conductivity and capable of coming into contact with an inspection target; and a bar-shaped second conductor having conductivity. The first conductor includes: a first protrusion that protrudes from the tubular body toward one side in the axial direction; and a first insertion portion provided at the other end of the first conductor in the axial direction and disposed in the tubular body. The second conductor includes a second insertion portion disposed in the tubular body. The tubular body includes: a spring portion configured in a spiral shape along a peripheral surface of the tubular body; and a first body portion connected to one side in the axial direction of the spring portion. The first insertion portion is fixed to the first body portion.

In various examples, an inspection jig includes a plate-shaped insulating member having a recess; a first board having a first electrode; and a conducting wire electrically connected to a contact terminal. The insulating member is provided with a through hole penetrating a bottom portion of the recess. One end portion of the conducting wire is disposed in the through hole. The other end of the conducting wire is connected to the first electrode.

A contact probe is conductive and capable of expanding/contracting along an axial line direction. The contact probe includes: a first contact member configured to contact one contact target; a second contact member configured to contact another contact target, and to house at least a portion of the first contact member; and a spring member configured to couple the first contact member and the second contact member in a manner capable of expansion/contraction with both end parts of the spring member. The spring member is wound in a helical shape, and at least a diameter of an outer circumference in one of the end parts held by the second contact member is larger than diameters of other portions. A diameter of an inner circumference of an end part of the second contact member on a side housing the first contact member is equal to or larger than a maximum diameter of the first contact member.

A probe head includes a probe seat having upper, middle and lower dies, an electrically conductive layer inside the probe seat, a first spring probe penetrating through the probe seat, and at least two shorter second spring probes penetrating through the lower die in a way that top ends of the second spring probes are located inside the probe seat and abutted against the electrically conductive layer. Another probe head includes the aforesaid probe seat, an electrically conductive layer partially inside the probe seat and partially outside the probe seat, a first spring probe penetrating through the probe seat, and a shorter second spring probe penetrating through the lower die in a way that a top end of the second spring probe is located inside the probe seat and abutted against the electrically conductive layer. As such, fine pitch requirement and different high frequency testing requirements are fulfilled.