An optical delivery waveguide for a material laser processing system includes a small lens at an output end of the delivery waveguide, transforming laser beam divergence inside the waveguide into a spot size after the lens. By varying the input convergence angle and/or launch angle of the laser beam launched into the waveguide, the output spot size can be continuously varied, thus enabling a continuous and real-time laser spot size adjustment on the workpiece, without having to replace the delivery waveguide or a process head. A divergence of the laser beam can also be adjusted dynamically and in concert with the spot size.

An optical assembly generally having a substrate; a photonic-integrated circuit (PIC) mounted on the substrate, the PIC having a plurality of optical ports; a first structure having a bottom surface connected to the substrate, and a first planar surface extending perpendicularly to the substrate; a second structure having a second planar surface being connected to the first planar surface of the first structure via an adhesive, and a support surface; and a waveguide array having a support surface being connected to the support surface of the second structure, the waveguide array having a plurality of waveguides each defining an optical path, with the optical paths lying in a waveguide plane, the waveguide plane being perpendicular to the first and second planar surfaces, the optical paths being maintained in optical alignment with corresponding ones of the optical ports via the adhered first and second planar surfaces.

A hybrid optical-electrical automated testing equipment (ATE) system can implement a workpress assembly that can interface with a device under test (DUT) and a load board that holds the DUT during testing, analysis, and calibration. A test hand can actuate to position the DUT on a socket and align one or more alignment features. The workpress assembly can include two optical interfaces that are optically coupled such that light can be provided to a side of the DUT that is facing away from the load board, thereby enabling the ATE system to perform simultaneous optical and electrical testing of the DUT.

An optical assembly includes a combination of laser sources emitting radiation, focused by a combination of lenses into optical waveguides. The optical waveguide and the laser source are permanently attached to a common carrier, while at least one of the lenses is attached to a holder that is an integral part of the carrier, but is free to move initially. Micromechanical techniques are used to adjust the position of the lens and holder, and then fix the holder it into place permanently using integrated heaters with solder.

Provided is an optical communication connector that includes a control unit (42). The control unit (42) controls alignment of a ferrule (170) and a lens (162). The ferrule (170) is to fix a fiber (23). The control unit (42) varies a shape of a shape variation member (21) on the basis of a communication quality of light entering the fiber (23) via the lens (162) to control the alignment.

Provided are an apparatus and method for adjusting an optical axis. In the apparatus, an iris diaphragm and a quadrant photodiode (QPD) are used to align optical axes of an optical system of the apparatus so that optical transmission efficiency between an optical transmitter and an optical receiver can be increased. Since a hole of the iris diaphragm can be adjusted to be small, a beam larger than a light-receiving area of the QPD can be included in the light-receiving area, and optical axis alignment is facilitated accordingly. When the QPD and the iris diaphragm are applied to the apparatus, it is possible to simultaneously perform data transmission, tracking, and optical axis alignment. An optical fiber end surface and optical axes of lenses arranged in parallel are aligned in the apparatus so that alignment between two terminals can be easy and reception efficiency can be increased.

A projective MEMS device, including: a fixed supporting structure made at least in part of semiconductor material; and a number of projective modules. Each projective module includes an optical source, fixed to the fixed supporting structure, and a microelectromechanical actuator, which includes a mobile structure and varies the position of the mobile structure with respect to the fixed supporting structure. Each projective module further includes an initial optical fiber, which is mechanically coupled to the mobile structure and optically couples to the optical source according to the position of the mobile structure.

A lithography system comprises an illumination system configured to produce abeam of radiation, a support configured to support a patterning device configured to impart a pattern on the beam, a projection system configured to project the patterned beam onto a substrate, and an alignment system comprising an illuminator. The illuminator comprises an optical fiber, an optical fiber protector (714), an optical fiber support (700) comprising a first support arm assembly configured to support the optical fiber protector, an optical system, and an optical system support comprising a second support arm assembly configured to support the optical system.

Disclosed are devices and techniques for facilitating transmission of light signals between optical waveguides formed on integrated circuit (IC) devices. In an implementation, one or more first waveguides may be formed in a structure such that at least a portion of the one or more first waveguides are exposed for optical connectivity. The structure may comprise first features to enable the structure to be interlocked with an IC device comprising second features complementary with the first features, so as to align at least a portion of the one or more first waveguides exposed to optically couple with one or more second waveguides formed in the first integrated circuit device.

Assembly with connecting element connecting a first and a second component, the connecting element has a base part connected to the first component, a first spring element and a second spring element. First and second spring elements are connected to the second component and each have a spring constant in two mutually perpendicular directions in space which is respectively at least twice as high as that in the third direction in space which is perpendicular to the first two directions in space, known as the elasticity direction. Elasticity directions of the two spring elements do not run parallel and define a first plane of elasticity. The base part comprises a floor element to which the first spring element is fastened and a first limb element to which the second spring element is fastened, wherein the first limb element comprises a fastening element for fastening the assembly to a third component.