The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises an excitation element for causing the tube to oscillate, as well as a detection element for detecting at least a measure of displacements of parts of the tube during operation. In some embodiments, the detection element comprises two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

Methods and apparatuses for delivering a process gas to a processing chamber are provided. A mass flow controller includes a first flow line for introducing a process fluid and an inlet valve disposed along the first flow line for controlling a flow rate of the process fluid. The mass flow controller includes a second flow line for introducing a carrier fluid into the mass flow controller and a micro-electro-mechanical system (MEMS) Coriolis sensor for providing a density signal and a mass flow rate signal for a mixture of the process fluid and the carrier fluid. The mass flow controller provided includes an outlet valve for controlling a mass flow rate of the mixture that is output by the mass flow controller as well as a controller for operating the inlet valve based on the density signal and for operating the outlet valve based on the mass flow rate signal.

Methods and apparatuses for delivering a process gas to a processing chamber are provided. A mass flow controller includes a first flow line for introducing a process fluid and an inlet valve disposed along the first flow line for controlling a flow rate of the process fluid. The mass flow controller includes a second flow line for introducing a carrier fluid into the mass flow controller and a micro-electro-mechanical system (MEMS) Coriolis sensor for providing a density signal and a mass flow rate signal for a mixture of the process fluid and the carrier fluid. The mass flow controller provided includes an outlet valve for controlling a mass flow rate of the mixture that is output by the mass flow controller as well as a controller for operating the inlet valve based on the density signal and for operating the outlet valve based on the mass flow rate signal.

The invention relates to a Coriolis flow sensor, comprising at least a Coriolis-tube, wherein the flow sensor comprises excitation means for causing the tube to oscillate, as well as detection means for detecting at least a measure of displacements of parts of the tube during operation. According to the invention, the detection means comprise two detection elements that are positioned on both sides of the Coriolis tube, wherein the detection elements partly overlap each other.

A MEMS sensor for measuring at least one measured variable, especially a density, a flow and/or a viscosity, a flowing fluid, is described, comprising: at least one microfluidic channel having a channel section excitable to execute oscillations; and an exciter system for exciting a desired oscillation mode, causing the channel section to execute oscillations in a predetermined plane of oscillation. The MEMS sensor has improved oscillation characteristics at least in part because the channel section is composed of an anisotropic material, having directionally dependent elasticity and which is spatially oriented such that a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section perpendicular to the plane of oscillation is greater than a modulus of elasticity determinative for a stiffness of the channel section relative to deflections of the channel section in the plane of oscillation.

The invention relates to a microelectromechanical system (MEMS) component or microfluidic component comprising a free-hanging or free-standing microchannel (1), as well as methods for manufacturing such a microchannel, as well as a flow sensor, e.g. a thermal flow sensor or a Coriolis flow sensor, pressure sensor or multi-parameter sensor, valve, pump or microheater, comprising such a microelectromechanical system component or microfluidic component. The MEMS component allows to increase the flow range and/or decrease the pressure drop of for instance a micro Coriolis mass flow meter by increasing the channel diameter, while maintaining its advantages.