Various embodiments include an arrangement comprising a plurality of MEMS switches with movable elements. The plurality of MEMS switches are connected to one another in a total-cross-tied configuration.

Provided is an electrostatic drive switch, which includes a source plate to which a voltage for driving the electrostatic drive switch is applied and a drain electrode spaced apart from the source plate. The source plate includes a source electrode and an elastic part connected to the source electrode, and a first material and a second material having lower hardness than the first material are provided on the source electrode. When the source electrode and the drain electrode are electrically connected to each other by the voltage, the second material is brought into contact with the drain electrode by the elastic part after the first material is brought into contact with the drain electrode by the elastic part.

A MEMS switch having a substrate, a micromechanical function layer situated above the substrate, and a fixed part and an electrically operable, deflectable switch element are developed in the micromechanical function layer, the switch element for closing an electrically conductive contact with the fixed part being suspended on at least one first spring in a deflectable manner. In a first operating state, the switch element is in a first position at a first distance from the fixed part, and the electrical contact is open. In a second operating state, the switch element is in a second position at a second distance from the fixed part, and the first spring is deflected and exerts a first restoring force, and the switch element establishes an operative connection with at least one second spring and the electrical contact is open. In a third operating state, the switch element is in a third position.

The present disclosure generally relates to the design of a MEMS ohmic switch which provides for a low-impact landing of the MEMS device movable plate on the RF contact and a high restoring force for breaking the contacts to improve the lifetime of the switch. The switch has at least one contact electrode disposed off-center of the switch device and also has a secondary landing post disposed near the center of the switch device. The secondary landing post extends to a greater height above the substrate as compared to the RF contact of the contact electrode so that the movable plate contacts the secondary landing post first and then gently lands on the RF contact. Upon release, the movable plate will disengage from the RF contact prior to disengaging from the secondary landing post and have a longer lifetime due to the high restoring force.

According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first conductive member electrically connected to the first movable electrode, and a second conductive member electrically connected to the first movable electrode. The first conductive member and the second conductive member support the first movable electrode to be separated from the first fixed electrode in a first state before a first electrical signal is applied between the second conductive member and the first fixed electrode. The first conductive member and the second conductive member are in a broken state in a second state after the first electrical signal is applied between the second conductive member and the first fixed electrode.

Embodiments of the disclosure are directed to microelectromechanical system (MEMS) switches with a beam contact portion continuously extending between input and output terminal electrodes. In exemplary aspects disclosed herein, the movable beam includes a body and a contact with more conductivity and stiffness than the body. The contact continuously extends between and electrically couples the contact of the movable beam with the input and output terminal electrodes. Differing materials between the body and the contact allow for inclusion of the mechanical properties of the body (e.g., to reduce mechanical fatigue, creep, etc.) while utilizing the electrical properties of the contact (e.g., to reduce on-state electrical resistance). Accordingly, the MEMS switch provides low resistance loss during an on-state while maintaining high levels of isolation during an off-state.

A touchless trigger apparatus is touchless button, comprising a photon-gate side, a photon-gate distal side more than 1 cm (11.0 in) and less than 30 cm (11.0 in) across the photon-gate opening, to the photon-gate side. An electro-optical sensor is connected to the photon-gate side. An ASIC controller is connected to the output of the electro-optical sensor. Lastly a button face is within the opening of the photon gate. Alternatively, a touchless trigger apparatus is a touchless pushbutton, or a touchless switch. Any person or primate trained to use a button, pushbutton or switch could intuitively learn to use a touchless trigger apparatus due to its recognizable combination of elements and low-latency feedback before touching the button, the pushbutton or the switch.

An apparatus suitable for detecting radiation, comprising: a radiation absorption layer comprising a semiconductor, a first electrical contact and a second electrical contact, the first electrical contact positioned across the semiconductor from the second electrical contact; a DC-to-DC converter configured to apply a DC voltage between the first electrical contact and the second electrical contact, the DC-to-DC converter comprising micro-electromechanical switches.

Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.

According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, a first movable electrode facing the first fixed electrode, a first conductive member electrically connected to the first movable electrode, and a second conductive member electrically connected to the first movable electrode. The first movable electrode is supported by the first and second conductive members to be separated from the first fixed electrode. The first conductive member has a meandering structure. The second conductive member includes a first conductive region and a second conductive region. The second conductive region is between the first movable electrode and the first conductive region. A second width of the second conductive region along a second direction is less than a first width of the first conductive region along the second direction.