Patent classifications
H01J41/12
Ion pump shield
An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.
Ion pump shield
An ion pump with a housing enclosing an interior, a gas inlet having a through-hole extending into the interior of the ion pump, at least one cathode, at least one anode positioned in proximity to the at least one cathode, a magnet disposed on an opposite side of the at least one cathode from the anode, and a blocking shield disposed between the gas inlet and the at least one cathode. The blocking shield is electrically connected to the at least one anode. An associated method installs the blocking shield by inserting components of the blocking shield assembly through the gas inlet, and assembling (inside the interior of the ion pump) the inserted components to form the blocking shield.
SPUTTER ION PUMP WITH PENNING-TRAP CURRENT SENSOR
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.
SPUTTER ION PUMP WITH PENNING-TRAP CURRENT SENSOR
A sputter-ion-pump system includes a sputter ion pump and an electronic drive. The electronic drive supplies a voltage across the ion pump to establish, in cooperation with a magnetic field, a Penning trap within the ion pump. A current sensor measures the Penning-trap current across the Penning trap. The Penning trap is used as an indication of pressure within the ion pump or a vacuum chamber including or in fluid communication with the ion pump. The pressure information can be used to determine flow rates, e.g., due to a load, outgassing, and/or leakage from an ambient.
System and method for enhanced ion pump lifespan
Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.
System and method for enhanced ion pump lifespan
Within an ion pump, accelerated ions leave the center portion of an anode tube due to the anode tube symmetry and the generally symmetrical electric fields present. The apparent symmetry within the anode tube may be altered by making the anode tube longitudinally segmented and applying independent voltages to each segment. The voltages on two adjacent segments may be time varying at different rates to achieve a rasterizing process.
MAGNETIC-FIELD SHIELD WITH DRIVE MAGNET
A magnetic-field shield is used to shield a magneto-optical trap (MOT) in an ultra-high vacuum (UHV) cell from magnetic fields generated by an ion pump used to maintain the UHV. The magnetic-field shield includes an enclosure of ferro-magnetic material that acts to capture portions of the magnetic field generated by the ion pump. However, as the distance between the ion pump and the MOT is less than 6 centimeters, enough of the magnetic field escapes through the ferro-magnetic material, and this leakage could impair the MOT. A drive magnet attached to the yoke redirects magnetic flux, that would otherwise leak out of the magnetic-field shield, along a path within the ferro-magnetic enclosure and away from the MOT.
Ionizing fluidic accelerator and methods of use
The present disclosure describes systems and methods for using an ionizing fluidic accelerator that may encompass the use of an ionizing fluidic accelerator including a substrate, an electron emitter having a negative bias and being formed on the substrate, an anode having a positive bias and being formed on the substrate, and an attractor having a negative bias and being formed on the substrate. The electron emitter and the anode may be separated in a first direction and the negative bias of the electron emitter and the positive bias of the anode may produce a first electric field in the first direction. The anode and the attractor may be separated in a second direction, the positive bias of the anode and the negative bias of the attractor may produce a second electric field in the second direction, and the second direction may be orthogonal to the first direction.
Ionizing fluidic accelerator and methods of use
The present disclosure describes systems and methods for using an ionizing fluidic accelerator that may encompass the use of an ionizing fluidic accelerator including a substrate, an electron emitter having a negative bias and being formed on the substrate, an anode having a positive bias and being formed on the substrate, and an attractor having a negative bias and being formed on the substrate. The electron emitter and the anode may be separated in a first direction and the negative bias of the electron emitter and the positive bias of the anode may produce a first electric field in the first direction. The anode and the attractor may be separated in a second direction, the positive bias of the anode and the negative bias of the attractor may produce a second electric field in the second direction, and the second direction may be orthogonal to the first direction.
SYSTEM AND METHOD TO MAINTAIN VACUUM, OR TO SELECTIVELY EXCLUDE/ADMIT ELECTROMAGNETIC ENERGY
A conduit is placed between a vacuum system and the open air or other gaseous environment. A laser or other excitation source is used to ionize the air on the air-side of the conduit. An axial applied electric field is used to repel positive ions from traversing the tube and reaching the region of the vacuum. Electrons are collected in the vacuum region and disposed of using a Faraday cup. The repelled ions assist in creating a counter pressure to sweep neutral atoms out of the tube and back into the ambient air. As a result, a hollow tube can connect an evacuated volume to the open air without compromising the vacuum. This is a “windowless window.” An array of such tubes can be assembled together to increase the area of the aperture.