A filament assembly includes a core and a filament. At least a central portion of the filament is disposed on the core. At least the central portion may be straight or may have a high-resistance configuration such as one in which the filament follows a path that changes direction. A thermionically emissive layer may be disposed on the core so as to encapsulate at least the central portion. The filament assembly may be utilized in any application requiring the production of electrons.

Disclosed is a filament support and a lamp with the filament support. The filament support may include a main rod, a plurality of branch rods and a plurality of support members. The plurality of branch rods are all installed on the main rod; the support members are arranged at ends of at least some of the branch rods, both ends of the support member are curved or bent towards a same side, resulting in that the support member surrounds to form a penetrating zone, and an opening for communicating the penetrating zone is formed between both ends of the support member. Both ends of the support member are curved or bent towards a same side, resulting in that the support member surrounds to form a penetrating zone, and an opening for communicating the penetrating zone is formed between both ends of the support member.

A heater according to an embodiment includes: a tubular portion; a sealing portion provided in each of both end portions of the tubular portion; a conductive portion provided inside each sealing portion; a heating portion provided inside the tubular portion, extending along a tube axis of the tubular portion, and including carbons; an inner lead provided in each sealing portion so that one end portion side is connected to the conductive portion and the other end portion side is exposed into the tubular portion; and a connection portion connected to each of both end portions of the heating portion inside the tubular portion. A bent portion is provided in an end portion opposite to the conductive portion in each inner lead. The bent portion is bent in a direction in which the sealing portions face each other and is provided inside a hole of the connection portion.

Methods and apparatus disclosed herein generally relate to lamp heating of process chambers used to process semiconductor substrates. More specifically, implementations disclosed herein relate to arrangement and control of lamps for heating of semiconductor substrates. In some implementations of the present disclosure, fine-tuning of temperature control is achieved by dividing different lamps within an array of lamps into various subgroups or lamp assemblies defined by a specific characteristic. These various subgroups may be based on characteristics such as lamp design and/or lamp positioning within the processing chamber.

A heater according to an embodiment includes: a tubular portion; a sealing portion provided in each of both end portions of the tubular portion; a conductive portion provided inside each sealing portion; a heating portion provided inside the tubular portion, extending along a tube axis of the tubular portion, and including carbons; an inner lead provided in each sealing portion so that one end portion side is connected to the conductive portion and the other end portion side is exposed into the tubular portion; and a connection portion connected to each of both end portions of the heating portion inside the tubular portion. A bent portion is provided in an end portion opposite to the conductive portion in each inner lead. The bent portion is bent in a direction in which the sealing portions face each other and is provided inside a hole of the connection portion.

To aim at a prevention of an occurrence of failure in and an extension of the life span of an incandescent light bulb by reducing the impact of an external force, which is applied to an outer lead wire positioned outside a bulb, on the connections between the lead wire and another element when manufacturing the incandescent light bulb, especially in a socket mounting process. In an incandescent light bulb wherein a filament assembly having filaments and lead wires which support the filaments is sealed in a bulb, a shape which, being easy to bend, enables a reduction in the impact of an applied external force on another element is imparted to a region of a predetermined length which includes the boundary of the lead wires between inside and outside the bulb. For example, a region in which the cross-sectional shape of the lead wires is changed by crushing is provided.

An electrode embedded member includes a plate-shaped substrate having a front surface and a back surface and that is made of a ceramic, an inner electrode extending parallel to the front surface of the substrate and that is embedded in the substrate, a connection member extending parallel to the front surface of the substrate and that is disposed so as to overlap the inner electrode, and a terminal connected to the connection member. The electrode embedded member has a predetermined structure including at least one of the following: a first predetermined structure in which a thickness of at least a part of the connection member in a direction perpendicular to the front surface of the substrate is 0.2 mm or smaller; a second predetermined structure in which the connection member includes a cutout portion; and a third predetermined structure in which the connection member is composed of a mesh structure.

An infrared emitter that comprises a cladding tube made of quartz glass that surrounds a heating filament as an infrared radiation-emitting element that is connected via current feedthroughs to an electrical connector outside the cladding tube. To improve the service life and power density, the heating filament comprises a carrier plate with a surface made of an electrically insulating material, whereby the surface is covered by a printed conductor made of a material that generates heat when current flows through it.

An infrared emitter that comprises a cladding tube made of quartz glass that surrounds a heating filament as an infrared radiation-emitting element that is connected via current feedthroughs to an electrical connector outside the cladding tube. To improve the service life and power density, the heating filament comprises a carrier plate with a surface made of an electrically insulating material, whereby the surface is covered by a printed conductor made of a material that generates heat when current flows through it.

A light-emitting device includes: a substrate having a groove extending in a first direction and a first surface and a second surface respectively arranged to sandwich the groove in a second direction; a first electrode provided on the first surface; a second electrode provided on the second surface; a graphite thin film provided on the first electrode and the second electrode and extending from the first electrode to the second electrode along the second direction in such a way as to be astride the groove; a third electrode provided on the graphite thin film in such a way as to be opposite the first electrode via the graphite thin film; and a fourth electrode provided on the graphite thin film in such a way as to be opposite the second electrode via the graphite thin film.