A bonding tool for bonding semiconductor dies to a semiconductor wafer is provided. The bonding tool includes a wafer chuck, an edge support, a hard plate, and a buffer layer. The wafer chuck carries the semiconductor wafer and the semiconductor dies placed on the semiconductor wafer. The edge support is disposed on the wafer chuck, the semiconductor wafer and the semiconductor dies are laterally surrounded by the edge support, and a top surface of the edge support substantially levels with surfaces of the semiconductor dies. The hard plate is movably disposed over the semiconductor dies, the edge support and the wafer chuck. The buffer layer is disposed on a bottom surface of the hard plate, and the buffer layer is in contact with the top surface of the edge support and the semiconductor dies when the hard plate moves towards the edge support.

Provided is a position alignment device including: a positional relationship detector configured to detect a positional relationship between a target mark position registered by a pickup-side registration part and a target mark position registered by a bonding-side registration part; a pickup-side offset amount detector configured to detect an offset amount of offset between a target mark position in an image taken by a pickup-side imaging part and the target mark position registered by the pickup-side registration part; and a position adjuster configured to adjust a bonding position, based on the offset amount detected by the pickup-side offset amount detector, an offset amount detected by a bonding-side offset amount detector, and the positional relationship detected by the positional relationship detector.

A system that includes a self-assembly module and a bonding module. The self-assembly module has a liquid dispensing unit, with an applicator and a reservoir for a liquid, that dispenses the liquid onto a wafer, a wafer support, an environmental control unit, a die and wafer transport mechanism, and a processor. A method for performing the hybrid bonding includes providing a wafer, patterning the wafer to form a hydrophobic surface with a plurality of hydrophilic regions, disposing the wafer on the wafer support in the self-assembly module of the hybrid bonding system, dispensing the liquid simultaneously or in batches on the plurality of hydrophilic regions on the wafer, positioning dies on the plurality of hydrophilic regions on the wafer, controlling the humidity and bonding the dies to the wafer using a hybrid bonding process.

A solder reflow apparatus may include a reflow chamber, a heater and a stage. The reflow chamber may be configured to receive a heat transfer fluid. The heat transfer fluid may be configured for transferring heat to a solder for mounting an electronic part on a substrate. The heater may be configured to heat the heat transfer fluid in the reflow chamber. The stage may be in the reflow chamber to support the substrate. The stage may be inclined to a bottom surface of the reflow chamber to induce the heat transfer fluid toward a central portion of the substrate. Thus, the vertically ascended heat transfer fluid may be uniformly applied to the central portion and an edge portion of the substrate so that the solders at the central portion and the edge portion of the substrate may be uniformly soldered.

A first carrier comprises a plurality of regions. Each region comprises a first zone and a second zone. The second zone comprises a portion that surrounds the first zone. Each first zone comprises a hydrophilic surface, and each second zone comprises a hydrophobic surface. A first liquid is deposited on the first carrier. The plurality of regions are aligned with a plurality of dies on a second carrier. The dies are transferred from the second carrier to the first carrier. A second liquid is deposited on a substrate, which includes a plurality of bond areas. Each die bond area comprises a hydrophilic surface. The dies are transferred from the first carrier to the substrate.

A semiconductor reflow apparatus includes a conveyor comprising a laterally moveable surface configured to move in a first direction, a pickup tool including a head disposed above the conveyor, and an induction heating coil configured to generate a magnetic field in a direction passing through a surface of the conveyor, wherein the pickup tool is further configured to move the head in a vertical direction toward the conveyor.

The present invention provides a bonding apparatus that performs a process of bonding a first member to a second member, comprising: a first holder configured to hold a chuck to be brought into contact with the first member in the process; a second holder configured to hold the chuck in attachment of the chuck to the first holder and/or detachment of the chuck from the first holder; a first attraction force generating mechanism configured to generate a first attraction force between the first holder and the chuck; a second attraction force generating mechanism configured to generate a second attraction force between the second holder and the chuck; and a controller configured to adjust at least one of the first attraction force and the second attraction force.

Disclosed are a chip bonding apparatus for semiconductor packaging and a semiconductor packaging method using the same. The chip bonding apparatus may include a bonding head, wherein the bonding head may include a plurality of chip holding units, each of which is configured to individually hold a chip, and the bonding head may be configured to adjust the interval between the plurality of chip holding units. The chip bonding apparatus may be configured to bond a plurality of chips to a given target surface at controlled intervals using the plurality of chip holding units according to a multi-chip bonding method. The semiconductor packaging method may include bonding chips to a target surface of a carrier substrate at controlled intervals using the plurality of chip holding units according to the multi-chip bonding method.

A manufacturing method of a semiconductor device includes: a first step of, after joining a wire to an electrode using a capillary, forming a wire part by moving the capillary to a third target point while feeding out the wire; a second step of forming a bent part by moving the capillary to a fourth target point while feeding out the wire; a third step of processing the bent part into a planned cut part by repeating lowering and raising of the capillary for multiple times; and a fourth step of cutting the wire at the planned cut part by raising the capillary with a wire clamper closed to form a pin wire.

A wire bonding apparatus includes: a capillary, performing predetermined processing on a workpiece and movable with respect to the workpiece; an optical mechanism, moving together with the capillary; and a controller. The optical mechanism includes: a first imaging unit, acquiring a first image obtained by imaging a standard point set within an imaging range; and a second imaging unit, acquiring a second image obtained by imaging a reference point formed at a predetermined distance from the capillary. The controller positions the capillary with respect to the workpiece based on the first image, and calculates a positioning correction amount of the capillary based on the second image.